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ASTM F390-98(2003)

(Test Method)

Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array

Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array

ABSTRACT
This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films formed by deposition of a material or by a thinning process and supported by an insulating substrate. This test method is suitable for referee measurement purposes as well as for routine acceptance measurements. A collinear four-probe array is used to determine the sheet resistance by passing a measured direct current through the specimen between the outer probes and measuring the resulting potential difference between the inner probes. The sheet resistance is calculated from the measured current and potential values using correction factors associated with the geometry of the specimen and the probe spacing. The accuracy of the electrical measuring equipment is tested by means of an analog circuit containing a known standard resistor together with other resistors which simulate the resistance at the contacts between the probe tips and the film surface.
SCOPE
1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10   to 10  [omega]/[open-box] (see 3.1.3).  
1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.  
1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
09-May-1998
ICS
77.040.99 - Other methods of testing of metals
Technical Committee
F01 - Electronics
Drafting Committee
F01.17 - Sputter Metallization
Current Stage
Ref Project

Relations

Replaces
ASTM F390-98 - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
Effective Date
10-May-1998
Replaced By
ASTM F390-11 - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)
Effective Date
01-Jun-2011
Referred By
ASTM B488-18 - Standard Specification for Electrodeposited Coatings of Gold for Engineering Uses
Effective Date
10-May-1998
Referred By
ASTM F1711-96(2016) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe Method (Withdrawn 2023)
Effective Date
10-May-1998

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ASTM F390-98(2003) - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe ArrayASTM F390-98(2003) - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
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ASTM F390-98(2003) - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:F390–98 (Reapproved2003)
Standard Test Method for
Sheet Resistance of Thin Metallic Films With a Collinear
1
Four-Probe Array
ThisstandardisissuedunderthefixeddesignationF390;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginal
adoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscript
epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3.1.2 thin metallic film—a thin film composed of a material
−8
or materials with resistivity in the range from 10 to
1.1 This test method covers the measurement of the sheet
−3
10 V·cm.
resistance of metallic thin films with a collinear four-probe
3.1.3 sheet resistance, R [V/h]—in a thin film, the ratio of
array. It is intended for use with rectangular metallic films s
the potential gradient parallel to the current to the product of
between 0.01 and 100 µm thick, formed by deposition of a
the current density and the film thickness; in a rectangular thin
material or by a thinning process and supported by an
−2
film, the quotient of the resistance, measured along the length
insulating substrate, in the sheet resistance range from 10 to
4
ofthefilm,dividedbythelength, l,towidth, w,ratio.Theratio
10 V/h (see 3.1.3).
l/w is the number of squares.
1.2 This test method is suitable for referee measurement
purposes as well as for routine acceptance measurements.
4. Summary of Test Method
1.3 The values stated in Si units are to be regarded as the
4.1 A collinear four-probe array is used to determine the
standard. The values given in parentheses are for information
sheet resistance by passing a measured direct current through
only.
the specimen between the outer probes and measuring the
1.4 This standard does not purport to address the safety
resulting potential difference between the inner probes. The
concerns, if any, associated with its use. It is the responsibility
sheet resistance is calculated from the measured current and
of whoever uses this standard to consult and establish appro-
potential values using correction factors associated with the
priate safety and health practices and determine the applica-
geometry of the specimen and the probe spacing.
bility of regulatory limitations prior to use.
4.2 This test method includes procedures for checking both
2. Referenced Documents the probe assembly and the electrical measuring apparatus.
2
4.2.1 The spacings between the four probe tips are deter-
2.1 ASTM Standards:
mined from measurements of indentations made by the tips in
E1 Specification for ASTM Liquid-in-Glass Thermometers
a suitable surface. This test also is used to determine the
F388 Method for Measurement of Oxide Thickness on
condition of the tips.
Silicon Wafers and Metallization Thickness by Multiple-
3
4.2.2 The accuracy of the electrical measuring equipment is
Beam Interference (Tolansky Method)
tested by means of an analog circuit containing a known
3. Terminology
standard resistor together with other resistors which simulate
the resistance at the contacts between the probe tips and the
3.1 Definitions:
film surface.
3.1.1 thin film—afilmhavingathicknessmuchsmallerthan
anylateraldimension,formedbydepositionofamaterialorby
5. Apparatus
a thinning process.
5.1 Probe Assembly:
5.1.1 Probes—The probe shaft and tip shall be constructed
1
This test method is under the jurisdiction of ASTM Committee F01 on
oftungstencarbide,Monel,hardenedtoolsteel,orhardcopper
Electronics and is the direct responsibility of Subcommittee F01.17 on Sputter
and have a conical tip with included angle of 45 to 90°.
Metallization.
Alternatively, the tip may be formed from a platinum-
Current edition approved Dec. 1, 2003. Published December 2003. Originally
approved in 1973 as F390–73T. Last previous edition F390–98. DOI: 10.1520/
palladiumalloyandresistanceweldedtotheshaft.Thetipshall
F0390-98R03.
have a nominal initial radius of 25 to 50 µm. In all cases all of
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
the four paths from the electrical measurement equipment
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on inputs to the film surface must be identical.
the ASTM website.
3
Withdrawn. The last approved version of this historical standard is referenced
on www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

---------------------- Page: 1 ----------------------
F390–98 (2003)
5.1.2 Probe Force—The probes shall be uniformly loaded 6.2 Geometry—Measure the length, l, and width, w,ofthe
to exert a force sufficient to deform the metal film but specimen with vernier calipers. Record the values.
insufficient to pun
...

