ASTM E1161-09

Standard Practice for Radiologic Examination of Semiconductors and Electronic Components

SIGNIFICANCE AND USE
This practice establishes the basic minimum parameters and controls for the application of radiological examination of electronic devices. Factors such as device handling, equipment, ESDS, materials, personnel qualification, procedure and quality requirements, reporting, records and radiation sensitivity are addressed. This practice is written so it can be specified on the engineering drawing, specification or contract. It is not a detailed how-to procedure and must be supplemented by a detailed examination technique/procedure (see 9.1).
This practice does not set limits on radiation dose, but does list requirements to limit and document radiation dose to devices. When radiation dose limits are an issue, the requestor of radiological examinations must be cognizant of this issue and state any maximum radiation dose limitations that are required in the contractual agreement between the using parties.
SCOPE
1.1 This practice provides the minimum requirements for nondestructive radiologic examination of semiconductor devices, microelectronic devices, electromagnetic devices, electronic and electrical devices, and the materials used for construction of these items.
1.2 This practice covers the radiologic examination of these items to detect possible defective conditions within the sealed case, especially those resulting from sealing the lid to the case, and internal defects such as extraneous material (foreign objects), improper interconnecting wires, voids in the die attach material or in the glass (when sealing glass is used) or physical damage.
1.3 The values stated in inch-pound units are to be regarded as standard. No other units of measurement are included in this practice.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 31-May-2009
• ICS: 31.080.01 - Semiconductor devices in general
• Technical Committee: E07 - Nondestructive Testing
• Drafting Committee: E07.01 - Radiology (X and Gamma) Method

Relations

• Replaces: ASTM E1161-03 - Standard Test Method for Radiologic Examination of Semiconductors and Electronic Components
• Effective Date: 01-Jun-2009
• Referred By: ASTM E2033-17 - Standard Practice for Radiographic Examination Using Computed Radiography (Photostimulable Luminescence Method)
• Effective Date: 01-Jun-2009
• Referred By: ASTM E431-96(2022) - Standard Guide to Interpretation of Radiographs of Semiconductors and Related Devices
• Effective Date: 01-Jun-2009

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E1161 − 09
StandardPractice for
Radiologic Examination of Semiconductors and Electronic
1
Components
This standard is issued under the fixed designation E1161; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope E666Practice for CalculatingAbsorbed Dose From Gamma
or X Radiation
1.1 This practice provides the minimum requirements for
E999Guide for Controlling the Quality of Industrial Radio-
nondestructive radiologic examination of semiconductor
graphic Film Processing
devices, microelectronic devices, electromagnetic devices,
E1000Guide for Radioscopy
electronic and electrical devices, and the materials used for
E1079Practice for Calibration of Transmission Densitom-
construction of these items.
eters
1.2 Thispracticecoverstheradiologicexaminationofthese
E1254Guide for Storage of Radiographs and Unexposed
items to detect possible defective conditions within the sealed
Industrial Radiographic Films
case,especiallythoseresultingfromsealingthelidtothecase,
E1255Practice for Radioscopy
and internal defects such as extraneous material (foreign
E1316Terminology for Nondestructive Examinations
objects), improper interconnecting wires, voids in the die
E1390Specification for Illuminators Used for Viewing In-
attach material or in the glass (when sealing glass is used) or
dustrial Radiographs
physical damage.
E1411Practice for Qualification of Radioscopic Systems
1.3 Thevaluesstatedininch-poundunitsaretoberegarded E1453Guide for Storage of Magnetic Tape Media that
Contains Analog or Digital Radioscopic Data
asstandard.Nootherunitsofmeasurementareincludedinthis
practice. E1475Guide for Data Fields for Computerized Transfer of
Digital Radiological Examination Data
1.4 This standard does not purport to address all of the
E1742Practice for Radiographic Examination
safety concerns, if any, associated with its use. It is the
E1815Test Method for Classification of Film Systems for
responsibility of the user of this standard to establish appro-
Industrial Radiography
priate safety and health practices and determine the applica-
E1817Practice for Controlling Quality of Radiological Ex-
bility of regulatory limitations prior to use.
amination by Using Representative Quality Indicators
(RQIs)
2. Referenced Documents
E2339Practice for Digital Imaging and Communication in
2
2.1 ASTM Standards:
Nondestructive Evaluation (DICONDE)
E94Guide for Radiographic Examination
E2597Practice for Manufacturing Characterization of Digi-
E431Guide to Interpretation of Radiographs of Semicon-
tal Detector Arrays
ductors and Related Devices
3
2.2 ANSI Standards:
E543Specification forAgencies Performing Nondestructive
ANSI/ESDS20.20ESDAssociationStandardfortheDevel-
Testing
opmentofanElectrostaticDischargeControlProgramfor
E801Practice for Controlling Quality of Radiological Ex-
Protection of Electrical and Electronic Parts, Assemblies
amination of Electronic Devices
and Equipment (Excluding Electrically Initiated Explo-
sive Devices)
4
2.3 ASNT Standard:
1
This practice is under the jurisdiction of ASTM Committee E07 on Nonde-
ANSI/ASNT CP-189Standard for Qualification and Certifi-
structive Testing and is the direct responsibility of Subcommittee E07.01 on
cation of Nondestructive Testing Personnel
Radiology (X and Gamma) Method.
SNT-TC-1APersonnel Qualification and Certification
CurrenteditionapprovedJune1,2009.PublishedJuly2009.Originallyapproved
in 1987. Last previous edition approved in 2003 as E1161–03. DOI: 10.1520/
E1161-09.
2 3
For referenced ASTM standards, visit the ASTM website, www.astm.org, or Available fromAmerican National Standards Institute (ANSI), 25 W. 43rd St.,
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM 4th Floor, New York, NY 10036, http://www.ansi.org.
4
Standards volume information, refer to the standard’s Document Summary page on AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
the ASTM website. 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E1161 − 09
5
2.4 AIA Documents: 3.2.3 micro-bubbles—A film defect where tiny bubbles in
NAS-410Certification and Qualification of Nondestructive the film’s emulsion create white dots on the processed radio-
Test Personnel graph. Micro-bubbles are unacceptable when they show up in
6
the area of interest of a device because they can be interpreted
2.5 Department of Defense (DOD) Documents:
as extraneous matter (foreign materi
...

