SIST EN 61207-7:2014
(Main)Expression of performance of gas analyzers - Part 7: Tunable semiconductor laser gas analyzers (utilizing tunable semiconductor laser absorption spectroscopy)
Expression of performance of gas analyzers - Part 7: Tunable semiconductor laser gas analyzers (utilizing tunable semiconductor laser absorption spectroscopy)
This part of IEC 61207 applies to all aspects of analyzers utilizing TSLAS for the concentration measurement of one or more gas components in a gaseous mixture or vapour. It applies to analyzers utilizing tuneable semiconductor lasers as sources and utilizing absorption spectroscopy, such as direct absorption, FMS, WMS, multi-pass absorption spectroscopy, CRDS, ICOS, PAS and CEAS techniques, etc. It applies both to in situ or extractive type analyzers. This standard includes the following, it - specifies the terms and definitions related to the functional performance of gas analyzers, utilizing tuneable semiconductor laser gas absorption spectroscopy, for the continuous measurement of gas or vapour concentration in a source gas, - unifies methods used in making and verifying statements on the functional performance of this type of analyzers, - specifies the type of tests to be performed to determine the functional performance and how to carry out these tests, - provides basic documents to support the application of the standards of quality assurance with in ISO 9001
Angabe zum Betriebsverhalten von Gasanalysatoren - Teil 7: Gasanalysatoren mit abstimmbaren Halbleiterlasern
Expression des performances des analyseurs de gaz - Partie 7: Analyseurs de gaz laser à semi-conducteurs accordables (à spectroscopie à absorption laser à semi-conducteur accordable)
La CEI 61207-7:2013 comprend la terminologie, les définitions, les déclarations et les essais spécifiques aux analyseurs de gaz laser à semiconducteurs accordables, qui utilisent la spectroscopie à absorption laser à semiconducteur accordable. Elle s'applique à tous les aspects des analyseurs à TSLAS utilisés pour la mesure de la concentration d'un ou de plusieurs composants de gaz dans un mélange gazeux ou de la vapeur. Elle s'applique aux analyseurs à sources lasers à semiconducteurs accordables et utilisés dans le cadre de la spectroscopie d'absorption, comprenant les techniques d'absorption directe, FMS, WMS, spectroscopie d'absorption multipassages, CRDS, ICOS, PAS et CEAS, etc.
Prikaz lastnosti analizatorjev plina - 7. del: Analizatorji plina z nastavljivim polprevodniškim laserjem (absorpcijska spektroskopija, ki uporablja nastavljiv polprevodniški laser) (IEC 61207-7:2013)
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN 61207-7:2014
01-april-2014
Prikaz lastnosti analizatorjev plina - 7. del: Analizatorji plina z nastavljivim
polprevodniškim laserjem (absorpcijska spektroskopija, ki uporablja nastavljiv
polprevodniški laser) (IEC 61207-7:2013)
Expression of performance of gas analyzers - Part 7: Tunable semiconductor laser gas
analyzers (utilizing tunable semiconductor laser absorption spectroscopy)
Angabe zum Betriebsverhalten von Gasanalysatoren - Teil 7: Gasanalysatoren mit
abstimmbaren Halbleiterlasern
Expression des performances des analyseurs de gaz - Partie 7: Analyseurs de gaz laser
à semi-conducteurs accordables (à spectroscopie à absorption laser à semi-conducteur
accordable)
Ta slovenski standard je istoveten z: EN 61207-7:2013
ICS:
71.040.40 Kemijska analiza Chemical analysis
SIST EN 61207-7:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN 61207-7:2014
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SIST EN 61207-7:2014
EUROPEAN STANDARD
EN 61207-7
NORME EUROPÉENNE
December 2013
EUROPÄISCHE NORM
ICS 19.040; 71.040.40
English version
Expression of performance of gas analyzers -
Part 7: Tuneable semiconductor laser gas analyzers
(IEC 61207-7:2013)
Expression des performances Angabe zum Betriebsverhalten
des analyseurs de gaz - von Gasanalysatoren -
Partie 7: Analyseurs de gaz laser à semi- Teil 7: Gasanalysatoren mit abstimmbaren
conducteurs accordables Halbleiterlasern
(CEI 61207-7:2013) (IEC 61207-7:2013)
This European Standard was approved by CENELEC on 2013-10-30. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the CEN-CENELEC Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the CEN-CENELEC Management Centre has the same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany,
Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland,
Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Avenue Marnix 17, B - 1000 Brussels
© 2013 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 61207-7:2013 E
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SIST EN 61207-7:2014
EN 61207-7:2013 - 2 -
Foreword
The text of document 65B/876/FDIS, future edition 1 of IEC 61207-7, prepared by SC 65B
"Measurement and control devices” of IEC/TC 65 “Industrial-process measurement, control and
automation" was submitted to the IEC-CENELEC parallel vote and approved by CENELEC as
EN 61207-7:2013.
