ASTM E908-98(2012)
(Practice)Standard Practice for Calibrating Gaseous Reference Leaks
Standard Practice for Calibrating Gaseous Reference Leaks
ABSTRACT
This practice establishes the standard procedures for calibrating leak artifacts of a specified gas, that may be used for determining the response of leak detectors, or in other situations where a known small flow of gas is required. The purpose of this practice is to establish calibration without reference to other calibrated leaks in as straightforward a manner as possible using the likeliest available equipment. The two types of leaks considered here are Type I, which is pressure to vacuum, and Type II, which is pressure to atmosphere. Three calibration methods are described under each type of reference leak, as follows: Method A—accumulation comparison using a known volume of tracer gas at specified conditions of temperature and pressure as a reference; Method B—accumulation comparison using a reference leak artifact calibrated using Method A; and Method C—direct measurement of leak rate by timing the movement (displacement) of a liquid slug, by the leak, in a capillary tube of known dimensions.
SCOPE
1.1 This practice covers procedures for calibrating leak artifacts of a specified gas, that may be used for determining the response of leak detectors, or in other situations where a known small flow of gas is required. The purpose of this practice is to establish calibration without reference to other calibrated leaks in as straightforward a manner as possible using the likeliest available equipment. While the uncertainties associated with these procedures will most likely be greater than those obtained via traceable calibration chains (on the order of 10 %), these procedures allow independent means of establishing or verifying the leakage rate from leak artifacts of questionable history, or when traceable leak artifacts are not available.
1.2 Two types of leaks are considered:
1.2.1 Type I—Pressure to vacuum.
1.2.2 Type II—Pressure to atmosphere.
1.3 Three calibration methods are described under each type of reference leak:
1.3.1 Method A—Accumulation comparison, using a known volume of gas at specified conditions of temperature and pressure as a reference.
1.3.2 Method B—Accumulation comparison, using a leak artifact calibrated using Method A.
1.3.3 Method C—Displacement of a liquid slug, by the leak, in capillary tube of known dimensions.
1.4 The values stated in inch-pound units are to be regarded as standard. The values given in parentheses are mathematical conversions to SI units that are provided for information only and are not considered standard.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Standards Content (Sample)
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E908 − 98 (Reapproved 2012)
Standard Practice for
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Calibrating Gaseous Reference Leaks
This standard is issued under the fixed designation E908; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
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1.1 This practice covers procedures for calibrating leak
2.1 ASTM Standards:
artifacts of a specified gas, that may be used for determining
E425Definitions of Terms Relating to Leak Testing (With-
3
the response of leak detectors, or in other situations where a
drawn 1991)
known small flow of gas is required. The purpose of this
E427PracticeforTestingforLeaksUsingtheHalogenLeak
3
practice is to establish calibration without reference to other
Detector Alkali-Ion Diode (Withdrawn 2013)
calibrated leaks in as straightforward a manner as possible
E479Guide for Preparation of a Leak Testing Specification
3
using the likeliest available equipment.While the uncertainties
(Withdrawn 2014)
associated with these procedures will most likely be greater
F134Test Methods for Determining Hermeticity of Electron
than those obtained via traceable calibration chains (on the
Devices with a Helium Mass Spectrometer Leak Detector
order of 10%), these procedures allow independent means of 3
(Withdrawn 1996)
establishing or verifying the leakage rate from leak artifacts of
2.2 Other Documents:
questionable history, or when traceable leak artifacts are not
4
AVS 2.2-1968Method for Vacuum Leak Calibration
available.
Recommended Practices for the Calibration and Use of
1.2 Two types of leaks are considered: 5
Leaks
1.2.1 Type I—Pressure to vacuum.
1.2.2 Type II—Pressure to atmosphere.
3. Summary of Practice
1.3 Threecalibrationmethodsaredescribedundereachtype
3.1 Method A—Accumulation comparison, using a known
of reference leak:
volume of tracer gas:
1.3.1 MethodA—Accumulation comparison, using a known
3.1.1 This method uses a closed chamber of nonreactive
volume of gas at specified conditions of temperature and
material having a means of removing all tracer gas and a
pressure as a reference.
connection to the tracer sensor.
1.3.2 Method B—Accumulation comparison, using a leak
3.1.2 A small, known quantity of tracer gas is discharged
artifact calibrated using Method A.
intothechamberandtheresponserecordedforaperiodoftime
1.3.3 MethodC—Displacementofaliquidslug,bytheleak,
inwhichitisanticipatedtheunknownleakwillrequiretoreach
in capillary tube of known dimensions.
the same concentration.
1.4 The values stated in inch-pound units are to be regarded
3.1.3 The tracer gas is removed from the chamber, and the
as standard. The values given in parentheses are mathematical
unknown leak is allowed to discharge into it until the sensor
conversions to SI units that are provided for information only
response equals that of 3.1.2.
and are not considered standard.
3.1.4 The leakage rate in mol/s can be calculated as:
1.5 This standard does not purport to address all of the
Q 5PV t·R·T (1)
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safety concerns, if any, associated with its use. It is the
m
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
1 3
This practice is under the jurisdiction of ASTM Committee E07 on Nonde- The last approved version of this historical standard is referenced on
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak www.astm.org.
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Testing Method. AvailablefromAVS,AmericanVacuumSociety,335E.45thStreet,NewYork,
Current edition approved Nov. 15, 2012. Published November 2012. Originally N.Y., 10017.
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approvedin1982.Lastpreviouseditionapprovedin2004asE908-98(2004).DOI: C.D. Ehrlich and J.A. Basford, Journal of Vac. Sci, Technology, A(10), 1992,
10.1520/E0908-98R12. pp. 1–17.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E908 − 98 (2012)
where: 4.1.1 Forthepurposesofthissection,itwillbeassumedthat
the gas is helium and the detector is the mass spectrometer
P = pressure in known volume in atmospheres (1
tuned for helium.
atm=101 325 Pa),
3
V = the volume of gas in cm introduced in 3.1.2,
NOTE 1—Other gases or detectors, or both, can be used with little
t = the time in seconds required for the concentration in
di
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