ASTM F1375-92(2012)
(Test Method)Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
1.2 This test method applies to all steel surfaces of components such as tubings, connectors, regulators, and valves, regardless of size, style, or type.
1.3 Limitations:
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.
General Information
Relations
Standards Content (Sample)
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1375 − 92 (Reapproved 2012)
Standard Test Method for
Energy Dispersive X-Ray Spectrometer (EDX) Analysis of
Metallic Surface Condition for Gas Distribution System
Components
This standard is issued under the fixed designation F1375; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope 2. Referenced Documents
2.1 ASTM Standards:
1.1 This test method establishes a procedure for comparing
F1372 Test Method for Scanning Electron Microscope
the elemental composition of normal surfaces with any defects
(SEM) Analysis of Metallic Surface Condition for Gas
found on the surfaces of metal tubing, fittings, valves, or any
Distribution System Components
metal component.
1.2 This test method applies to all steel surfaces of compo-
3. Terminology
nents such as tubings, connectors, regulators, and valves,
3.1 Definitions of Terms Specific to This Standard:
regardless of size, style, or type.
3.1.1 normal surface—an area of the sample that does not
exhibit any visible defect when viewed under the stipulated
1.3 Limitations:
SEM magnification. Normal surface is used to provide a
1.3.1 This test method is intended for use by scanning
baseline for comparison with any area exhibiting a defect.
electron microscope/energy dispersive x-ray spectrometer
3.1.2 sample angle—the angle measured normal to the
(SEM/EDX) operators with skill level typically achieved over
a twelve-month period. incoming electron beam.
1.3.2 SEM used for this study should conform to those 3.1.3 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
limitations outlined in Test Method F1372 and should have a 32.0°F).
minimum point-to-point resolution of 30 nm.
3.1.4 working distance—the measured distance from the
bottom of the objective lens to the sample.
1.4 The values stated in SI units are to be regarded as the
standard. The inch-pound units given in parentheses are for
4. Significance and Use
information only.
4.1 The purpose of this test method is to define a procedure
1.5 This standard does not purport to address all of the
for testing components being considered for installation into a
safety concerns, if any, associated with its use. It is the
high-purity gas distribution system. Application of this test
responsibility of the user of this standard to establish appro-
method is expected to yield comparable data among compo-
priate safety and health practices and determine the applica-
nents tested for purposes of qualification for this installation.
bility of regulatory limitations prior to use. Specific hazard
statements are given in Section 6.
5. Apparatus
5.1 Materials:
This test method is under the jurisdiction of ASTM Committee F01 on
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
tion Control. For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Current edition approved July 1, 2012. Published August 2012. Originally contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
approvedin1992.Lastpreviouseditionapprovedin2005asF1375–92(2005).DOI: Standards volume information, refer to the standard’s Document Summary page on
10.1520/F1375-92R12. the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1375 − 92 (2012)
5.1.1 Mounting Stubs, specific to the instrument used are 8.2 Magnification for qualitative and quantitative analysis
required. shall result in incident beam concentration on the surface
5.1.1.1 Samples shall not be coated with a conductive thin anomaly, minimizing stray X-ray signal from the background.
layer (for example, gold or carbon).
5.1.2 Conductive Paste/Tape, that will provide a conductive
9. Procedure
path.Useanymeansoffixingthesampletoastub.Careshould
9.1 Follow sample preparation of this test method (7.1)to
be taken not to contaminate the area of interest.
expose the surface.
5.1.3 Adhesives, used to attach samples to sample stubs are
to be vacuum stable.
9.2 Introduce the sample stub into the SEM vacuum cham-
ber.
5.2 Instrumentation:
5.2.1 Scanning Electron Microscope (SEM)—Any high
9.3 Activate the electron beam when vacuum conditions
resolution commercially available SEM with photographic
meet those recommended by the manufacturer:
capabilities of a 100 cm image may be used for these
9.4 Move the sample until an area of interest on the
analyses.
sample’s surface comes into focus. The area of interest should
5.2.2 Instrument Operating Parameters , shall be as fol-
be representative of a normal surface, avoiding gross deformi-
lows: accelerating voltage, 20 KeV; final aperture size nominal
ties.
200 µm or less; and working distance and sample tilt, as
appropriate to the EDX detector.
9.5 Orient the sample (with respect to working distance,
5.2.2.1 SEM instrument operating parameters shall be such
sample tilt, etc) to maximize X-ray collection efficiency of the
that collection efficiency for the EDX spectrometer is opti-
EDX detector.
mized.
9.6 Adjust accel
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.