ASTM F1094-87(2020)
(Test Method)Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method (Withdrawn 2023)
Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method (Withdrawn 2023)
SIGNIFICANCE AND USE
5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.
5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.
5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.
5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
1.2 Three methods are described as follows:
Sections
Test Method A—Sample Tap—Direct Filtration
6 to 8
Test Method B—Presterilized Plastic Bag Technique
9 to 12
Test Method B2 —Dip Strip Technique2/Presterilized Plastic Bag
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
Formerly under the jurisdiction of F01 on Electronics, these test methods were withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.
General Information
Relations
Buy Standard
Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1094 − 87 (Reapproved 2020)
Standard Test Methods for
Microbiological Monitoring of Water Used for Processing
Electron and Microelectronic Devices by Direct Pressure
Tap Sampling Valve and by the Presterilized Plastic Bag
Method
This standard is issued under the fixed designation F1094; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2.1 ASTM Standards:
1.1 These test methods cover sampling and analysis of high
D1129Terminology Relating to Water
purity water from water purification systems and water trans-
D1193Specification for Reagent Water
missionsystemsbythedirectsamplingtapandfiltrationofthe
F60Test Method for Detection and Enumeration of Micro-
sample collected in the bag.These test methods cover both the
biological Contaminants in Water Used for Processing
sampling of water lines and the subsequent microbiological
Electron and Microelectronic Devices (Withdrawn 1991)
analysis of the sample by the culture technique. The microor-
F488Test Method for On-Site Screening of Heterotrophic
ganisms recovered from the water samples and counted on the
Bacteria in Water (Withdrawn 2005)
filters include both aerobes and facultative anaerobes.
3. Terminology
1.2 Three methods are described as follows:
3.1 Definitions:
Sections
3.1.1 total bacteria count—number of viable heterotrophic
Test Method A—Sample Tap—Direct Filtration 6 to 8
Test Method B—Presterilized Plastic Bag Technique 9 to 12 bacteria capable of growing under test conditions specified.
Test Method B2 —Dip Strip Technique /Presterilized Plastic
3.1.1.1 Discussion—Total bacteria count is the general term
Bag
for heterotrophic plate count, now commonly used. Hetero-
1.3 This standard does not purport to address all of the
trophic bacteria are those microorganisms that cannot use CO
safety concerns, if any, associated with its use. It is the
for food. They require more complex organic compounds for
responsibility of the user of this standard to establish appro- use as growth nutrients. The majority of bacteria fall into this
priate safety, health, and environmental practices and deter- major grouping.
mine the applicability of regulatory limitations prior to use.
3.1.2 For definition of other terms used in this test method,
1.4 This international standard was developed in accor- refer to Terminology D1129.
3.2 Definitions of Terms Specific to This Standard:
dance with internationally recognized principles on standard-
3.2.1 presterilized plastic bag—a commercial presterilized
ization established in the Decision on Principles for the
plastic bag of 200-mL capacity (or as appropriate to larger
Development of International Standards, Guides and Recom-
sample sizes) to hold sample water. The bag should have
mendations issued by the World Trade Organization Technical
integral fold over tabs to allow for resealing.
Barriers to Trade (TBT) Committee.
3.2.2 bacteriological monitor—a commercial presterilized
plastic filter holder containing a 0.45-µm membrane filter. (No
other filter pore size should be used.)
These test methods are under the jurisdiction of ASTM Committee F01 on
Electronics and are the direct responsibility of Subcommittee F01.10 on Contami-
nation Control. For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Current edition approved April 15, 2020. Published May 2020. Originally contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
approvedin1987.Lastpreviouseditionapprovedin2012asF1094–87(2012).DOI: Standards volume information, refer to the standard’s Document Summary page on
10.1520/F1094-87R20. the ASTM website.