The following dates are fixed:
• latest date by which the document has to be (dop) 2014-07-30
implemented at national level by
publication of an identical national
standard or by endorsement
(dow) 2016-10-30
• latest date by which the national
standards conflicting with the
document have to be withdrawn
This Standard is to be used in conjunction with EN 61207-1:2010.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such
patent rights.
Endorsement notice
The text of the International Standard IEC 61207-7:2013 was approved by CENELEC as a European
Standard without any modification.
In the official version, for Bibliography, the following note has to be added for the standard indicated:
ISO 9001 NOTE Harmonized as EN ISO 9001.
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Annex ZA
(normative)
Normative references to international publications
with their corresponding European publications
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
NOTE When an international publication has been modified by common modifications, indicated by (mod), the relevant EN/HD
applies.
Publication Year Title EN/HD Year
IEC 60654-1 1993 Industrial-process measurement EN 60654-1 1993
and control equipment - Operating
conditions -
Part 1: Climatic conditions
1)
IEC 60654-2 1979 Operating conditions for industrial-process EN 60654-2 1997
+ A1 1992 measurement and control equipment -
Part 2: Power
IEC 60654-3 1983 Operating conditions for industrial-process EN 60654-3 1997
measurement and control equipment -
Part 3: Mechanical influences
IEC 60825-1 2007 Safety of laser products - EN 60825-1 2007
Part 1: Equipment classification and
requirements
IEC 61207-1 2010 Expression of performance EN 61207-1 2010
of gas analyzers -
Part 1: General
1)
EN 60654-2 includes A1 to IEC 60654-2.
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SIST EN 61207-7:2014
IEC 61207-7
®
Edition 1.0 2013-09
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Expression of performance of gas analyzers –
Part 7: Tuneable semiconductor laser gas analyzers
Expression des performances des analyseurs de gaz –
Partie 7: Analyseurs de gaz laser à semiconducteurs accordables
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX T
ICS 19.040; 71.040.40 ISBN 978-2-8322-1117-5
Warning! Make sure that you obtained this publication from an authorized distributor.
Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.
® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale
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CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 7
4 Procedure for specification . 10
4.1 General . 10
4.2 In situ analyzers . 10
4.2.1 Additional operation and maintenance requirements . 10
4.2.2 Additional terms related to the specification of performance . 10
4.2.3 Additional limits of uncertainties . 11
4.3 Extractive analyzers . 11
4.3.1 Additional operation and maintenance requirements . 11
4.3.2 Additional terms related to the specification of performance . 12
4.4 Recommended standard values and range of influence quantities . 12
4.5 Laser safety . 12
5 Procedures for compliance testing . 12
5.1 In situ analyzers . 12
5.1.1 General . 12
5.1.2 Apparatus to simulate measurement condition . 13
5.1.3 Apparatus to generate test gas mixture . 13
5.1.4 Apparatus to investigate the attenuation induced by opaque dust,
liquid droplets and other particles . 13
5.1.5 Testing procedures . 14
5.2 Extractive analyzers . 16
5.2.1 General . 16
5.2.2 Apparatus to generate test gas mixture . 16
5.2.3 Testing procedures . 16
Annex A (informative) Systems of tuneable semiconductor laser gas analyzers . 18
Annex B (normative) Examples of the test apparatus . 19
Bibliography . 23
Figure A.1 – Tuneable semiconductor laser gas analyzers . 18
Figure B.1 – Example of a test apparatus to simulate measurement condition for
across-duct and open-path analyzers . 19
Figure B.2 – Example of a test apparatus to simulate measurement condition for probe
type analyzers . 19
Figure B.3 – Example of apparatus to generate the test gas mixture . 20
Figure B.4 – Delay time, rise time and fall time . 21
Figure B.5 – Example of a grid to simulate the attenuation by the dust in optical path . 22
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INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
EXPRESSION OF PERFORMANCE OF GAS ANALYZERS –
Part 7: Tuneable semiconductor laser gas analyzers
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 61207-7 has been prepared by subcommittee 65B: Measurement
and control devices, of IEC technical committee 65: Industrial-process measurement, control
and automation.
The text of this standard is based on the following documents:
FDIS Report on voting
65B/876/FDIS 65B/891/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This International Standard is to be used in conjunction with IEC 61207-1:2010.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
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A list of all parts of the IEC 61207 series, under the general title Expression of performance of
gas analyzers, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
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61207-7 IEC:2013 – 5 –
INTRODUCTION
This part of IEC 61207 includes the terminology, definitions, statements and tests that are
specific to tuneable semiconductor laser gas analyzers, which utilize tuneable semiconductor
laser absorption spectroscopy (TSLAS).
Tuneable semiconductor laser gas analyzers utilize tuneable semiconductor lasers (e.g. diode
lasers, quantum cascade lasers, interband cascade lasers) as light sources, whose
wavelength covers ultraviolet, visible and infrared part of the electromagnetic spectrum, to
detect the absorption spectra and thus determine the concentration of gases to be analyzed.
These analyzers may employ different TSLAS techniques such as direct absorption
spectroscopy, frequency modulation spectroscopy (FMS), wavelength modulation
spectroscopy (WMS), etc. Multi-pass absorption spectroscopy, photoacoustic spectroscopy
(PAS), and cavity-enhanced absorption spectroscopy (CEAS) such as cavity-ringdown
spectroscopy (CRDS) are also used to take advantage of their high detection sensitivity.
Tuneable semiconductor laser gas analyzers are usually used to measure concentration of
small molecule gases, such as oxygen, carbon monoxide, carbon dioxide, hydrogen sulfide,
ammonia, hydrogen fluoride, hydrogen chloride, nitrogen dioxide, water vapour etc.
There are two main types of tuneable semiconductor laser gas analyzers: extractive and in
situ analyzers. The extractive analyzers measure the sample gas withdrawn from a process or
air by a sample handling system. The in situ analyzers measure the gas in its original place,
including across-duct, probe and open-path types. Across-duct analyzers either have a laser
source and a detector mounted on opposite sides of a duct, or both the laser and the detector
are mounted on the same side and a retroreflector on the opposite side of a duct. Probe
analyzers comprise a probe mounted into the duct, and the measured gas either passes
through or diffuses into the measuring optical path inside the probe. And open-path analyzers
measure the gas in an open environment with a hardware approach similar to across duct
analyzers (source and detector on opposite sides of the open area or a retroreflector on one
side and the source and detector on the opposite side), except the sample is in an open path
and not contained in a duct.
NOTE 1 Traditionally, only diode lasers were employed, and thus tuneable diode laser gas analyzers and
tuneable diode laser absorption spectroscopy (TDLAS) are widely used terms. However, with the development of
laser technology, many other types of semiconductor lasers, such as quantum cascade lasers (QCLs) and
interband cascade lasers (ICLs) have been developed and employed in laser gas analyzers. Therefore, the term of
semiconductor laser rather than diode laser is used in this standard to reflect this technology advancement.
