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ASTM F1375-92(1999)

(Test Method)

Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components

Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components

SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
1.2 This test method applies to all steel surfaces of components such as tubing, connectors, regulators, and valves, regardless of size, style, or type.
1.3 Limitations:  
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

General Information

Status
Historical
Publication Date
09-Jun-1999
ICS
17.040.20 - Properties of surfaces
Technical Committee
F01 - Electronics
Drafting Committee
F01.10 - Contamination Control
Current Stage
Ref Project

Relations

Replaced By
ASTM F1375-92(2005) - Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
Effective Date
10-Jun-1999

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ASTM F1375-92(1999) - Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System ComponentsASTM F1375-92(1999) - Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
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ASTM F1375-92(1999) - Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:F 1375–92 (Reapproved 1999)
Standard Test Method for
Energy Dispersive X-Ray Spectrometer (EDX) Analysis of
Metallic Surface Condition for Gas Distribution System
Components
This standard is issued under the fixed designation F 1375; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope F 1372 Test Method for Scanning Electron Microscope
(SEM) Analysis of Metallic Surface Condition for Gas
1.1 This test method establishes a procedure for comparing
Distribution System Components
the elemental composition of normal surfaces with any defects
found on the surfaces of metal tubing, fittings, valves, or any
3. Terminology
metal component.
3.1 Definitions of Terms Specific to This Standard:
1.2 This test method applies to all steel surfaces of compo-
3.1.1 normal surface—an area of the sample that does not
nents such as tubings, connectors, regulators, and valves,
exhibit any visible defect when viewed under the stipulated
regardless of size, style, or type.
SEM magnification. Normal surface is used to provide a
1.3 Limitations:
baseline for comparison with any area exhibiting a defect.
1.3.1 This test method is intended for use by scanning
3.1.2 sample angle—the angle measured normal to the
electron microscope/energy dispersive x-ray spectrometer
incoming electron beam.
(SEM/EDX) operators with skill level typically achieved over
3.1.3 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
a twelve-month period.
32.0°F).
1.3.2 SEM used for this study should conform to those
3.1.4 working distance—the measured distance from the
limitations outlined in Test Method F 1372 and should have a
bottom of the objective lens to the sample.
minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the
4. Significance and Use
standard. The inch-pound units given in parentheses are for
4.1 The purpose of this test method is to define a procedure
information only.
for testing components being considered for installation into a
1.5 This standard does not purport to address all of the
high-purity gas distribution system. Application of this test
safety concerns, if any, associated with its use. It is the
method is expected to yield comparable data among compo-
responsibility of the user of this standard to establish appro-
nents tested for purposes of qualification for this installation.
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use. Specific hazard
5. Apparatus
statements are given in Section 6.
5.1 Materials:
5.1.1 Mounting Stubs, specific to the instrument used are
2. Referenced Documents
required.
2.1 ASTM Standards:
5.1.1.1 Samples shall not be coated with a conductive thin
layer (for example, gold or carbon).
This test method is under the jurisdiction of ASTM Committee F01 on 5.1.2 Conductive Paste/Tape, that will provide a conductive
Electronics and is the direct responsibility of Subcommittee F01.10 on Processing
path.Useanymeansoffixingthesampletoastub.Careshould
Environments.
be taken not to contaminate the area of interest.
Current edition approved Feb. 15, 1992. Published April 1992.
5.1.3 Adhesives, used to attach samples to sample stubs are
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
to be vacuum stable.
Standards volume information, refer to the standard’s Document Summary page on
5.2 Instrumentation:
the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
F 1375–92 (1999)
5.2.1 Scanning Electron Microscope (SEM)—Any high 9.4 Move the sample until an area of interest on the
resolution commercially available SEM with photographic sample’s surface comes into focus. The area of interest should
capabilities of a 100 cm image may be used for these be representative of a normal surface, avoiding gross deformi-
analyses. ties.
5.2.2 Instrument Operating Parameters, shall be as follows:
9.5 Orient the sample (with respect to working distance,
accelerating voltage, 20 KeV; final aperture size nominal 200
sample tilt, etc) to maximize X-ray collection efficiency of the
µmorless;andworkingdistanceandsampletilt,asappropriate
EDX detector.
to the EDX detector.
9.6 Adjust accelerating voltage to provide maximum exci-
5.2.2.1 SEM instrument operating parameters shall be such
tation for the element of interest. Typically, this is 20 KeV for
that collection efficiency for the EDX spectrometer is opti-
all elements having an atomic number greater than or equal to
mized.
eleven (the atomic number of sodium) and 10 KeV for those
5.2.3 EDX Spectrometer, capable of full width half maxi-
elements with atomic numbers between boron and sodium.
mum (FWHM) resolution of 170 eV or less (for MnKa), and
9.7 Collect X-ray signals fo
...

