ASTM F1373-93(2020)
(Test Method)Standard Test Method for Determination of Cycle Life of Automatic Valves for Gas Distribution System Components (Withdrawn 2023)
Standard Test Method for Determination of Cycle Life of Automatic Valves for Gas Distribution System Components (Withdrawn 2023)
SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.
1.2 This test method applies to automatically operated valves. It is intended to measure the cycle life of the valve itself including the seat and body sealing. It does not include cycle testing of the actuator. Testing must include both pressure testing and helium leak testing and must include vacuum test conditions when appropriate. This test method may be applied to a broad range of valve sizes.
1.3 Limitations:
1.3.1 This test is not designed to evaluate the performance of the actuator. This test method addresses the gas system contamination aspects of the valve performance, that is, seat and body leakage and diaphragm or bellows failure. If the actuator fails during the evaluation, the valve is deemed as a failure.
1.3.2 While the requirements of a valve's performance might include items such as particulate generation levels, this test method only attempts to evaluate cycle life and performance degradation as they relate to the ability of the valve to operate and shut off flow.
1.3.3 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 7.
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.
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Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1373 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Cycle Life of Automatic Valves for Gas
Distribution System Components
This standard is issued under the fixed designation F1373; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredfor
use in such systems.
1. Scope 1.5 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
1.1 This test method covers the testing of automatic valves
responsibility of the user of this standard to establish appro-
for cycle life utilizing static, no-flow conditions. This no-flow
priate safety, health, and environmental practices and deter-
condition is felt to be a realistic test to determine the valve’s
mine the applicability of regulatory limitations prior to use.
cycle life.
Specific hazard statements are given in Section 7.
1.2 This test method applies to automatically operated
1.6 This international standard was developed in accor-
valves.Itisintendedtomeasurethecyclelifeofthevalveitself
dance with internationally recognized principles on standard-
including the seat and body sealing. It does not include cycle
ization established in the Decision on Principles for the
testing of the actuator. Testing must include both pressure
Development of International Standards, Guides and Recom-
testing and helium leak testing and must include vacuum test
mendations issued by the World Trade Organization Technical
conditions when appropriate. This test method may be applied
Barriers to Trade (TBT) Committee.
to a broad range of valve sizes.
2. Referenced Document
1.3 Limitations:
2.1 SEMATECH Standard:
1.3.1 This test is not designed to evaluate the performance
2.1.1 Test Method for Determination of Helium Leak Rate
of the actuator. This test method addresses the gas system
for Gas Distribution Systems Components, Provisional SE-
contamination aspects of the valve performance, that is, seat
MASPEC #90120391 B-STD. Feb. 22, 1993.
and body leakage and diaphragm or bellows failure. If the
actuator fails during the evaluation, the valve is deemed as a
3. Terminology
failure.
3.1 Definitions of Terms Specific to This Standard:
1.3.2 While the requirements of a valve’s performance
3.1.1 actuation cycle—operationofvalvefromfullyopened
might include items such as particulate generation levels, this
to fully closed and back to fully opened.
test method only attempts to evaluate cycle life and perfor-
mance degradation as they relate to the ability of the valve to
3.1.2 actuator— a gas (compressed air nitrogen)-operated
operate and shut off flow.
deviceconnectedtothevalvestemtoopenandclosethevalve.
1.3.3 This test method is written with the assumption that
3.1.3 actuator pressure—range of actuator gas line pressure
the operator understands the use of the apparatus at a level
required to fully open and close the valve.
equivalent to six months of experience.
3.1.4 automatic valve—avalvewithanactuationdevicethat
1.4 The values stated in SI units are to be regarded as the
can be operated remotely, such as a pneumatically or electri-
standard. The inch-pound units given in parentheses are for
cally controlled valve.
information only.
3.1.5 cycle life—the cycle life of a valve involves two
characteristics:catastrophicvalvefailure,thatisasinglevalue;
This test method is under the jurisdiction of ASTM Committee F01 on
and a degraded performance, that is, a plot of helium leak rate
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
tion Control.
versus cycles.
Current edition approved April 15, 2020. Published May 2020. Originally
approved in 1992. Last previous edition approved in 2012 as F1373–93(2012).
DOI: 10.1520/F1373-93R20. Available from SEMATECH, 2706 Montopolis Dr., Austin, TX 78741-6499.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1373 − 93 (2020)
3.1.6 failure—the termination of the ability of the valve to
perform its required function.
3.1.7 failure mode—themodebywhichafailureisobserved
to occur.
3.1.7.1 Discussion—Failure mode types include a cata-
strophic failurethatisbothsuddenandcompleteand degraded
failure that is gradual, partial, or both.
3.1.8 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32.0°F).
3.1.9 valve—any component designed to provide positive
shutoff of fluid media with the capability of being externally
operated.
FIG. 1 Cycle Life Test Schematic
4. Significance and Use
4.1 The purpose of this test method is to define a procedure
for testing components being considered for installation into a
used to conduct both the cycle life and all three helium leak
high-purity gas distribution system. Application of this test
tests is shown in Fig. 2 (see 5.2). Dimensions between the
method is expected to yield comparable data among compo-
componentsarealsoshowninFig.2andalistofpartsthatcan
nents tested for the purposes of qualification for this installa-
be used to assemble the recommended test apparatus is
tion.
presented in Fig. 3 (see 5.3).