2 4
The dip strip (Total Count Tester or SPC Sampler) method is permissible for The last approved version of this historical standard is referenced on
waters containing >10 microorganisms per millilitre. www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1094 − 87 (2020)
NOTE1—Ifalargerporesizefilterisused,organismsmaypassthrough
4.2.1 Sample analysis is conducted by either Test Methods
the filter; a smaller pore size filter does not wick up sufficient growth
F60 or Test Method F488 for bacterial content of the water.
media, hence the level of recovery will be less than that of the 0.45-µm
filter.
5. Significance and Use
3.2.3 total count tester—a paddle shaped plastic filter as-
5.1 These test methods provide a field technique for the
sembly containing a 0.45-µm membrane filter and dehydrated
bacteriological analysis of electronic process waters. The
nutrient pad.
samplingofthesewatersandsubsequentbacteriologicalanaly-
sis may be critical to electronic product yields. Bacteria can be
4. Summary of Test Method
the prime source of harmful contamination which can signifi-
4.1 Test MethodA—Sample Tap—Direct Filtration—Asam-
cantly reduce the yield of satisfactory microelectronic device
pling valve as or similar to that shown in Fig. 1 is installed in
production.
a pressurized line. The valve illustrated has a self closure and
5.2 The test methods described here may be used both to
a male luer outlet fitting. This valve design minimized the
monitor the bacteriological quality of water used in microelec-
chance of extraneous contamination. Any valve used for
tronic product processing, and to locate the source of bacterial
sampling should be constructed in a manner to reduce or
contamination in a water purification system.
prevent the retention of bacteria within its internal surfaces,
and should be easily sanitized. The bacterial monitor is 5.3 Thesetestmethodsaresimplefieldmethods,combining
connected to either the luer outlet of the illustrated sampling sampling and bacteriological analysis techniques that do not
valve,orinasuitablemannertoanequivalentvalve.Thewater require bacteriological laboratory facilities.
sample is passed directly through the monitor, and the effluent
5.4 The test methods described employ culture techniques
volume is measured after this filtration. Test Methods F60 are
forbacteriologicalanalysis.Theusershouldbeawarethatsuch
then employed for bacteriological examination of the sample.
techniques cannot provide a complete count of the total viable
4.2 Test Method B—Presterilized Plastic Bag—The sam- bacteria present, since clumps and clusters of bacteria will
pling valve is installed as inTest MethodA, then flushed clean
appear as one single colony when cultured, and since some
priortotakingthesamples.Thewatersampleisdirectlyflowed viable bacteria will not grow under the test conditions used.
into a presterilized, precalibrated plastic disposable bag.After
However, a meaningful comparative bacteria count will be
sampling, the plastic bag is sealed and stored briefly prior to achievedbythismethodiftheculturingofthesampleisalways
bacteriological analysis of the sample. The sample may be done at the same temperature, and for the same period of time.
storedatroomtemperatureifanalyzedwithin2h,otherwise,it The temperature of incubation should always be at 28 6 2°C,
should be stored from 4 to to 10°C and analyzed within 6 h. and the period of incubation should be 48 h (or 72 h if time
FIG. 1 Sampling Valve in Wall of Pressurized Line
F1094 − 87 (2020)
permits). The period of incubation and temperature should be 8.1.2 With water system operating, open valve fully, flush
the same for all comparative studies. for 60 s at fast flow rate, and close the valve.
8.1.3 Fill syringe with blunt nose No. 18 needle with 70 to
TEST METHOD A—DIRECT SAMPLE TAP
90% isopropyl alcohol, (or 3 to 6% semi-standard or reagent
grade, hydrogen peroxide), and insert the 2-in. needle com-
6. Apparatus
pletely into the sampling valve outlet port.
8.1.4 Inject 5 mL of the sanitizing agent chosen into the
6.1 Sampling Tap, see Fig. 1.
6 samplingportandallowtostandfor1min.Removetheneedle
6.2 Bacteriological Monitor with0.45-µmmembranefilter.
fromtheoutletport,andsquirtsomeoftheagentontheoutside
6.3 Sanitarians Kit, consisting of metal syringe, special
of the male luer connector.
two way valve, and stainless steel graduated cup.
