ASTM F1376-92(1999)
(Guide)Standard Guide for Metallurgical Analysis for Gas Distribution System Components
Standard Guide for Metallurgical Analysis for Gas Distribution System Components
SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.
1.2 Elements analyzed and reported in this guide are as follows:
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
1.2.4 Nitrogen and oxygen gases,
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, and
1.2.6 Available standard analytical and reporting techniques are described for these elements.
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.
1.4 Limitations:
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.6 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Designation:F 1376–92 (Reapproved 1999)
Standard Guide for
Metallurgical Analysis for Gas Distribution System
Components
This standard is issued under the fixed designation F 1376; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This guide
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope 1.4.2 Thetestmethodscitedinthisguidearenotintendedto
preclude the use of other generally accepted techniques of
1.1 This guide covers corrosion resistant metallic alloys of
demonstrated equivalent or superior precision and bias.
the general class stainless steel, containing chromium, nickel,
1.4.3 Inclusion of testing and analysis procedures for any
manganese, and silicon as major alloying additions and possi-
givenelementormetallurgicalcharacteristicinthisguideisnot
bly molybdenum, that are qualified or specified for the mate-
to be construed as being a requirement for incorporation of that
rials of components used in high-purity gas supply systems for
element or metallurgical characteristic into any specifications.
the semiconductor industry. This guide is primarily intended
1.5 The values stated in SI units are to be regarded as the
fortestingtodetermineconformancetoapplicablecomposition
standard. The inch-pound units given in parentheses are for
and metallurgical specifications as stated in supplier product
information only.
specifications or customer purchase specifications, or both.
1.6 This standard does not purport to address all of the
1.2 Elements analyzed and reported in this guide are as
safety concerns, if any, associated with its use. It is the
follows:
responsibility of the user of this standard to establish appro-
1.2.1 The alloying additions chromium, nickel, and molyb-
priate safety and health practices and determine the applica-
denum (if specified in alloy, as in type 316L),
bility of regulatory limitations prior to use.
1.2.2 The minor elements and residuals manganese, silicon,
copper, cobalt, and stabilizers such as titanium and columbium
2. Referenced Documents
(niobium), if present,
2.1 ASTM Standards:
1.2.3 Carbon, sulfur and phosphorus,
A262 PracticesforDetectingSusceptibilitytoIntergranular
1.2.4 Nitrogen and oxygen gases,
Attack in Austenitic Stainless Steels
1.2.5 Any additional minor element additions that may be
A 370 Test Methods and Definitions for MechanicalTesting
made as part of the melting and casting practice, such as
of Steel Products
aluminum and calcium,
A 479/A 479M Specification for Stainless and Heat-
1.2.6 Available standard analytical and reporting techniques
Resisting Steel Bars and Shapes for Use in Boilers and
are described for these elements.
Other Pressure Vessels
1.3 Metallurgicalcharacteristicstobeanalyzedandreported
A 484/A 484M Specification for General Requirements for
are inclusion contents, grain structure, mechanical properties,
Stainless and Heat-Resisting Steel Bars, Billets, and Forg-
and intergranular corrosion susceptibility.
ings
1.4 Limitations:
A 751 Test Methods, Practices, and Terminology for
1.4.1 This guide is limited to corrosion resistant metal
Chemical Analysis of Steel Products
alloys of the general class stated in the Scope.
1 2
This guide is under the jurisdiction of ASTM Committee F01 on Electronics For referenced ASTM standards, visit the ASTM website, www.astm.org, or
and is the direct responsibility of Subcommittee F01.10 on Processing Environ- contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
ments. Standards volume information, refer to the standard’s Document Summary page on
Current edition published Feb. 15, 1992. Approved April 1992. the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
F 1376–92 (1999)
E 8 Test Methods of Tension Testing of Metallic Materials 6. Procedure
E 29 Practice for Using Significant Digits in Test Data to
6.1 The general requirements of Specification A 484/
Determine Conformance with Specifications
A 484M prevail for verification analysis, sampling, and test
E45 TestMethodsforDeterminingtheInclusionContentof
methods.
Steel
6.2 SpecificationA 479/A 479M prevails for the determina-
E112 TestMethodsforDeterminingtheAverageGrainSize
tion of conformance of test results to ASTM standard require-
E 353 Test Methods for Chemical Analysis of Stainless,
ments.
Heat-Resisting, Maraging, and Other Similar Chromium-
6.3 Chemical Analysis:
Nickel-Iron Alloys
6.3.1 The definitions, reference methods, practices, and
E 572 Test Method for X-Ray Emission Spectrometric
reporting related to the chemical analysis of stainless steel
Analysis of Stainless Steel
alloys for this application shall be in accordance with Test
E 1019 Test Methods for Determination of Carbon, Sulfur,
Methods A 751.
Nitrogen, Oxygen, and Hydrogen in Steel and in Iron,
6.3.2 Use the following wet chemical test methods as
Nickel, and Cobalt Alloys
control test methods and as the basis for standardizing instru-
E 1086 Test Method for Optical Emission Vacuum Spectro-
mental analysis techniques, in accordance with Test Method
metric Analysis of Stainless Steel by the Point-to-Plane
E 353:
Excitation Technique
Concentration Test Method E353,
Element
E 1122 Practice for Obtaining JK Inclusion Ratings Using
Range, % Sections
Chromium 0.10 to 35.00 212 to 220
Automatic Image Analysis
Nickel 10.1 to 48.00 172 to 179
E 1245 Practice for Determining the Inclusion or Second-
Molybdenum 1.5 to 7.0 242 to 249
Phase Constituent Content of Metals by Automatic Image
Manganese 0.01 to 5.00 8 to 17
Silicon 0.05 to 4.00 46 to 52
Analysis
Copper 0.01 to 5.00 82 to 89
E 1282 Guide for Specifying the Chemical Compositions
Copper 0.01 to 5.00 109 to 118
and Selecting Sampling Practices and Quantitative Analy-
Cobalt 0.01 to 5.00 61 to 70
Titanium 0.01 to 0.35 231 to 241
sis Methods for Metals, Ores, and Related Materials
Sulfur 0.005 to 0.50 37 to 45
E 1382 Test Methods for Determining the Average Grain
Phosphorus 0.002 to 0.35 18 to 29
Size Using Semiautomatic and Automatic Image Analysis
Phosphorus 0.02 to 0.35 164 to 171
Aluminum 0.003 to 0.20 71 to 81
3. Terminology
6.3.2.1 Apparatus, test procedures and data analysis are
3.1 Definitions:
described in the appropriate sections of theTest Method E 353.
3.1.1 heat analysis—chemical analysis of the heat of stain-
6.3.3 Use the method of optical emission vacuum spectro-
less steel determined by analyzing a sample obtained during
metric analysis in accordance with Method E 1086 for heat
the pouring of the heat for the elements designated in a
analysis or verification analysis of stainless steel samples that
specification.
can be prepared with a flat surface of 13-mm (0.5-in.)
3.1.2 inclusion—discrete second phases (oxides, sulfides,
minimum diameter. This test method provides analysis of the
carbides, inter-metallic compounds) that are distributed in the
following elements in the concentration ranges shown:
metal matrix.
Concentration
Element
3.1.3 verification analysis—chemical analysis of a semifin-
Range,%
Chromium 17.0 to 23.0
ished or finished product for the purpose of determining
Nickel 7.5 to 13.0
conformance to applicable specifications.
Molybdenum 0.01 to 3.0
Manganese 0.01 to 2.0
4. Significance and Use
Silicon 0.01 to 0.90
Copper 0.
...
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