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1.1 This test method covers laboratory procedures for determining the coefficient of friction (COF) and resistance of materials to adhesion under flat sliding using the twist compression test (TCT). This test method ranks material couples, surface treatments, coatings, and lubricant combinations by COF and their resistance to adhesion.  
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5.2 It is also important that automotive finishes and other high-gloss nonmetallic surfaces possess the desired finished appearance. The present method identifies by measurements important aspects of finishes. Those having identical sets of numbers normally have the same gloss characteristics. It usually requires more than one measurement to identify properly the glossy appearance of any finish (see Refs 3 and 4).
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1.1 These test methods cover the measurement of the reflection characteristics responsible for the glossy appearance of high-gloss surfaces. Two test methods, A and B, are provided for evaluating such surface characteristics at specular angles of 20° and 30°, respectively. These test methods are not suitable for diffuse finish surfaces nor do they measure color, another appearance attribute.  
1.2 As originally developed by Tingle and others (see Refs 1 and 2),2 the test methods were applied only to bright metals. Recently they have been applied to high-gloss automotive finishes and other nonmetallic surfaces.  
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1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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4.1 Measurement of the thickness of a coating is essential to assessing its utility and cost.  
4.2 The coulometric method destroys the coating over a very small (about 0.1 cm2) test area. Therefore its use is limited to applications where a bare spot at the test area is acceptable or the test piece may be destroyed.
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SCOPE
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1.6 The following precautionary caveat pertains only to the test method portion, Section 6, of this specification: This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.7 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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3.3 A further parenthetical inclusion at the end of the definition gives the revision, if after 1981, in which the definition was added to this terminology standard or last revised.  
3.4 Where appropriate, symbols or acronyms are listed for terms in this terminology standard. Since usage varies, these listings should be considered as recommendations, not as mandatory. If a different symbol or acronym is used in another ASTM standard, this should be indicated in that standard.  
3.5 In the 1990 edition of this terminology standard, a great many terms were relocated to conform to the recommendation of the Form and Style for ASTM Standards, (Blue Book) that listings be in spoken word order. In general, there are no cross-references between the old and new listings, except where a special function is served. An example of such a special function is to list all terms relating to a given basic quantity, for example, all terms defining various ...
SCOPE
1.1 This terminology standard defines terms used in the description of appearance, including but not limited to color, gloss, opacity, scattering, texture, and visibility of both materials (ordinary, fluorescent, retroreflective) and light sources (including visual display units).  
1.2 It is the policy of ASTM Committee E12 on Color and Appearance that this terminology standard include important terms and definitions explicit to the scope, whether or not the terms are currently used in an ASTM standard. Terms that are in common use and appear in common-language dictionaries (see Refs (1–2)2) are generally not included, except when the dictionaries show multiple definitions and it seems desirable to indicate the definitions recommended for E12 standards.  
1.3 The usage of terms describing appearance varies considerably. In some cases, different usage of a term in different fields has been noted.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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