ASTM F1438-93(2020)
(Test Method)Standard Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy for Gas Distribution System Components (Withdrawn 2023)
Standard Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy for Gas Distribution System Components (Withdrawn 2023)
SIGNIFICANCE AND USE
5.1 The use of STM images and data is for purposes of textural quality assessment and calculation of figures of merit, and for high purity gas system clean room components.
5.2 This test method defines a standard data presentation format and suggests figures of merit that utilize STM's ability to analyze three-dimensional surface features.
SCOPE
1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.
1.2 Limitations:
1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than Ra = 0.25 μm, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.
1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.
1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.
1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.
1.4 The values stated in SI units are to be regarded as the standard.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.
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This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1438 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Surface Roughness by Scanning
Tunneling Microscopy for Gas Distribution System
1
Components
This standard is issued under the fixed designation F1438; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredfor
use in such systems.
1. Scope 1.5 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
1.1 Thepurposeofthistestmethodistodefineamethodfor
responsibility of the user of this standard to establish appro-
analyzing the surface texture of the above-mentioned compo-
priate safety, health, and environmental practices and deter-
nents using a scanning tunneling microscope (STM). STM is a
mine the applicability of regulatory limitations prior to use.
noncontact method of surface profiling that can measure
1.6 This international standard was developed in accor-
three-dimensionalsurfacefeaturesinthenanometersizerange,
dance with internationally recognized principles on standard-
which can then be used to represent the surface texture or to
ization established in the Decision on Principles for the
providefiguresofmerit.Applicationofthistestmethod,where
Development of International Standards, Guides and Recom-
surface texture is used as a selection criterion, is expected to
mendations issued by the World Trade Organization Technical
yield comparable data among different components tested.
Barriers to Trade (TBT) Committee.
1.2 Limitations:
1.2.1 This test method is limited to characterization of 2. Referenced Documents
stainless steel surfaces that are smoother than R =0.25 µm, as
a
2.1 ASTM Standards:
determined by a contact-stylus profilometer and defined by
E691Practice for Conducting an Interlaboratory Study to
2
ANSI B46.1.The magnifications and height scales used in this
Determine the Precision of a Test Method
test method were chosen with this smoothness in mind.
2.2 ANSI Standard:
1.2.2 Intentional etching or conductive coating of the sur-
ANSI B.46.1-85,“Surface Texture (Surface Roughness,
faceareconsideredmodificationsofthegas-wettedsurfaceand 3
Waviness, and Lay),” ANSI/ASME, 1985
are not covered by this test method.
1.2.3 This test method does not cover steels that have an
3. Terminology
oxide layer too thick to permit tunneling under the test
3.1 Definitions of Terms Specific to This Standard:
conditions outlined in 11.3.
3.1.1 artifact—anycontributiontoanimagefromotherthan
1.3 This technique is written with the assumption that the
true surface morphology. This could include such examples as
STM operator understands the use of the instrument, its vibration, electronic noise, thermal drift, or tip imperfections.
governing principles, and any artifacts that can arise. Discus-
3.1.2 center line (graphical center line)—lineparalleltothe
sion of these points is beyond the scope of this test method.
directionofprofilemeasurement,suchthatthesumoftheareas
1.4 The values stated in SI units are to be regarded as the contained between it and the profile contained on either side
are equal (see Calculation Section).
standard.
1 2
This test method is under the jurisdiction of ASTM Committee F01 on For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamina- contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
tion Control. Standards volume information, refer to the standard’s Document Summary page on
Current edition approved April 15, 2020. Published May 2020. Originally the ASTM website.
3
approvedin1993.Lastpreviouseditionapprovedin2012asF1438–93(2012).DOI: Available fromAmerican National Standards Institute, 13th Floor, 11 W. 42nd
10.1520/F1438-93R20. St., New York, NY 10036.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1438 − 93 (2020)
3.1.3 cutoff length (l )—for profiles in this context, the 3.1.22 tip crash—touchingoftiptosurface,duringrastering
c
sampling length, that is, the length of a single scan, in orattemptstoinitiatetunneling,usuallyresultingindamageto
nanometers (see Calculation Section)
...
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1438 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Surface Roughness by Scanning
Tunneling Microscopy for Gas Distribution System
1
Components
This standard is issued under the fixed designation F1438; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope 1.5 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
1.1 The purpose of this test method is to define a method for
responsibility of the user of this standard to establish appro-
analyzing the surface texture of the above-mentioned compo-
priate safety, health, and environmental practices and deter-
nents using a scanning tunneling microscope (STM). STM is a
mine the applicability of regulatory limitations prior to use.
noncontact method of surface profiling that can measure
1.6 This international standard was developed in accor-
three-dimensional surface features in the nanometer size range,
dance with internationally recognized principles on standard-
which can then be used to represent the surface texture or to
ization established in the Decision on Principles for the
provide figures of merit. Application of this test method, where
Development of International Standards, Guides and Recom-
surface texture is used as a selection criterion, is expected to
mendations issued by the World Trade Organization Technical
yield comparable data among different components tested.
Barriers to Trade (TBT) Committee.
1.2 Limitations:
1.2.1 This test method is limited to characterization of 2. Referenced Documents
stainless steel surfaces that are smoother than R = 0.25 µm, as
a
2.1 ASTM Standards:
determined by a contact-stylus profilometer and defined by
E691 Practice for Conducting an Interlaboratory Study to
ANSI B46.1. The magnifications and height scales used in this 2
Determine the Precision of a Test Method
test method were chosen with this smoothness in mind.
2.2 ANSI Standard:
1.2.2 Intentional etching or conductive coating of the sur-
ANSI B.46.1-85, “Surface Texture (Surface Roughness,
3
face are considered modifications of the gas-wetted surface and
Waviness, and Lay),” ANSI/ASME, 1985
are not covered by this test method.
1.2.3 This test method does not cover steels that have an 3. Terminology
oxide layer too thick to permit tunneling under the test
3.1 Definitions of Terms Specific to This Standard:
conditions outlined in 11.3.
3.1.1 artifact—any contribution to an image from other than
1.3 This technique is written with the assumption that the true surface morphology. This could include such examples as
STM operator understands the use of the instrument, its
vibration, electronic noise, thermal drift, or tip imperfections.
governing principles, and any artifacts that can arise. Discus-
3.1.2 center line (graphical center line)—line parallel to the
sion of these points is beyond the scope of this test method.
direction of profile measurement, such that the sum of the areas
contained between it and the profile contained on either side
1.4 The values stated in SI units are to be regarded as the
standard. are equal (see Calculation Section).
1 2
This test method is under the jurisdiction of ASTM Committee F01 on For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamina- contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
tion Control. Standards volume information, refer to the standard’s Document Summary page on
Current edition approved April 15, 2020. Published May 2020. Originally the ASTM website.
3
approved in 1993. Last previous edition approved in 2012 as F1438–93(2012). DOI: Available from American National Standards Institute, 13th Floor, 11 W. 42nd
10.1520/F1438-93R20. St., New York, NY 10036.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1438 − 93 (2020)
3.1.3 cutoff length (l )—for profiles in this context, the 3.1.22 tip crash—touching of tip to surface, during rastering
c
sampling length, that is, the length of a single scan, in or attempts to initiate tunneling, usually resulting in damage to
nanometers (see Calculation Section). one or both.
3.1.4 current— in this
...
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