Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

SCOPE
1.1 Auger and x-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.  
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Publication Date
09-Sep-1999
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ASTM E996-94(1999) - Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E996–94 (Reapproved 1999)
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
Photoelectron Spectroscopy
This standard is issued under the fixed designation E 996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope 4. Summary of Practice
1.1 Auger and x-ray photoelectron spectra are obtained 4.1 Report all experimental conditions that affectAuger and
using a variety of excitation methods, analyzers, signal pro- x-ray photoelectron spectra so spectra can be reproduced in
cessing, and digitizing techniques. other laboratories or be compared with other spectra.
1.2 This practice lists the desirable information that shall be
5. Significance and Use
reported to fully describe the experimental conditions, speci-
5.1 Includetheexperimentalconditionsunderwhichspectra
men conditions, data recording procedures, and data transfor-
mation processes. are taken in the “Experiment” section of all reports and
publications.
1.3 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the 5.2 Identify any parameters that are changed between dif-
ferent spectra in the “Experiment” section of publications and
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica- reports, and include the specific parameters applicable to each
spectrum in the figure caption.
bility of regulatory limitations prior to use.
2. Referenced Documents 6. Information To Be Reported
6.1 Equipment Used:
2.1 ASTM Standards:
E 673 Terminology Relating to Surface Analysis 6.1.1 If a commercial electron spectroscopy system is used,
specify the manufacturer and model. Indicate the type of
E 902 Practice for Checking the Operating Characteristics
of X-Ray Photoelectron Spectrometers electron excitation source and electron analyzer as well as the
E 983 Guide for Minimizing Unwanted Electron Beam model designation of other equipment used for generating the
experimental data, such as a sputter ion source.
Effects in Auger Electron Spectroscopy
E 995 Guide for Background Subtraction Techniques in 6.1.2 If a spectrometer system has been assembled from
several components specify the manufacturers and model
Auger Electron Spectroscopy and X-Ray Photoelectron
Spectroscopy numbers of excitation source, analyzer, and auxiliary equip-
ment.
E 1078 Guide for Specimen Handling in Auger Electron
Spectroscopy, X-Ray Photoelectron Spectroscopy and Sec- 6.1.3 Identify the model name, version number, and manu-
facturer of software packages used to acquire or process the
ondary Ion Mass Spectroscopy
E 1127 Guide for Depth Profiling in Auger Electron Spec- data.
6.2 Specimen Analyzed:
troscopy
6.2.1 Describe the specimen as completely as possible, for
3. Terminology
example, its bulk composition, history, any methods of clean-
3.1 Definitions—For definitions of terms used in this guide, ing or sectioning pre-analysis treatments, and dimensions.
refer to Terminology E 673. 6.2.2 Describe the method of mounting and positioning the
specimen for analysis, for example, mounted on a carousel, or
mounted between strips of a particular metal. If the specimen
This practice is under the jurisdiction of ASTM Committee E-42 on Surface
is heated, cooled or treated in the spectrometer system,
Analysis and is the direct responsibility of Subcommittee E42.03 onAuger Electron
Spectroscopy and XPS. describe the method used (for example, heated by electron
Current edition approved Sept. 15, 1994. Published November 1994. Originally
bombardment on the back of the specimen, or resistively
e1
published as E 996 – 84. Last previous edition E 996 – 89 .
heated). See Guide E 1078 for more detail.
Annual Book of ASTM Standards, Vol 03.06.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
E996
6.2.3 State the operating pressure of the vacuum system sured directly, or by a voltage isolation method, by pulse
during data acquisition and the position of the vacuum gage counting, or by voltage-to-frequency conversion. For a multi-
relativetothespecimenbeinganalyzed.Stateifthesystemwas channel detector, give the number of channels in the spectrum
backfilled with a sputter gas. Indicate the presence of active covered by the width of the detector.
gases if they are appropriate to the measurement. If the system
6.3.9 Signal Averaging—If the spectrum is signal averaged,
(and specimen) was baked-out before analysis, the time,
state the number of scans.
temperature and final pressure should also be stated.
6.3.10 Sputtering—If ion sputtering was used for cleaning
6.3 Parameters Used for Analysis:
or sputter depth profiling, describe the ion species, ion energy,
6.3.1 ExcitationSource—Forelectronbeamexcitation,state
energy filtering, neutral rejection (if employed), the beam
thebeamenergy,beamsize,incidentcurrent,whetherthebeam
current, diameter, or maximum current density, and angle of
is stationary or scanning (if scanning, state the area), and angle
incidence. If ion beam scanning is used, state the area and rate.
of incidence. State the method used to determine the electron
State the total pressure in the vicinity of the specimen (if
beam diameter. (See Note 1.) For radiation-sensitive speci-
known) and if the sputtering source was differentially pumped.
mens, give the pre-analysis and analysis beam exposure times.
If a depth scale is given on a sputter depth profile, state the
See Guide E 983 to minimize unwanted electron beam effects.
method of depth calibration. If the sputter rate is not known, it
For x-ray excitation, specify the anode material, characteristic
is recommended that relative sputter rates be determined using
radiation energy, beam site at the specimen, source strength,
a known thickness of tantalum pentoxide or silicon dioxide.
electron emission current, acceleration voltage, and window
State the specimen rotation rate if rotational depth profiling
material.
was used.
6.4 Data Handling:
NOTE 1—The common method of measuring incident electron beam
6.4.1 Data Processing—Describe any smoothing, differen-
current by applying a low (approximately + 100 volt) specimen bias does
not account for emission of backscattered electrons.The preferred method
tiation, background subtraction (see Guide E 995), deconvolu-
is to use a Faraday cup bearing a small entrance aperture to limit the
tions, curve resolution, intensity scale correction, satellite
number of electrons escaping.
subtraction, or other processing of the data. Specify any
assumptions and approximations required for the processing,
6.3.2 Charge Correction—For insulating specimens, it is
together with the data reduction algorithm. In the case of
often necessary to correct for the charging of the specimen
multiple processing methods, the step-by-step effect of each
under irradiation. When energies of lines from such specimens
method should be explained.
are quoted, the method of charge corr
...

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