This document defines terms for surface chemical analysis. It covers general terms and those used in spectroscopy, while ISO 18115‑2 covers terms used in scanning-probe microscopy and ISO 18115‑3 covers terms used in optical interface analysis.

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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This document defines terms for surface chemical analysis. ISO 18115-1 covers general terms and those used in spectroscopy while this document covers terms used in scanning probe microscopy.

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ISO 18115-2:2013 defines terms for surface chemical analysis.

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ISO 18115-1:2013 defines terms for surface chemical analysis. It covers general terms and those used in spectroscopy.

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ISO 18115 is a vocabulary, published in two parts, which defines terms for surface chemical analysis. ISO 18115-1:2010 covers general terms and those used in spectroscopy while ISO 18115-2:2010 covers terms used in scanning-probe microscopy.

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ISO 18115 is a vocabulary, published in two parts, which defines terms for surface chemical analysis. ISO 18115-1:2010 covers general terms and those used in spectroscopy while ISO 18115-2:2010 covers terms used in scanning-probe microscopy.

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