ISO 14644-4:2022

Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up

This document specifies the process for creating a cleanroom from requirements through to its design, construction and start-up. It applies to new, refurbished and modified cleanroom installations. It does not prescribe specific technological or contractual means of achieving these requirements. It is intended for use by users, specifiers, designers, purchasers, suppliers, builders and performance verifiers of cleanroom installations. The primary cleanliness consideration is airborne particle concentration. Detailed checklists are provided for the requirements, design, construction and start-up, which include important performance parameters to be considered. Energy management design approaches are identified to support an energy-efficient cleanroom design. Construction guidance is provided, including requirements for start-up and verification. A basic element of this document is consideration of aspects, including maintenance, that will help to ensure continued satisfactory operation for the entire life cycle of the cleanroom. NOTE Further guidance is given in Annexes A to D. ISO 14644-1, ISO 14644-2, ISO 14644-8, ISO 14644-9, ISO 14644-10, ISO 14644-12 and ISO 14644-17 provide complementary information. ISO 14644-7 offers guidance on design, construction and requirements for separative devices (clean air hoods, glove boxes, isolators and mini-environments). The following subjects are mentioned but not addressed in this document: — specific operational activities, processes to be accommodated and process equipment in the cleanroom installation; — fire and safety regulations; — ongoing operation, cleaning and maintenance activities, which are covered by ISO 14644-5.

Salles propres et environnements maîtrisés apparentés — Partie 4: Conception, construction et mise en service

Le présent document spécifie le processus de création d’une salle propre allant des exigences jusqu’à la conception, la construction et la mise en service. Il s’applique aux installations de salles propres nouvelles, rénovées ou modifiées. Il ne prescrit pas de moyens technologiques ou contractuels spécifiques pour satisfaire à ces exigences. Il est destiné aux utilisateurs, prescripteurs, concepteurs, acheteurs, fournisseurs, constructeurs et vérificateurs des performances d’installations de salles propres. La principale considération en matière de propreté est la concentration particulaire de l’air. Des listes de contrôle détaillées sont fournies pour les différentes étapes: les exigences, la conception, la construction et la mise en service. Celles-ci comprennent les paramètres de performance importants à prendre en compte. Des approches de conception basées sur le management de l’énergie sont identifiées afin de permettre une conception de salle propre efficace sur le plan énergétique. Des recommandations en matière de construction sont fournies, incluant des exigences pour la mise en service et la vérification. L’un des principaux éléments du présent document concerne les aspects à prendre en considération, maintenance comprise, qui sont destinés à garantir un fonctionnement constant satisfaisant pendant tout le cycle de vie de la salle propre. NOTE D’autres recommandations sont données dans les Annexes A à D. L’ISO 14644-1, l’ISO 14644-2, l’ISO 14644-8, l’ISO 14644-9, l’ISO 14644-10, l’ISO 14644-12 et l’ISO 14644-17 fournissent des informations complémentaires. L’ISO 14644-7 propose des recommandations relatives à la conception, à la construction et aux exigences spécifiques des dispositifs séparatifs (postes à air propre, boîtes à gants, isolateurs et mini‑environnements). Les sujets suivants sont mentionnés, mais non traités dans le présent document: — des activités opérationnelles spécifiques, des procédés spécifiques et équipements de procédé à héberger dans l’installation de salle propre; — réglementations de sécurité et de protection incendie; — activités courantes d’exploitation, de nettoyage et de maintenance, traitées dans l’ISO14644-5.