5. Apparatus
8.2 Nitrogen gas supply is filtered by an electronics grade
high purity gas filter before it is delivered to the test valve
5.1 Helium Mass Spectrometer Leak Detector.
through the isolation valve. The test valve is isolated between
5.2 Cycle Counter.
two isolation valves to allow for pressurization of the test
5.3 Upstream and Downstream Pressure Indicators or
componentduringcyclingandleaktesting.Heliumgasneeded
Transducers, capable of handling the test pressure ranges; a
forleaktestingisprovidedfromanultrahighpurityheliumgas
vacuum pump for vacuum service valves, an isolation valve
cylinder.
and test valve, some pressure transducers or gages, and a cycle
8.3 The test component is installed inside a borosilicate bell
controller to provide consistent cycling are required.
jar placed above a stainless steel base plate to provide a
5.4 Instrument to Detect Failure of the Valve to Hold
leak-tightenclosurerequiredforboththeinboardandoutboard
Pressure, for example, a data log
...
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1373 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Cycle Life of Automatic Valves for Gas
Distribution System Components
This standard is issued under the fixed designation F1373; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope 1.5 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
1.1 This test method covers the testing of automatic valves
responsibility of the user of this standard to establish appro-
for cycle life utilizing static, no-flow conditions. This no-flow
priate safety, health, and environmental practices and deter-
condition is felt to be a realistic test to determine the valve’s
mine the applicability of regulatory limitations prior to use.
cycle life.
Specific hazard statements are given in Section 7.
1.2 This test method applies to automatically operated
1.6 This international standard was developed in accor-
valves. It is intended to measure the cycle life of the valve itself
dance with internationally recognized principles on standard-
including the seat and body sealing. It does not include cycle
ization established in the Decision on Principles for the
testing of the actuator. Testing must include both pressure
Development of International Standards, Guides and Recom-
testing and helium leak testing and must include vacuum test
mendations issued by the World Trade Organization Technical
conditions when appropriate. This test method may be applied
Barriers to Trade (TBT) Committee.
to a broad range of valve sizes.
2. Referenced Document
1.3 Limitations:
2.1 SEMATECH Standard:
1.3.1 This test is not designed to evaluate the performance
2.1.1 Test Method for Determination of Helium Leak Rate
of the actuator. This test method addresses the gas system
for Gas Distribution Systems Components, Provisional SE-
contamination aspects of the valve performance, that is, seat
MASPEC #90120391 B-STD. Feb. 22, 1993.
and body leakage and diaphragm or bellows failure. If the
actuator fails during the evaluation, the valve is deemed as a
3. Terminology
failure.
3.1 Definitions of Terms Specific to This Standard:
1.3.2 While the requirements of a valve’s performance
3.1.1 actuation cycle—operation of valve from fully opened
might include items such as particulate generation levels, this
to fully closed and back to fully opened.
test method only attempts to evaluate cycle life and perfor-
mance degradation as they relate to the ability of the valve to
3.1.2 actuator— a gas (compressed air nitrogen)-operated
operate and shut off flow.
device connected to the valve stem to open and close the valve.
1.3.3 This test method is written with the assumption that
3.1.3 actuator pressure—range of actuator gas line pressure
the operator understands the use of the apparatus at a level
required to fully open and close the valve.
equivalent to six months of experience.
3.1.4 automatic valve—a valve with an actuation device that
1.4 The values stated in SI units are to be regarded as the
can be operated remotely, such as a pneumatically or electri-
standard. The inch-pound units given in parentheses are for
cally controlled valve.
information only.
3.1.5 cycle life—the cycle life of a valve involves two
characteristics: catastrophic valve failure, that is a single value;
This test method is under the jurisdiction of ASTM Committee F01 on
and a degraded performance, that is, a plot of helium leak rate
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
tion Control.
versus cycles.
Current edition approved April 15, 2020. Published May 2020. Originally
approved in 1992. Last previous edition approved in 2012 as F1373 – 93(2012).
DOI: 10.1520/F1373-93R20. Available from SEMATECH, 2706 Montopolis Dr., Austin, TX 78741-6499.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1373 − 93 (2020)
3.1.6 failure—the termination of the ability of the valve to
perform its required function.
3.1.7 failure mode—the mode by which a failure is observed
to occur.
3.1.7.1 Discussion—Failure mode types include a cata-
strophic failure that is both sudden and complete and degraded
failure that is gradual, partial, or both.
3.1.8 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32.0°F).
3.1.9 valve—any component designed to provide positive
shutoff of fluid media with the capability of being externally
operated.
FIG. 1 Cycle Life Test Schematic
4. Significance and Use
4.1 The purpose of this test method is to define a procedure
for testing components being considered for installation into a
used to conduct both the cycle life and all three helium leak
high-purity gas distribution system. Application of this test
tests is shown in Fig. 2 (see 5.2). Dimensions between the
method is expected to yield comparable data among compo-
components are also shown in Fig. 2 and a list of parts that can
nents tested for the purposes of qualification for this installa-
be used to assemble the recommended test apparatus is
tion.
presented in Fig. 3 (see 5.3).
5. Apparatus
8.2 Nitrogen gas supply is filtered by an electronics grade
high purity gas filter before it is delivered to the test valve
5.1 Helium Mass Spectrometer Leak Detector.
through the isolation valve. The test valve is isolated between
5.2 Cycle Counter.
two isolation valves to allow for pressurization of the test
5.3 Upstream and Downstream Pressure Indicators or
component during cycling and leak testing. Helium gas needed
Transducers, capable of handling the test pressure ranges; a
for leak testing is provided from an ultra high purity helium gas
vacuum pump for vacuum service valves, an isolation valve
cylinder.
and test valve, some pressure transducers or gages, and a cycle
8.3 The test component is installed inside a borosilicate bell
controller to provide consistent cycling are required.
jar placed above a stainless steel base plate to provide a
5.4 Instrument to Detect Failure of the Valve to Hold
leak-tight enclosure required for both the inboard and outboard
Pressure, for example, a data logger tied to the outlet pressure
helium leak tests. Ports are pr
...
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