NOTE 2 Though tuneable semiconductor laser photoacoustic spectroscopy (PAS) is in principle different from
absorption spectroscopy typically used in tuneable semiconductor laser gas analyzers, the hardware and data
reduction software are almost the same for analyzers utilizing these two spectroscopy technologies, and thus PAS
is considered a variant of absorption spectroscopy and this standard also applies to the analyzers based on PAS.
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EXPRESSION OF PERFORMANCE OF GAS ANALYZERS –
Part 7: Tuneable semiconductor laser gas analyzers
1 Scope
This part of IEC 61207 applies to all aspects of analyzers utilizing TSLAS for the
concentration measurement of one or more gas components in a gaseous mixture or vapour.
It applies to analyzers utilizing tuneable semiconductor lasers as sources and utilizing
absorption spectroscopy, such as direct absorption, FMS, WMS, multi-pass absorption
spectroscopy, CRDS, ICOS, PAS and CEAS techniques, etc.
It applies both to in situ or extractive type analyzers. This standard includes the following, it
– specifies the terms and definitions related to the functional performance of gas analyzers,
utilizing tuneable semiconductor laser gas absorption spectroscopy, for the continuous
measurement of gas or vapour concentration in a source gas,
– unifies methods used in making and verifying statements on the functional performance of
this type of analyzers,
– specifies the type of tests to be performed to determine the functional performance and
how to carry out these tests,
– provides basic documents to support the application of the standards of quality assurance
with in ISO 9001
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and
are indispensable for its application. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any
amendments) applies.
IEC 60654-1:1993, Industrial-process measurement and control equipment – Operating
conditions – Part 1: Climatic conditions
IEC 60654-2:1979, Operating conditions for industrial-process measurement and control
equipment – Part 2: Power
Amendment 1:1992
IEC 60654-3:1983, Operating conditions for industrial-process measurement and control
equipment – Part 3: Mechanical influences
IEC 60825-1:2007, Safety of laser products – Part 1: Equipment classification and
requirements
IEC 61207-1:2010, Expression of performance of gas analyzers – Part 1: General
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61207-7 IEC:2013 – 7 –
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
semiconductor laser
solid-state laser, in which the semiconductor material is used as active media
3.2
diode laser
semiconductor laser which is formed from a p-n junction and powered by injected electric
current
3.3
quantum cascade laser
semiconductor laser whose laser emission is achieved through the use of intersubband
transitions in a repeated stack of semiconductor multiple quantum structure, and typically
emits in the mid- to far-infrared portion of the electromagnetic spectrum
3.4
interband cascade laser
semiconductor laser whose laser emission is achieved through the use of interband
transitions between electrons and holes in a repeated stack of semiconductor multiple
quantum structure, but, instead of losing an electron to the valence band, the valence electron
can tunnel into the conduction band of the next quantum structure, and this process can be
repeated throughout the multiple quantum structure
3.5
extractive analyzer
analyzer which receives and analyzes a continuous stream of gas withdrawn from a process
by a sample handling system
3.6
in situ analyzer
analyzer which measures the gas in its original place, including across-duct, probe and open-
path types
3.7
tuneable semiconductor laser absorption spectroscopy
TSLAS
spectroscopy which utilizes a tuneable semiconductor laser as radiation source, tunes the
emission wavelength of the laser over the characteristic absorption lines of measured species
in the laser beam path, detects the reduction of the measured signal intensity, and then
determines the gas concentration
3.8
tuneable semiconductor laser gas analyzer
gas analyzer which utilizes TSLAS to measure the concentration of one or more gas
components in a gaseous mixture or vapour
3.9
wavelength modulation spectroscopy
laser gas absorption spectroscopy, in which the wavelength of the laser beam is continuously
modulated across the absorption line and the signal is detected at a harmonic of the
modulation frequency
Note 1 to entry: Wavelength modulation spectroscopy utilizes a modulation frequency which is less than the half-
width frequency of the transition lineshape.