General Information

• Status: Published
• Publication Date: 27-Nov-2022
• ICS: 13.040.35 - Cleanrooms and associated controlled environments
• Technical Committee: ISO/TC 209 - Cleanrooms and associated controlled environments
• Drafting Committee: ISO/TC 209/WG 4 - Design and construction
• Current Stage: 6060 - International Standard published
• Start Date: 28-Nov-2022
• Due Date: 26-Oct-2022
• Completion Date: 28-Nov-2022

Relations

• Consolidates: ISO 14404-3:2017 - Calculation method of carbon dioxide emission intensity from iron and steel production — Part 3: Steel plant with electric arc furnace (EAF) and coal-based or gas-based direct reduction iron (DRI) facility
• Effective Date: 06-Jun-2022
• Revises: ISO 14644-4:2001 - Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
• Effective Date: 10-Dec-2016

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 14644-4
Second edition
2022-11
Cleanrooms and associated controlled
environments —
Part 4:
Design, construction and start-up
Salles propres et environnements maîtrisés apparentés —
Partie 4: Conception, construction et mise en service
Reference number
ISO 14644-4:2022(E)
© ISO 2022

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ISO 14644-4:2022(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2022
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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Published in Switzerland
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ISO 14644-4:2022(E)
Contents Page
Foreword .iv
Introduction .v
1 S c op e . 1
2 Nor m at i ve r ef er enc e s . 1
3 Terms and definitions . 1
3.1 G eneral . 2
3 . 2 I n s t a l l at ion . 5
4 Abbr ev i at ed t er m s . 5
5 G ener a l . 6
6 R e qu i r ement s . 7
6.1 C leanroom requirements . 7
6.2 O ther requirements . 9
6 . 3 D o c u ment at ion . 9
7 D e sig n . 9
7.1 G eneral . 9
7. 2 C onc ep t u a l de s i g n . . . 10
7. 3 Ba s ic de s i g n . 10
7.4 D e t a i le d de s i g n . 11
7. 5 C ha n g e ma nag ement . 11
8 C on s t r uc t ion .12
8.1 General .12
8 . 2 C on s t r uc t ion pl a n .12
8.2.1 General .12
8 . 2. 2 S c he du le . 12
8.2.3 Quality plan .12
8.2.4 C lean build protocol .12
8.3 Construction verification .13
8 .4 D o c u ment at ion . 13
9 S t a r t-up .13
9.1 G eneral .13
9. 2 C om m i s s ion i n g . 14
9.2.1 G eneral . 14
9.2.2 S etting to work . 14
9.2.3 Functional and performance verifications . 14
9. 3 Tr a in in g . 14
9.4 Ha ndover . 14
9. 5 D o c u ment at ion . 14
9. 5 .1 C om m i s s ion i n g do c u ment at ion . 14
9. 5 . 2 Per f or m a nc e -mon it or i n g i n s t r uc t ion s . 15
9. 5 . 3 M a i nt en a nc e i n s t r uc t ion s . 15
9. 5 .4 M a i nt en a nce r e cor d . 15
9.5.5 R ecord of training .15
Annex A (informative) Guidance on requirements .16
Annex B (informative) Guidance on design .24
Annex C (informative) Guidance on construction .45
Annex D (informative) Guidance on start-up .51
Bibliography .56
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ISO 14644-4:2022(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to
the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see
www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environments, in collaboration with the European Committee for Standardization (CEN) Technical
Committee CEN/TC 243, Cleanroom technology, in accordance with the Agreement on technical
cooperation between ISO and CEN (Vienna Agreement).
This second edition cancels and replaces the first edition (ISO 14644-4:2001), which has been
technically revised.
The main changes are as follows:
— normative content has been extended;
— the process of gathering and defining requirements has been added;
— the scope has been extended from classified cleanrooms to include additional cleanliness attributes;
— the entire text has been revised or clarified to aid its application.
A list of all parts in the ISO 14644 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.
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ISO 14644-4:2022(E)
Introduction
Cleanrooms and associated controlled environments provide for the control of airborne particulate
contamination and, if relevant, other forms of contamination, to levels appropriate for accomplishing
contamination-sensitive activities. Products and processes that benefit from the control of airborne
contamination include those in such industries as aerospace, microelectronics, pharmaceuticals,
medical devices, food and research and development laboratories and some applications in healthcare.
Cleanrooms and associated controlled environments are classified for air cleanliness by particle
concentration (ISO 14644-1). Cleanliness attributes relating to chemicals, nanoscale particles and
