Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication

Le présent document définit une liste de termes liés aux procédés de nanofabrication dans le domaine des nanotechnologies.
Dans le présent document, tous les termes liés aux procédés se rapportent à la nanofabrication; cependant, bon nombre des procédés mentionnés ne se rapportent pas exclusivement à l'échelle nanométrique. Lorsque des termes sont non exclusifs à la nanofabrication, cela est indiqué dans leur définition. Selon que les conditions sont maîtrisables ou non, de tels procédés peuvent donner lieu à des matériaux à l'échelle nanométrique ou à de plus grandes échelles.
Il existe de nombreux autres termes qui désignent des outils, des composants, des matériaux, des méthodes de contrôle de systèmes ou des méthodes métrologiques associées à la nanofabrication, mais qui ne relèvent pas du domaine d'application du présent document.
Des termes et définitions d'autres parties de la série de normes ISO/TS 80004 sont repris dans l'Article 3 à des fins de contexte et d'une meilleure compréhension.

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ISO TS 80004-8:2020 - Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes
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Standards Content (Sample)

Second edition
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2020(E)
ISO 2020

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ISO/TS 80004-8:2020(E)

© ISO 2020
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ii © ISO 2020 – All rights reserved

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ISO/TS 80004-8:2020(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Terms related to general aspects . 3
5 Terms related to directed assembly . 4
6 Terms related to self-assembly processes . 5
7 Terms related to synthesis . 6
7.1 Gas process phase — Physical methods . 6
7.2 Gas process phase — Chemical methods . 7
7.2.1 Flame synthesis processes . 7
7.2.2 Other terms . 8
7.3 Liquid process phase — Physical methods . 8
7.4 Liquid process phase — Chemical methods . 9
7.5 Solid process phase — Physical methods .10
7.6 Solid process phase — Chemical methods .12
8 Terms related to fabrication .12
8.1 Nanopatterning lithography .12
8.2 Deposition processes .16
8.3 Etching processes .

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