ASTM E996-10(2018)
(Practice)Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
SIGNIFICANCE AND USE
5.1 Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and publications.
5.2 Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports, and include the specific parameters applicable to each spectrum in the figure caption.
SCOPE
1.1 Auger and X-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
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Designation: E996 − 10 (Reapproved 2018)
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
1
Photoelectron Spectroscopy
This standard is issued under the fixed designation E996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope E983 Guide for Minimizing Unwanted Electron Beam Ef-
fects in Auger Electron Spectroscopy
1.1 Auger and X-ray photoelectron spectra are obtained
E995 Guide for Background Subtraction Techniques in Au-
using a variety of excitation methods, analyzers, signal
ger Electron Spectroscopy and X-Ray Photoelectron
processing, and digitizing techniques.
Spectroscopy
1.2 This practice lists the desirable information that shall be
E1078 Guide for Specimen Preparation and Mounting in
reported to fully describe the experimental conditions, speci-
Surface Analysis
men conditions, data recording procedures, and data transfor-
E1127 Guide for Depth Profiling in Auger Electron Spec-
mation processes.
troscopy
1.3 The values stated in SI units are to be regarded as
3. Terminology
standard. No other units of measurement are included in this
3.1 Definitions—For definitions of terms used in this
standard.
practice, refer to Terminology E673.
1.4 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
4. Summary of Practice
responsibility of the user of this standard to establish appro-
4.1 Report all experimental conditions that affectAuger and
priate safety, health, and environmental practices and deter-
X-ray photoelectron spectra so spectra can be reproduced in
mine the applicability of regulatory limitations prior to use.
other laboratories or be compared with other spectra.
1.5 This international standard was developed in accor-
dance with internationally recognized principles on standard- 5. Significance and Use
ization established in the Decision on Principles for the
5.1 Includetheexperimentalconditionsunderwhichspectra
Development of International Standards, Guides and Recom-
are taken in the “Experiment” section of all reports and
mendations issued by the World Trade Organization Technical
publications.
Barriers to Trade (TBT) Committee.
5.2 Identify any parameters that are changed between dif-
ferent spectra in the “Experiment” section of publications and
2. Referenced Documents
reports, and include the specific parameters applicable to each
2
2.1 ASTM Standards:
spectrum in the figure caption.
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
3
2012)
6. Information To Be Reported
E902 Practice for Checking the Operating Characteristics of
6.1 Equipment Used:
3
X-Ray Photoelectron Spectrometers (Withdrawn 2011)
6.1.1 If a commercial electron spectroscopy system is used,
specify the manufacturer and model. Indicate the type of
electron excitation source and electron analyzer as well as the
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface
model designation of other equipment used for generating the
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy. experimental data, such as a sputter ion source.
Current edition approved Nov. 1, 2018. Published November 2018. Originally
6.1.2 If a spectrometer system has been assembled from
approved in 1984. Last previous edition approved in 2010 as E996–10. DOI:
several components specify the manufacturers and model
10.1520/E0996–10R18.
2
numbers of excitation source, analyzer, and auxiliary equip-
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
ment.
Standards volume information, refer to the standard’s Document Summary page on
6.1.3 Identify the model name, version number, and manu-
the ASTM website.
3 facturer of software packages used to acquire or process the
The last approved version of this historical standard is referenced on
www.astm.org. data.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E996 − 10 (2018)
6.2 Specimen Analyzed: determined by that of the phase-sensitive detector, ratemeter,
6.2.1 Describe the specimen as completely as possible, for recorder, or digitizing system.
example, its bulk composition, history, any methods of clean-
6.3.6 Scan Rate—If an analog scan is used, give the sweep
ing or sectioning, pre-analysis treatments, and dimensions.
rate in eV/s (electronvolt/second). If a stepped scan is used,
6.2
...
This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation: E996 − 10 E996 − 10 (Reapproved 2018)
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
1
Photoelectron Spectroscopy
This standard is issued under the fixed designation E996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 Auger and X-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and
digitizing techniques.
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen
conditions, data recording procedures, and data transformation processes.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety safety, health, and healthenvironmental practices and determine the
applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization
established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued
by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
2. Referenced Documents
2
2.1 ASTM Standards:
3
E673 Terminology Relating to Surface Analysis (Withdrawn 2012)
3
E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers (Withdrawn 2011)
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E995 Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy
E1078 Guide for Specimen Preparation and Mounting in Surface Analysis
E1127 Guide for Depth Profiling in Auger Electron Spectroscopy
3. Terminology
3.1 Definitions—For definitions of terms used in this guide,practice, refer to Terminology E673.
4. Summary of Practice
4.1 Report all experimental conditions that affect Auger and X-ray photoelectron spectra so spectra can be reproduced in other
laboratories or be compared with other spectra.
5. Significance and Use
5.1 Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and
publications.
5.2 Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports,
and include the specific parameters applicable to each spectrum in the figure caption.
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2010Nov. 1, 2018. Published December 2010November 2018. Originally approved in 1984. Last previous edition approved in 20042010
as E996 – 04.E996–10. DOI: 10.1520/E0996-10.10.1520/E0996–10R18.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Standards
volume information, refer to the standard’sstandard’s Document Summary page on the ASTM website.
3
The last approved version of this historical standard is referenced on www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
E996 − 10 (2018)
6. Information To Be Reported
6.1 Equipment Used:
6.1.1 If a commercial electron spectroscopy system is used, specify the manufacturer and model. Indicate the type of electron
excitation source and electron analyzer as well as the model designation of other equipment used for generating the experimental
data, such as a sputter ion source.
6.1.2 If a spectrometer system has been assembled from several components specify the manufacturers and model numbers of
excitation source, analyzer, and auxiliary equipment.
6.1.3 Identify the model name, version number, and manufacturer of software packages used to acquire or process the data.
2
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E996 −
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