oSIST ISO 19694-7:2025
(Main)Stationary source emissions - Determination of greenhouse gas emissions in energy-intensive industries - Part 7: Semiconductor and display industries
Stationary source emissions - Determination of greenhouse gas emissions in energy-intensive industries - Part 7: Semiconductor and display industries
This document provides a methodology for calculating greenhouse gas (GHG) emissions from the semiconductor and display industry. This document includes the manufacture of semiconductor devices, microelectromechanical systems (MEMS), photovoltaic (PV) devices and displays. This document allows to report GHG emissions for various purposes and on different bases, such as a per-plant basis, per-company basis (by country or by region) or an international group basis. This document addresses all of the following direct and indirect sources of GHG:
— direct GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 a)] from sources that are owned or controlled by the company, such as emissions resulting from the following sources:
— process: fluorinated compound (FC) gases and nitrous oxide (N2O) used in etching and wafer cleaning (EWC), remote plasma cleaning (RPC), in situ plasma cleansing (IPC), in situ thermal cleaning (ITC), N2O thin film deposition (TFD), and other N2O using process;
— fuel combustion related to equipment and on-site vehicles, room heating/cooling;
— fuel combustion of fuels for on-site power generation;
— indirect GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 b)] from the generation of imported electricity, heat or steam consumed by the organization.
Other indirect GHG emissions [as defined in ISO 14064-1:2018, 5.2.4 c) to f)], which are the consequence of an organization’s activities, but arise from GHG sources that are owned or controlled by other organizations, are excluded from this document.
Émissions de sources fixes - Détermination des émissions de gaz à effet de serre dans les industries énergo-intensives - Partie 7: Industries des semi-conducteurs et des écrans
Emisije nepremičnih virov - Določanje emisij toplogrednih plinov (TGP) v energetsko intenzivnih industrijah - 7. del: Proizvodnja polprevodnikov in prikazovalnikov
General Information
Standards Content (Sample)
International
Standard
ISO 19694-7
First edition
Stationary source emissions —
2024-02
Determination of greenhouse gas
emissions in energy-intensive
industries —
Part 7:
Semiconductor and display
industries
Émissions de sources fixes — Détermination des émissions de gaz
à effet de serre dans les industries énergo-intensives —
Partie 7: Industries des semi-conducteurs et des écrans
Reference number
© ISO 2024
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ii
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 2
4 Abbreviated terms . 6
5 Determination of GHG emissions principles . 7
5.1 General .7
5.2 Major GHG emissions in semiconductor and display .7
5.3 Determination based on mass balance .7
5.4 Determination based on stack emission measurements .8
6 Inventory boundaries . 8
6.1 General .8
6.2 Organizational boundaries .8
6.3 Reporting boundaries .9
7 Direct GHG emissions and their determination . 9
7.1 General .9
7.2 Direct GHG emissions from combustion and transportation .10
7.3 Direct GHG emissions from process emissions .10
7.3.1 General .10
7.3.2 Tier 1 . 13
7.3.3 Tier 2a .14
7.3.4 Tier 2b . 15
7.3.5 Tier 2c. 15
7.3.6 Tier 3a — Measured process-specific parameters .19
7.3.7 Tier 3b — Stack testing .19
7.3.8 Fluorinated liquids . 22
8 Indirect emissions from imported energy and their determination .23
8.1 General . 23
8.2 GHG emissions from imported electricity . 23
8.3 GHG emissions from external fossil and alternative fuels production and processing.24
9 General requirements for identifying, calculating and reporting of GHG emissions .24
10 Baselines, acquisitions and disinvestments .25
11 Reporting and performance assessment .25
11.1 General . 25
11.2 Corporate environmental reporting . 26
11.3 Reporting periods . 26
11.4 Performance assessment . 26
12 Uncertainty of GHG inventories .27
12.1 General .27
12.2 A ssessment of uncertainty of the mass balance based method . 28
12.2.1 Major sources of uncertainty . 28
12.2.2 Uncertainty of activity data . 28
12.2.3 Aggregated uncertainties of activity data. 29
12.2.4 Application of default values instead of analytical results . 30
12.2.5 Evaluation of the overall uncertainty of a GHG inventory . 30
12.3 A ssessment of the uncertainty for the stack-measurement method . 30
Annex A (informative) Content of the monitoring plan .31
Annex B (informative) Default emission factors .32
iii
Bibliography .40
iv
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
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with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
ISO/IEC Directives, Part 2 (see www.iso.org/directives).
ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a)
patent(s) which may be required to implement this document. However, implementers are cautioned that
this may not represent the latest information, which may be obtained from the patent database available at
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This document was prepared by Technical Committee ISO/TC 146, Air quality, Subcommittee SC 1, Stationary
source emissions.
A list of all parts in the ISO 19694 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.
v
Introduction
0.1 General
This document for the semiconductor and display industry is based on 2019 Refinement to the 2006 IPCC
Guideline for National Greenhouse Gas Inventories.
This document, which deals with specific requirements for the semiconductor and display industry, has
been harmonized with ISO 14064-1 and ISO 19694-1, which deal with broader requirements. ISO 19694-1
and this document provide a harmonized method for:
— measuring, testing and quantifying methods for greenhouse gas (GHG) emissions;
— assessing the level of GHG emissions performance of production processes over time, at production sites;
and
— establishing and providing reliable, accurate and quality information for reporting and verification
purposes.
0.2 Overview of semiconductor and display manufacturing process
Semiconductor and display manufacture include processes, such as TFD or plasma EWC of silicon-containing
materials, that result in significant carbon dioxide emissions. These emissions are the results of the FC gases
and nitrous oxide used in the manufacturing process. Other GHG emissions in semiconductor and display
industry include the CO and CH from direct emissions of combustion, transportation, manufacturing
2 4
process or indirect emissions (e.g. room heating, on-site transpor
...
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