viable particles (microorganisms), as well as cleanliness of surfaces, can also be considered.
This document is one of the series of International Standards concerned with cleanrooms and associated
controlled environments prepared by ISO/TC 209.
This document provides guidance for the design, construction and start-up of cleanrooms, both new
and those undergoing modification or refurbishment. In this edition, a more structured approach
is provided with separate normative sections on requirements, design, construction and start-up,
supported by four corresponding informative annexes.
For this edition, key recommendations and considerations include:
a) A structured approach with a logical sequential flow through the design, construction and start-
up stages. There will normally be reviews and iterations of the requirements, contamination
control concepts, layouts and other considerations. The final design should be reviewed against the
requirements before construction commences and when construction is complete. The operation
and performance are verified against the requirements during start-up.
b) Inclusion of other cleanliness attributes. The ISO 14644 series has parts that deal with other
cleanliness attributes, namely chemicals, nanoscale particles, macro-particles and, in ISO 14698,
viable particles (microorganisms), as well as cleanliness of surfaces. These other attributes should
be considered if relevant, bearing in mind that the primary requirement for a cleanroom or clean
zone is that it meets a classification by airborne particle concentration according to ISO 14644-1.
c) Importance of a contamination risk assessment. Assessments should be carried out to better
understand the contamination risk and its impact on the process and product and to identify the
critical control points (locations) in the cleanroom or clean zone.
d) A clear statement of requirements, namely everything needed for input into the design, including
the purpose of the cleanroom and the acceptance criteria for performance parameters. This is
critical and should be documented prior to the start of the design process.
e) Ventilation effectiveness. This revision focuses on the importance of ventilation effectiveness
through control of air-flow patterns and clean-up recovery rates. Two measures are identified: air
change effectiveness (ACE) and contaminant removal effectiveness (CRE).
f) Using air supply rate for calculations of contaminant dilution and removal. This will make it possible
to achieve energy-efficient cleanrooms while achieving the required level of air cleanliness.
g) Energy efficiency and life cycle considerations. Energy efficiency in cleanrooms is very important
and is covered by ISO 14644-16.
h) A clean build protocol. This is included to minimize contamination during construction of the
cleanroom.
Information directly relevant to cleanrooms and associated controlled environments is included in the
informative annexes. Supporting information is given in the Bibliography.
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INTERNATIONAL STANDARD ISO 14644-4:2022(E)
Cleanrooms and associated controlled environments —
Part 4:
Design, construction and start-up
1 S cope
This document specifies the process for creating a cleanroom from requirements through to its design,
construction and start-up. It applies to new, refurbished and modified cleanroom installations. It does
not prescribe specific technological or contractual means of achieving these requirements. It is intended
for use by users, specifiers, designers, purchasers, suppliers, builders and performance verifiers of
cleanroom installations. The primary cleanliness consideration is airborne particle concentration.
Detailed checklists are provided for the requirements, design, construction and start-up, which
include important performance parameters to be considered. Energy management design approaches
are identified to support an energy-efficient cleanroom design. Construction guidance is provided,
including requirements for start-up and verification. A basic element of this document is consideration
of aspects, including maintenance, that will help to ensure continued satisfactory operation for the
entire life cycle of the cleanroom.
NOTE Further guidance is given in Annexes A to D. ISO 14644-1, ISO 14644-2, ISO 14644-8, ISO 14644-9,
ISO 14644-10, ISO 14644-12 and ISO 14644-17 provide complementary information. ISO 14644-7 offers guidance
on design, construction and requirements for separative devices (clean air hoods, glove boxes, isolators and
mini-environments).
The following subjects are mentioned but not addressed in this document:
— specific operational activities, processes to be accommodated and process equipment in the