8.1.5 Flush the valve again for 1 min and close the valve.
8.1.6 Remove inlet and outlet caps from a bacteriological
6.4 Forceps with blunt stainless, unserrated tips.
monitor. Place caps aside on a clean surface, and avoid
6.5 Incubator ,capableofholdingtemperaturewithin 61°C
contaminating the inner surfaces. Connect the monitor to the
in a range from 27 to 40°C.
male luer outlet of the sampling valve, as shown in Fig. 2.
6.6 Illuminator, 15 to 30-W incandescent or 8 to 10-W
Avoid finger contacts of inlet and outlets of monitor.
fluorescent are generally acceptable. If incandescent light is
8.1.7 Open sampling valve, by turning counter-clockwise
concentrated through or by a magnifying lens, a lower wattage
the knurled outlet body, and allow 100 mL(Note 2) of sample
may suffice.
to pass through the monitor into a volumetric container. Close
the valve.
6.7 Magnifier, 5 to 15×for counting colonies.An illumina-
tor hand magnifier or a stereoscopic (dissection-type) micro-
NOTE 2—To compensate for the natural bacterial growth variability in
scope are satisfactory.
different water samples, the si
...
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1094 − 87 (Reapproved 2020)
Standard Test Methods for
Microbiological Monitoring of Water Used for Processing
Electron and Microelectronic Devices by Direct Pressure
Tap Sampling Valve and by the Presterilized Plastic Bag
Method
This standard is issued under the fixed designation F1094; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2.1 ASTM Standards:
1.1 These test methods cover sampling and analysis of high
D1129 Terminology Relating to Water
purity water from water purification systems and water trans-
D1193 Specification for Reagent Water
mission systems by the direct sampling tap and filtration of the
F60 Test Method for Detection and Enumeration of Micro-
sample collected in the bag. These test methods cover both the
biological Contaminants in Water Used for Processing
sampling of water lines and the subsequent microbiological
Electron and Microelectronic Devices (Withdrawn 1991)
analysis of the sample by the culture technique. The microor-
F488 Test Method for On-Site Screening of Heterotrophic
ganisms recovered from the water samples and counted on the 4
Bacteria in Water (Withdrawn 2005)
filters include both aerobes and facultative anaerobes.
3. Terminology
1.2 Three methods are described as follows:
3.1 Definitions:
Sections
3.1.1 total bacteria count—number of viable heterotrophic
Test Method A—Sample Tap—Direct Filtration 6 to 8
bacteria capable of growing under test conditions specified.
Test Method B—Presterilized Plastic Bag Technique 9 to 12
Test Method B2 —Dip Strip Technique /Presterilized Plastic
3.1.1.1 Discussion—Total bacteria count is the general term
Bag
for heterotrophic plate count, now commonly used. Hetero-
1.3 This standard does not purport to address all of the
trophic bacteria are those microorganisms that cannot use CO
safety concerns, if any, associated with its use. It is the
for food. They require more complex organic compounds for
responsibility of the user of this standard to establish appro-
use as growth nutrients. The majority of bacteria fall into this
priate safety, health, and environmental practices and deter- major grouping.
mine the applicability of regulatory limitations prior to use.
3.1.2 For definition of other terms used in this test method,
1.4 This international standard was developed in accor- refer to Terminology D1129.
dance with internationally recognized principles on standard- 3.2 Definitions of Terms Specific to This Standard:
3.2.1 presterilized plastic bag—a commercial presterilized
ization established in the Decision on Principles for the
plastic bag of 200-mL capacity (or as appropriate to larger
Development of International Standards, Guides and Recom-
sample sizes) to hold sample water. The bag should have
mendations issued by the World Trade Organization Technical
integral fold over tabs to allow for resealing.
Barriers to Trade (TBT) Committee.