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1.2 Units—The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.3 This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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5.4 The practice is suitable for assessment of the indigenous inclusions in any steel (or other metal) product regardless of its size or shape as long as enough different fields can be measured to obtain reasonable statistical confidence in the data. Because the specifics of the manufacture of the product do influence the morphological characteristics of the inclusions, the report should state the relevant manufacturing details, that is, data regarding the deformation history of the product.  
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Note 1: Stereological measurement methods are used in this practice to assess the average characteristics of inclusions or other second-phase particles on a longitudinal plane-of-polish. This information, by itself, does not produce a three-dimensional description of these constituents in space as deformation processes cause rotation and alignment of these constituents in a preferred manner. Development of such information requires measurements on three orthogonal planes and is beyond the scope of this practice.  
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ASTM
ASTM E228-22(Test Method)
Standard Test Method for Linear Thermal Expansion of Solid Materials With a Push-Rod Dilatometer

SIGNIFICANCE AND USE
5.1 Coefficients of linear thermal expansion are required for design purposes and are used, for example, to determine dimensional behavior of structures subject to temperature changes, or thermal stresses that can occur and cause failure of a solid artifact composed of different materials when it is subjected to a temperature excursion.  
5.2 This test method is a reliable method of determining the linear thermal expansion of solid materials.  
5.3 For accurate determinations of thermal expansion, it is absolutely necessary that the dilatometer be calibrated by using a reference material that has a known and reproducible thermal expansion. The appendix contains information relating to reference materials in current general use.  
5.4 The measurement of thermal expansion involves two parameters: change of length and change of temperature, both of them equally important. Neglecting proper and accurate temperature measurement will inevitably result in increased uncertainties in the final data.  
5.5 The test method can be used for research, development, specification acceptance, quality control (QC) and quality assurance (QA).
SCOPE
1.1 This test method covers the determination of the linear thermal expansion of rigid solid materials using push-rod dilatometers. This method is applicable over any practical temperature range where a device can be constructed to satisfy the performance requirements set forth in this standard.
Note 1: Initially, this method was developed for vitreous silica dilatometers operating over a temperature range of –180 °C to 900 °C. The concepts and principles have been amply documented in the literature to be equally applicable for operating at higher temperatures. The precision and bias of these systems is believed to be of the same order as that for silica systems up to 900 °C. However, their precision and bias have not yet been established over the relevant total range of temperature due to the lack of well-characterized reference materials and the need for interlaboratory comparisons.  
1.2 For this purpose, a rigid solid is defined as a material that, at test temperature and under the stresses imposed by instrumentation, has a negligible creep or elastic strain rate, or both, thus insignificantly affecting the precision of thermal-length change measurements. This includes, as examples, metals, ceramics, refractories, glasses, rocks and minerals, graphites, plastics, cements, cured mortars, woods, and a variety of composites.  
1.3 The precision of this comparative test method is higher than that of other push-rod dilatometry techniques (for example, Test Method D696) and thermomechanical analysis (for example, Test Method E831) but is significantly lower than that of absolute methods such as interferometry (for example, Test Method E289). It is generally applicable to materials having absolute linear expansion coefficients exceeding 0.5 μm/(m·°C) for a 1000 °C range, and under special circumstances can be used for lower expansion materials when special precautions are used to ensure that the produced expansion of the specimen falls within the capabilities of the measuring system. In such cases, a sufficiently long specimen was found to meet the specification.  
1.4 Units—The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Or...

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ASTM
ASTM E975-22(Test Method)
Standard Test Method for X-Ray Determination of Retained Austenite in Steel with Near Random Crystallographic Orientation

SIGNIFICANCE AND USE
2.1 Significance—Retained austenite with a near random crystallographic orientation is found in the microstructure of heat-treated low-alloy, high-strength steels that have medium (0.40 weight %) or higher carbon contents. Although the presence of retained austenite may not be evident in the microstructure, and may not affect the bulk mechanical properties such as hardness of the steel, the transformation of retained austenite to martensite during service can affect the performance of the steel.  
2.2 Use—The measurement of retained austenite can be included in low-alloy steel development programs to determine its effect on mechanical properties. Retained austenite can be measured on a companion specimen or test section that is included in a heat-treated lot of steel as part of a quality control practice. The measurement of retained austenite in steels from service can be included in studies of material performance.
SCOPE
1.1 This test method covers the determination of retained austenite phase in steel using integrated intensities (area under peak above background) of X-ray diffraction peaks using chromium  Kα  or molybdenum Kα  X-radiation.  
1.2 The method applies to carbon and alloy steels with near random crystallographic orientations of both ferrite and austenite phases.  
1.3 This test method is valid for retained austenite contents from 1 % by volume and above.  
1.4 If possible, X-ray diffraction peak interference from other crystalline phases such as carbides should be eliminated from the ferrite and austenite peak intensities.  
1.5 Substantial alloy contents in steel cause some change in peak intensities which have not been considered in this method. Application of this method to steels with total alloy contents exceeding 15 weight % should be done with care. If necessary, the users can calculate the theoretical correction factors to account for changes in volume of the unit cells for austenite and ferrite resulting from variations in chemical composition.  
1.6 Units—The values stated in inch-pound units are to be regarded as standard. The values given in parentheses are mathematical conversions to SI units that are provided for information only and are not considered standard.  
1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.8 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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