cleanroom installation;
— fire and safety regulations;
— ongoing operation, cleaning and maintenance activities, which are covered by ISO 14644-5.
2 Normat ive references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 14644-1, Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness
by particle concentration
ISO 14644-16, Cleanrooms and associated controlled environments — Part 16: Energy efficiency in
cleanrooms and separative devices
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
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ISO 14644-4:2022(E)
3.1 General
3.1.1
air change effectiveness
ACE
ratio between the recovery rate at a location or locations in a cleanroom (3.1.4) and the overall recovery
rate of the cleanroom after a contamination event
Note 1 to entry: The recovery rate is defined and measured in accordance with ISO 14644-3.
[SOURCE: ISO 14644-16:2019, 3.2.7]
3.1.2
classification
method of assessing level of cleanliness against a specification for a cleanroom or clean zone
Note 1 to entry: Levels should be expressed in terms of an ISO Class, which represents maximum allowable
concentrations of particles in a unit volume of air.
[SOURCE: ISO 14644-1:2015, 3.1.4]
3.1.3
cleanliness
condition not exceeding a specified level of contamination
[SOURCE: ISO 14644-15:2017, 3.5]
3.1.4
cleanroom
room within which the number concentration of airborne particles is controlled and classified, and
which is designed, constructed and operated in a manner to control the introduction, generation and
retention of particles inside the room
Note 1 to entry: The class of airborne particle concentration is specified.
Note 2 to entry: Levels of other cleanliness attributes, such as chemical, viable or nanoscale concentrations in the
air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations, might also be
specified and controlled.
Note 3 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,
humidity, pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.1]
3.1.5
clean zone
defined space within which the number concentration of airborne particles is controlled and classified,
and which is constructed and operated in a manner to control the introduction, generation and retention
of contaminants inside the space
Note 1 to entry: The class of airborne particle concentration is specified.
Note 2 to entry: Levels of other cleanliness attributes, such as chemical, viable or nanoscale concentrations in the
air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations, might also be
specified and controlled.
Note 3 to entry: Other relevant physical parameters might also be controlled as required, e.g. temperature,
humidity, pressure, vibration and electrostatic.
Note 4 to entry: A clean zone(s) can be a defined space within a cleanroom or might be achieved by a separative
device. Such a device can be located inside or outside a cleanroom.
[SOURCE: ISO 14644-1:2015, 3.1.2]
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ISO 14644-4:2022(E)
3.1.6
commissioning
planned and documented series of inspections, adjustments, measurements, tests and verifications
carried out systematically to set the installation into correct technical operation as specified
Note 1 to entry: The objective evidence needed for a verification can be the result of an inspection or of testing
other forms of determination, such as performing alternative calculations or reviewing documents
3.1.7
contaminant
particle, chemical or microorganism that adversely affects the product or process
3.1.8
contaminant removal effectiveness
CRE
ratio of particle concentration in the air leaving the cleanroom to the average of particle concentration
in the working plane of the cleanroom, when particles entering from filtered supply air are ignored
Note 1 to entry: If the air leaves the cleanroom at more than one point then the weighted average of the particle
concentrations based on the relative flowrates can be used.
Note 2 to entry: The number and positioning of the sampling locations for determining the average particle
concentration in the working plane of the cleanroom can be based on the method given in 14644–1.
Note 3 to entry: The local particle concentration is dependent on the airflow pattern in the cleanroom and may
vary significantly in the cleanroom. CRE in a sub-area of interest in the cleanroom may be calculated by selecting
a single sampling location considered to be representative of the characteristics of the sub-area of interest.
Note 4 to entry: Particles may be replaced by another airborne contaminant.
[SOURCE: ISO 14644-16:2019, 3.2.5, modified — Definition revised and notes to entry added].
3.1.9
customer
person or organisation that could or does receive a product or a service that is intended for or required
