ASTM F1376-92(2012)
(Guide)Standard Guide for Metallurgical Analysis for Gas Distribution System Components
Standard Guide for Metallurgical Analysis for Gas Distribution System Components
SIGNIFICANCE AND USE
4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation.
4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.
1.2 Elements analyzed and reported in this guide are as follows:
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
1.2.4 Nitrogen and oxygen gases,
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium,
1.2.6 Available standard analytical and reporting techniques are described for these elements.
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.
1.4 Limitations:
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
General Information
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Standards Content (Sample)
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Designation: F1376 − 92 (Reapproved 2012)
Standard Guide for
Metallurgical Analysis for Gas Distribution System
Components
This standard is issued under the fixed designation F1376; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This guide
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope 1.4.2 Thetestmethodscitedinthisguidearenotintendedto
preclude the use of other generally accepted techniques of
1.1 This guide covers corrosion resistant metallic alloys of
demonstrated equivalent or superior precision and bias.
the general class stainless steel, containing chromium, nickel,
1.4.3 Inclusion of testing and analysis procedures for any
manganese, and silicon as major alloying additions and possi-
givenelementormetallurgicalcharacteristicinthisguideisnot
bly molybdenum, that are qualified or specified for the mate-
to be construed as being a requirement for incorporation of that
rials of components used in high-purity gas supply systems for
element or metallurgical characteristic into any specifications.
the semiconductor industry. This guide is primarily intended
fortestingtodetermineconformancetoapplicablecomposition 1.5 The values stated in SI units are to be regarded as the
and metallurgical specifications as stated in supplier product standard. The inch-pound units given in parentheses are for
specifications or customer purchase specifications, or both. information only.
1.6 This standard does not purport to address all of the
1.2 Elements analyzed and reported in this guide are as
safety concerns, if any, associated with its use. It is the
follows:
responsibility of the user of this standard to establish appro-
1.2.1 The alloying additions chromium, nickel, and molyb-
priate safety and health practices and determine the applica-
denum (if specified in alloy, as in type 316L),
bility of regulatory limitations prior to use.
1.2.2 The minor elements and residuals manganese, silicon,
copper, cobalt, and stabilizers such as titanium and columbium
2. Referenced Documents
(niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
2.1 ASTM Standards:
1.2.4 Nitrogen and oxygen gases,
A262 Practices for Detecting Susceptibility to Intergranular
1.2.5 Any additional minor element additions that may be
Attack in Austenitic Stainless Steels
made as part of the melting and casting practice, such as
A370 Test Methods and Definitions for Mechanical Testing
aluminum and calcium,
of Steel Products
1.2.6 Available standard analytical and reporting techniques
A479/A479M Specification for Stainless Steel Bars and
are described for these elements.
Shapes for Use in Boilers and Other Pressure Vessels
A484/A484M Specification for General Requirements for
1.3 Metallurgicalcharacteristicstobeanalyzedandreported
Stainless Steel Bars, Billets, and Forgings
are inclusion contents, grain structure, mechanical properties,
A751 Test Methods, Practices, and Terminology for Chemi-
and intergranular corrosion susceptibility.
cal Analysis of Steel Products
1.4 Limitations:
E8 Test Methods for Tension Testing of Metallic Materials
1.4.1 This guide is limited to corrosion resistant metal
E45 Test Methods for Determining the Inclusion Content of
alloys of the general class stated in the Scope.
Steel
This guide is under the jurisdiction of ASTM Committee F01 on Electronics
and is the direct responsibility of Subcommittee F01.10 on Contamination Control. For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Current edition published July 1, 2012. Published August 2012. Originally contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
approvedin1992.Lastpreviouseditionapprovedin2005asF1376–92(2005).DOI: Standards volume information, refer to the standard’s Document Summary page on
10.1520/F1376-92R12. the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1376 − 92 (2012)
E112 Test Methods for Determining Average Grain Size 6. Procedure
E353 Test Methods for Chemical Analysis of Stainless,
6.1 ThegeneralrequirementsofSpecificationA484/A484M
Heat-Resisting, Maraging, and Other Similar Chromium-
prevail for verification analysis, sampling, and test methods.
Nickel-Iron Alloys
6.2 Specification A479/A479M prevails for the determina-
E572 Test Method forAnalysis of Stainless andAlloy Steels
tion of conformance of test results to ASTM standard require-
by X-ray Fluorescence Spectrometry
ments.
E1019 Test Methods for Determination of Carbon, Sulfur,
6.3 Chemical Analysis:
Nitrogen, and Oxygen in Steel, Iron, Nickel, and Cobalt
6.3.1 The definitions, reference methods, practices, and
Alloys by Various Combustion and Fusion Techniques
reporting related to the chemical analysis of stainless steel
E1086 Test Method for Atomic Emission Vacuum Spectro-
alloys for this application shall be in accordance with Test
metric Analysis of Stainless Steel by Point-to-Plane Ex-
Methods A751.
citation Technique
6.3.2 Use the following wet chemical test methods as
E1122 Practice for Obtaining JK Inclusion Ratings Using
control test methods and as the basis for standardizing instru-
Automatic Image Analysis (Withdrawn 2006)
mental analysis techniques, in accordance with Test Method
E1245 Practice for Determining the Inclusion or Second-
E353:
Phase Constituent Content of Metals byAutomatic Image
Analysis
Concentration Test Method E353,
Element
Range, % Sections
E1282 GuideforSpecifyingtheChemicalCompositionsand
Chromium 0.10 to 35.00 212 to 220
Selecting Sampling Practices and Quantitative Analysis
Nickel 10.1 to 48.00 172 to 179
Methods for Metals, Ores, and Related Materials
Molybdenum 1.5 to 7.0 242 to 249
Manganese 0.01 to 5.00 8 to 17
E1382 Test Methods for Determining Average Grain Size
Silicon 0.05 to 4.00 46 to 52
Using Semiautomatic and Automatic Image Analysis
Copper 0.01 to 5.00 82 to 89
Copper 0.01 to 5.00 109 to 118
3. Terminology Cobalt 0.01 to 5.00 61 to 70
Titanium 0.01 to 0.35 231 to 241
3.1 Definitions:
Sulfur 0.005 to 0.50 37 to 45
Phosphorus 0.002 to 0.35 18 to 29
3.1.1 heat analysis—chemical analysis of the heat of stain-
Phosphorus 0.02 to 0.35 164 to 171
less steel determined by analyzing a sample obtained during
Aluminum 0.003 to 0.20 71 to 81
the pouring of the heat for the elements designated in a
6.3.2.1 Apparatus, test procedures and data analysis are
specification.
described in the appropriate sections of the Test Method E353.
3.1.2 inclusion—discrete second phases (oxides, sulfides,
6.3.3 Use the method of optical emission vacuum spectro-
carbides, inter-metallic compounds) that are distributed in the
metric analysis in accordance with Method E1086 for heat
metal matrix.
analysis or verification analysis of stainless steel samples that
3.1.3 verification analysis—chemical analysis of a semifin- can be prepared with a flat surface of 13-mm (0.5-in.)
ished or finished product for the purpose of determining minimum diameter. This test method provides analysis of the
conformance to applicable specifications. following elements in the concentration ranges shown:
Concentration
Element
4. Significance and Use
Range,%
Chromium 17.0 to 23.0
4.1 This guide defines a procedure for testing components
Nickel 7.5 to 13.0
being considered for installation into a high-purity gas distri- Molybdenum 0.01 to 3.0
Ma
...
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