prEN 1518

Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors

This document specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions may be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology, which may be able to measure leakage rates down to 10−12 Pa⋅m3/s.

Zerstörungsfreie Prüfung - Dichtheitsprüfung - Charakterisierung von massenspektrometrischen Leckdetektoren

Dieses Dokument legt Begriffe und Verfahren für die Charakterisierung von massenspektrometrischen Leckdetektoren (MSLD) fest. Es soll kein kompletter Satz von Spezifikationen für einen Abnahmetest angegeben werden, sondern es werden Vorgehensweisen beschrieben, die ohne spezielle Kalibrierausrüstung angewendet werden können.
Die in diesem Dokument beschriebenen Methoden sind ohne Einschränkungen auf Helium als Prüfgas anwendbar. Für andere Gase können zusätzliche Vorsichtsmaßnahmen notwendig sein.
Die hier beschriebenen Methoden sind auf allgemein erhältliche MSLD des heutigen Standes der Technik anwendbar, die Leckageraten bis herab zu 10−12 Pa·m3/s messen können.

Essais non destructifs - Contrôle d’étanchéité - Caractérisation des détecteurs de fuite à spectrométrie de masse

Le présent document spécifie les méthodes et termes permettant de caractériser les détecteurs de fuites à spectrométrie de masse (DFSM). Il n’a pas pour objet de donner un ensemble complet de spécifications en vue d’un essai de réception, mais une description des procédures qui peuvent être utilisées sans équipement d’étalonnage particulier.
Les méthodes décrites dans le présent document sont applicables sans restriction à l’hélium utilisé comme gaz traceur. Pour d’autres gaz, des précautions supplémentaires peuvent être nécessaires.
Ces méthodes sont applicables aux DFSM couramment disponibles sur le marché, conçus suivant le niveau actuel de la technologie, et qui sont capables de mesurer des flux de fuite de 10−12 Pa⋅m3/s.

Neporušitveno preskušanje - Preskus tesnosti – Karakterizacija masno-spektrometričnih detektorjev puščanja

General Information

• Status: Not Published
• Publication Date: 23-Mar-2026
• ICS: 19.100 - Non-destructive testing
• Technical Committee: CEN/TC 138 - Non-destructive testing
• Drafting Committee: CEN/TC 138/WG 6 - Leak testing
• Current Stage: 4020 - Submission to enquiry - Enquiry
• Start Date: 14-Nov-2024
• Due Date: 05-Nov-2024
• Completion Date: 14-Nov-2024
• Ref Project: oSIST prEN 1518:2025 - Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors

Relations

• Revises: EN 1518:1998 - Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors
• Effective Date: 20-Dec-2023

Standards Content (Sample)

SLOVENSKI STANDARD
01-januar-2025
Neporušitveno preskušanje - Preskus tesnosti – Karakterizacija masno-
spektrometričnih detektorjev puščanja
Non-destructive testing - Leak testing - Characterization of mass spectrometer leak
detectors
Zerstörungsfreie Prüfung - Dichtheitsprüfung - Charakterisierung von
massenspektrometrischen Leckdetektoren
Essais non destructifs - Contrôle d’étanchéité - Caractérisation des détecteurs de fuite à
spectrométrie de masse
Ta slovenski standard je istoveten z: prEN 1518
ICS:
19.100 Neporušitveno preskušanje Non-destructive testing
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

DRAFT
EUROPEAN STANDARD
NORME EUROPÉENNE
EUROPÄISCHE NORM
November 2024
ICS 19.100 Will supersede EN 1518:1998
English Version
Non-destructive testing - Leak testing - Characterization of
mass spectrometer leak detectors
Essais non destructifs - Contrôle d'étanchéité - Zerstörungsfreie Prüfung - Dichtheitsprüfung -
Caractérisation des détecteurs de fuite à spectrométrie Charakterisierung von massenspektrometrischen
de masse Leckdetektoren
This draft European Standard is submitted to CEN members for enquiry. It has been drawn up by the Technical Committee
CEN/TC 138.
If this draft becomes a European Standard, CEN members are bound to comply with the CEN/CENELEC Internal Regulations
which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.