by this person or organisation
EXAMPLE Consumer, client, end-user, retailer, receiver of product or service from an internal process
beneficiary and purchaser.
Note 1 to entry: A customer can be internal or external to the organization.
[SOURCE: ISO 9000:2015, 3.2.4]
3.1.10
non-unidirectional airflow
non-UDAF
air distribution where the supply air entering the cleanroom or clean zone mixes with the internal air
[SOURCE: ISO 14644-1:2015, 3.2.8 modified — Definition revised.]
3.1.11
particle
minute piece of matter with defined physical boundaries
[SOURCE: ISO 14644-1:2015, 3.2.1]
3.1.12
setting to work
activities to bring a system from a static state into correct operation
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ISO 14644-4:2022(E)
3.1.13
source strength
number of airborne particles or other airborne contaminants considered emitted per time unit
expressed as a rate
Note 1 to entry: A source can be a person, equipment or an object.
Note 2 to entry: Each rate should be indicated with a specific particle size. Particles are often emitted in multiple
sizes and each size may have a different rate.
3.1.14
start-up
period following the construction of an installation when the systems and installation are brought into
active service, including all commissioning activities, training and handover to the customer
3.1.15
supplier
organisation that provides a product or a service
EXAMPLE Producer, distributor, retailer or vendor of a product or service.
Note 1 to entry: A supplier can be internal or external to the organization.
Note 2 to entry: In a contractual situation, a supplier is sometimes called a “contractor”.
[SOURCE: ISO 9000:2015, 3.2.5]
3.1.16
unidirectional airflow
UDAF
controlled airflow through the entire cross-section of a cleanroom or a clean zone with a steady velocity
and airstreams that are considered to be parallel
Note 1 to entry: This type of airflow results in a directed transport of particles and other contaminants from the
clean zone.
[SOURCE: ISO 14644-1:2015, 3.2.7, modified — Note 1 to entry added.]
3.1.17
ventilation effectiveness
dimensionless index that relates to both the dilution and removal of indoor airborne contaminants as
it determines how effectively the filtered supply air is distributed to the critical areas in the occupied
space and the contamination removed by the air leaving the room
Note 1 to entry: Ventilation effectiveness can be expressed in terms of air change effectiveness (ACE) or
contaminant removal effectiveness (CRE). In cleanrooms, mostly ACE is used.
3.1.18
verification
confirmation, through the provision of objective evidence, that specified requirements have been
fulfilled
Note 1 to entry: The objective evidence needed for a verification can be the result of an inspection, testing or
other forms of determination, such as performing alternative calculations or reviewing documents.
Note 2 to entry: The activities carried out for verification are sometimes called a qualification process.
Note 3 to entry: The word “verified” is used to designate the corresponding status.
[SOURCE: ISO 9000:2015, 3.8.12]
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ISO 14644-4:2022(E)
3.2 Installation
3.2.1
air-handling unit
AHU
unit or plant comprising fan, filtration, heating, cooling, humidification or dehumidification and mixing
of fresh air and recirculated air, that provides conditioned air to a room or facility
3.2.2
air diffuser
device placed at the outlet of a room air supply terminal to improve distribution and mixing of supply
air with room air
Note 1 to entry: A mesh grille or a perforated screen is not considered to be a diffuser.
3.2.3
installation
cleanroom or one or more clean zones, together with all associated structures, air-treatment systems,
services and utilities
[SOURCE: ISO 14644-1:2015, 3.1.3]
3.2.4
filter system
assembly composed of filter, frame and other support mechanism or other housing
[SOURCE: ISO 14644-3:2019, 3.3.4]
3.2.5
final filter
last high-efficiency air filter in the system before the air enters the cleanroom or clean zone
Note 1 to entry: Terminal filter is a final filter located at the point where the air enters the cleanroom
[SOURCE: ISO 14644-3:2019, 3.3.5, modified — Definition revised and Note 1 to entry added.]
3.2.6
turn-down
controlled reduction of airflow velocity in unidirectional airflow cleanrooms and clean air devices or
airflow rates in non-UDAF cleanrooms in order to save energy during periods when the cleanroom is
not in operation
[SOURCE: ISO 14644-16:2019, 3.2.8]
4 Abbreviated terms
ACE air change effectiveness
AHU air-handling unit
CRE contaminant removal effectiveness
ESD electrostatic discharge
HEPA high-efficiency parti
...