ASTM E1016-07
(Guide)Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
SIGNIFICANCE AND USE
The analyst may use this document to obtain information on the properties of electron spectrometers and instrumental aspects associated with quantitative surface analysis.
SCOPE
1.1 The purpose of this guide is to familiarize the analyst with some of the relevant literature describing the physical properties of modern electrostatic electron spectrometers.
1.2 This guide is intended to apply to electron spectrometers generally used in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS).
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
General Information
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Standards Content (Sample)
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E1016 − 07
StandardGuide for
Literature Describing Properties of Electrostatic Electron
1
Spectrometers
This standard is issued under the fixed designation E1016; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope ISO 21270 Surface Chemical Analysis—X-Ray Photoelec-
tron and Auger Electron Spectrometers—Linearity of
1.1 The purpose of this guide is to familiarize the analyst
Intensity Scale
with some of the relevant literature describing the physical
ISO 24236 Surface Chemical Analysis—Auger Electron
properties of modern electrostatic electron spectrometers.
Spectroscopy—Repeatability and Constancy of Intensity
1.2 Thisguideisintendedtoapplytoelectronspectrometers
Scale
generally used in Auger electron spectroscopy (AES) and
ISO 24237 Surface Chemical Analysis—X-Ray Photoelec-
X-ray photoelectron spectroscopy (XPS).
tron Spectroscopy—Repeatability and Constancy of In-
1.3 This standard does not purport to address all of the
tensity Scale
safety concerns, if any, associated with its use. It is the
3. Terminology
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
3.1 For definitions of terms used in this guide, refer to
bility of regulatory limitations prior to use.
Terminology E673.
2. Referenced Documents
4. Summary of Guide
2
2.1 ASTM Standards:
4.1 This guide serves as a resource for relevant literature
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
which describes the properties of electron spectrometers com-
3
2012)
monly used in surface analysis.
E902 Practice for Checking the Operating Characteristics of
3
X-Ray Photoelectron Spectrometers (Withdrawn 2011) 5. Significance and Use
E1217 Practice for Determination of the Specimen Area
5.1 The analyst may use this document to obtain informa-
Contributing to the Detected Signal in Auger Electron
tion on the properties of electron spectrometers and instrumen-
Spectrometers and Some X-Ray Photoelectron Spectrom-
tal aspects associated with quantitative surface analysis.
eters
E2108 Practice for Calibration of the Electron Binding-
6. General Description of Electron Spectrometers
Energy Scale of an X-Ray Photoelectron Spectrometer
6.1 An electron spectrometer is typically used to measure
4
2.2 ISO Standards:
the energy and angular distributions of electrons emitted from
ISO 18516 Surface Chemical Analysis—Auger Electron
a specimen, typically for energies in the range 0 to 2500 eV. In
Spectroscopy and X-Ray Photoelectron Spectrsocopy—
surface analysis applications, the analyzed electrons are pro-
Determination of Lateral Resolution
duced from the bombardment of a sample surface with
electrons, photons or ions. The entire spectrometer instrument
1 may include one or more of the following: (1) apertures to
This guide is under the jurisdiction of ASTM Committee E42 on Surface
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
define the specimen area and emission solid angle for the
Spectroscopy and X-Ray Photoelectron Spectroscopy.
electrons accepted for analysis; (2) an electrostatic or magnetic
Current edition approved June 1, 2007. Published June 2007. Originally
lens system, or both; (3) an electrostatic (dispersing) analyzer;
approved in 1984. Last previous edition approved in 2002 as E1016 – 96 (2002).
and (4) a detector. Methods to check the operating character-
DOI: 10.1520/E1016-07.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
istics of X-ray photoelectron spectrometers are reported in
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Practice E902.
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
6.2 Intensity Scale Calibration and Spectrometer Transmis-
3
The last approved version of this historical standard is referenced on
sion Function—Quantitative analysis requires the determina-
www.astm.org.
4
tion of the ability of the spectrometer to transmit electrons, and
Available from International Organization for Standardization (ISO), 1 rue de
Varembé, Case postale 56, CH-1211, Geneva 20, Switzerland, http://www.iso.ch. the resultant detector signal, throughout the spectrometer
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E1016 − 07
instrument. This can be described by an overall electron trometersoftenusecylindricalmirroranalyzer(CMA)designs,
energy-dependent transmission function Q(E
...
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