This draft European Standard was established by CEN in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC
Management Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
Recipients of this draft are invited to submit, with their comments, notification of any relevant patent rights of which they are
aware and to provide supporting documentation.

Warning : This document is not a European Standard. It is distributed for review and comments. It is subject to change without
notice and shall not be referred to as a European Standard.

EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2024 CEN All rights of exploitation in any form and by any means reserved Ref. No. prEN 1518:2024 E
worldwide for CEN national Members.

Contents Page
European foreword . 4
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
Terms . 5
3.1.1 Terms related to the MSLD . 5
3.1.2 Terms related to the operation of the MSLD . 6
3.1.3 Terms related to the specification of the MSLD . 7
3.1.4 Terms relating to the tracer gas background signal . 7
3.1.5 Terms relating to the detection limit. 7
3.1.6 Terms relating to the display resolution . 7
4 Description of an MSLD . 8
General. 8
Main parts of an MSLD . 8
Operating principles of MSLD . 9
4.3.1 Direct flow leak detectors . 9
4.3.2 Counterflow leak detectors . 9
MLSD specification . 9
5 Apparatus for methods of characterization . 10
Leaks . 10
5.1.1 General. 10
5.1.2 Small tracer gas leaks . 10
5.1.3 Large air leak . 10
Leak isolation valve. 10
Test vessel . 11
Arrangement for test . 12
5.4.1 Auxiliary pumping system . 12
5.4.2 Materials . 13
Preparation for test . 13
5.5.1 Power supply . 13
5.5.2 Warming up . 13
5.5.3 Adjustment . 13
5.5.4 Constant pumping speed . 13
5.5.5 Constant compression ratio of the high vacuum pump . 13
6 Reference conditions for characterization . 13
Reference temperature . 13
Reference pressure . 13
Reference humidity . 13
7 Test procedures . 14
General. 14
Minimum detectable leakage rate . 14
7.2.1 Background drift and noise . 14
7.2.2 Auxiliary pumping system background . 14
7.2.3 Sensitivity . 14
7.2.4 Time constant . 15
Minimum detectable concentration . 15
7.3.1 General . 15
7.3.2 Background drift and noise . 17
7.3.3 Background signal . 17
7.3.4 Sensitivity . 17
Inlet pumping speed for tracer gas . 18
8 Results . 18
Minimum detectable leakage rate . 18
8.1.1 Evaluation. 18
8.1.2 Expression of minimum detectable leakage rate . 20
Minimum detectable concentration . 20
8.2.1 Evaluation. 20
8.2.2 Expression of minimum detectable concentration . 21
Inlet pumping speed . 21
8.3.1 Evaluation. 21
8.3.2 Expression of inlet pumping speed . 22
9 Test report . 22
Bibliography . 24

European foreword
This document (prEN 1518:2024) has been prepared by Technical Committee CEN/TC 138 “Non-
destructive testing”, the secretariat of which is held by AFNOR.
This document is currently submitted to the CEN Enquiry.
This document will supersede EN 1518:1998.
a) normative references have been updated;
b) clause “Terms and definitions” has been revised;
c) new Subclause 4.1, General, has been added;
d) Clause 5.2 has been updated;
e) in Clause 6.1, the ambient temperature has been adapted;
f) Clause 7 and 8 have been revised;
g) the test report has been revised;
h) the figures have been integrated in the text.
1 Scope
This document specifies terms and procedures for the characterization of mass spectrometer leak
detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a
description of procedures that can be used without particular calibration equipment.
The methods described in this document are applicable without restrictions to helium as the tracer gas.
For other gases, additional precautions may be necessary.
These methods are applicable to commonly available MSLD, based on the present level of technology,
−12 3
which may be able to measure leakage rates down to 10 Pa⋅m /s.
2 Normative r
...