This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E1161–03
Standard Test Method for Designation:E1161–09
Standard Practice for
Radiologic Examination of Semiconductors and Electronic
1
Components
This standard is issued under the fixed designation E 1161; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1This test method provides a standard procedure for nondestructive radiographic examination of semiconductor devices,
electronic components, and the materials used for construction of these items. This test method covers the radiographic
examination of these items for possible defective conditions such as extraneous material within the sealed case, improper internal
connections, voids in materials used for element mounting, or the sealing glass, or physical damage.
1.2The quality level and acceptance criteria for the specimens being examined shall be specified in the detail drawing, purchase
order or contract.
1.3
1.1 This practice provides the minimum requirements for nondestructive radiologic examination of semiconductor devices,
microelectronicdevices,electromagneticdevices,electronicandelectricaldevices,andthematerialsusedforconstructionofthese
items.
1.2 This practice covers the radiologic examination of these items to detect possible defective conditions within the sealed case,
especially those resulting from sealing the lid to the case, and internal defects such as extraneous material (foreign objects),
improper interconnecting wires, voids in the die attach material or in the glass (when sealing glass is used) or physical damage.
1.3 The values stated in inch-pound units are to be regarded as standard. No other units of measurement are included in this
practice.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E94 Guide for Radiographic Examination
E 431 Guide to Interpretation of Radiographs of Semiconductors and Related Devices
E 543 PracticeSpecification for Agencies Performing Nondestructive Testing
2
E 801 Practice for Controlling Quality of Radiological Examination of Electronic Devices Practice for Controlling Quality of
Radiological Examination of Electronic Devices
E 666 Practice for Calculating Absorbed Dose From Gamma or X Radiation
E 999 Guide for Controlling the Quality of Industrial Radiographic Film Processing
E 1000 Guide for Radioscopy
E 1079 Practice for Calibration of Transmission Densitometers
E 1254 Guide for Storage of Radiographs and Unexposed Industrial Radiographic Films
E 1255 Practice for Radioscopy
2
E 1316 Terminology for Nondestructive Examinations Terminology for Nondestructive Examinations
1
This test method practice is under the jurisdiction of ASTM Committee E07 on Nondestructive Testing and is the direct responsibility of Subcommittee E07.01 on
Radiology (X and Gamma) Methods.Method.
Current edition approved June 10, 2003.1, 2009. Published August 2003.July 2009. Originally approved in 1987. Last previous edition approved in 19952003 as
E1161–95.E 1161 – 03.
2
For referencedASTM standards, visit theASTM website, www.astm.org, or contactASTM Customer Service at [e-mail]. For Annual Book of ASTM Standards
, Vol 03.03.volume information, refer to the standard’s Document Summary page on the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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E1161–09
E 1390 Specification for Illuminators Used for Viewing Industrial Radiographs
E 1411 Practice for Qualification of Radioscopic Systems
E 1453 Guide for Storage of Media that Contains Analog or Digital Radioscopic Data
E 1475 Guide for Data Fields for Computerized Transfer of Digital Radiological Examination Data
E 1742 Practice for Radiographic Examination
E 1815 Test Method for Classification of Film Systems for Industrial Radiography
E 1817 Practice for Controlling Quality of Radiological Examination by Using Representative Quality Indicators (RQIs)
E 2339 Practice for Digital Imaging and Communication in Nondestructive Evaluation (DICONDE)
E 2597 Prac
...