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3.10
frequency modulation spectroscopy
spectroscopy that uses a modulation frequency larger than the half-width frequency of the
transition lineshape which results in a pair of sidebands separated from the carrier by the
modulation frequency
Note 1 to entry: An alteration of any of the sidebands by absorption causes an unbalance and therefore a net
signal which can be detected by a high speed photodetector.
3.11
cavity enhanced absorption spectroscopy
spectroscopy which utilizes the resonance of laser beam in high-finesse optical cavity to
prolong the effective path lengths
3.12
photoacoustic spectroscopy
spectroscopy which is based on the photoacoustic effect
Note 1 to entry: The acoustic effect is the energy from the laser beam transformed into kinetic energy of the
absorbing gas molecules. This results in local heating and thus a pressure wave or sound. By measuring the sound
intensity, the gas concentration can be determined.
3.13
multi-pass absorption spectroscopy
absorption spectroscopy utilizing a multi-pass gas cell, in which the reflected laser beam
passes through the gas multi-times to increase optical path length
3.14
transmittance
ratio of incident light energy transmitted to the total light energy incident on a given sample
3.15
transmittance influence uncertainty
maximum difference between the indicated values of gas concentration when transmittance
assumes any value larger than the rated minimum transmittance, while all other values are at
reference conditions
EXAMPLE Transmittance is reduced by dust, liquid droplets, and other particles in the measured gas and the
pollution of optical windows.
3.16
purge
method using zero gas to blow parts of the analyzer during measurement or calibration to
prevent the optical components from staining or being coated, and to implement positive
pressure explosion protection, or to avoid interference from gases outside measured path
3.17
purged optical path length
length of optical path filled with purge gas
3.18
gas temperature
temperature of measured gases
EXAMPLE Temperature of gas in the duct for across-duct analyzers, temperature of gas in the probe cavity for
probe analyzers, ambient gas temperature in the open environment for open-path analyzers, gas temperature in
the gas cell for extractive analyzers.
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3.19
gas pressure
pressure of measured gases
EXAMPLE The pressure in duct for across-duct and probe analyzers, ambient pressure of the open environment
for open-path analyzers, and the pressure in gas cell for extractive analyzers.
3.20
gas temperature influence uncertainty
maximum difference between the indicated values of gas concentration when the temperature
assumes any value within the rated range of gas temperature, all others being at reference
conditions
3.21
gas temperature influence uncertainty for calibration
maximum difference between the indicated values of gas concentration when the temperature
assumes any value within the rated range of calibration gas temperature, all others being at
reference conditions
3.22
gas pressure influence uncertainty
maximum difference between the indicated values of gas concentration when the pressure
assumes any value within the rated range of gas pressure, all others being at reference
conditions
3.23
gas pressure influence uncertainty for calibration
maximum difference between the indicated values of gas concentration when the pressure
assumes any value within the rated range of calibration gas pressure, all others being at
reference conditions
3.24
laser safety
safety design for use and implementation of lasers to minimise the risk of laser accidents,
especially those involving eye injuries
3.25
optical interference noise
interference fringes generated through multiple beam interferences between optical surfaces
within the coherent light source and the detector
Note 1 to entry: Interference fringes cause oscillation of the photocurrent during wavelength scanning. This
oscillation results in noise added to the absorption signal.
3.26
interfering components
components which interfere with the measurement of target species
Note 1 to entry: These interfering components include not only optically absorbing species by the fact that the
absorbance spectrum overlaps to the target species, but also non-optically absorbing species by line broadening of
the target species. (this can make stating/determining the measurement accuracy difficult).
Note 2 to entry: Namely, shape of optical absorbance spectrum of target species to be measured can be changed
itself significantly by change of background gas composition.
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4 Procedure for specification
4.1 General
The procedures for specification are detailed in IEC 61207-1. This covers:
– operation and storage requirements;
– specification of ranges of measurement and output signals;
– limits of uncertainties;
– recommended reference values and rated ranges of influence quantities (s
...
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