3.2.2 bacteriological monitor—a commercial presterilized
plastic filter holder containing a 0.45-µm membrane filter. (No
other filter pore size should be used.)
These test methods are under the jurisdiction of ASTM Committee F01 on
Electronics and are the direct responsibility of Subcommittee F01.10 on Contami-
nation Control. For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Current edition approved April 15, 2020. Published May 2020. Originally contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
approved in 1987. Last previous edition approved in 2012 as F1094–87(2012). DOI: Standards volume information, refer to the standard’s Document Summary page on
10.1520/F1094-87R20. the ASTM website.
2 4
The dip strip (Total Count Tester or SPC Sampler) method is permissible for The last approved version of this historical standard is referenced on
waters containing >10 microorganisms per millilitre. www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1094 − 87 (2020)
NOTE 1—If a larger pore size filter is used, organisms may pass through
4.2.1 Sample analysis is conducted by either Test Methods
the filter; a smaller pore size filter does not wick up sufficient growth
F60 or Test Method F488 for bacterial content of the water.
media, hence the level of recovery will be less than that of the 0.45-µm
filter.
5. Significance and Use
3.2.3 total count tester—a paddle shaped plastic filter as-
5.1 These test methods provide a field technique for the
sembly containing a 0.45-µm membrane filter and dehydrated
bacteriological analysis of electronic process waters. The
nutrient pad.
sampling of these waters and subsequent bacteriological analy-
sis may be critical to electronic product yields. Bacteria can be
4. Summary of Test Method
the prime source of harmful contamination which can signifi-
4.1 Test Method A—Sample Tap—Direct Filtration—A sam-
cantly reduce the yield of satisfactory microelectronic device
pling valve as or similar to that shown in Fig. 1 is installed in
production.
a pressurized line. The valve illustrated has a self closure and
5.2 The test methods described here may be used both to
a male luer outlet fitting. This valve design minimized the
monitor the bacteriological quality of water used in microelec-
chance of extraneous contamination. Any valve used for
tronic product processing, and to locate the source of bacterial
sampling should be constructed in a manner to reduce or
contamination in a water purification system.
prevent the retention of bacteria within its internal surfaces,
and should be easily sanitized. The bacterial monitor is 5.3 These test methods are simple field methods, combining
connected to either the luer outlet of the illustrated sampling sampling and bacteriological analysis techniques that do not
valve, or in a suitable manner to an equivalent valve. The water require bacteriological laboratory facilities.
sample is passed directly through the monitor, and the effluent
5.4 The test methods described employ culture techniques
volume is measured after this filtration. Test Methods F60 are
for bacteriological analysis. The user should be aware that such
then employed for bacteriological examination of the sample.
techniques cannot provide a complete count of the total viable
4.2 Test Method B—Presterilized Plastic Bag—The sam-
bacteria present, since clumps and clusters of bacteria will
pling valve is installed as in Test Method A, then flushed clean appear as one single colony when cultured, and since some
prior to taking the samples. The water sample is directly flowed
viable bacteria will not grow under the test conditions used.
into a presterilized, precalibrated plastic disposable bag. After However, a meaningful comparative bacteria count will be
sampling, the plastic bag is sealed and stored briefly prior to achieved by this method if the culturing of the sample is always
bacteriological analysis of the sample. The sample may be done at the same temperature, and for the same period of time.
stored at room temperature if analyzed within 2 h, otherwise, it The temperature of incubation should always be at 28 6 2°C,
should be stored from 4 to to 10°C and analyzed within 6 h. and the period of incubation should be 48 h (or 72 h if time
FIG. 1 Sampling Valve in Wall of Pressurized Line
F1094 − 87 (2020)
permits). The period of incubation and temperature should be 8.1.2 With water system operating, open valve fully, flush
the same for all comparative studies. for 60 s at fast flow rate, and close the valve.
8.1.3 Fill syringe with blunt nose No. 18 needle with 70 to
TEST METHOD A—DIRECT SAMPLE TAP
90 % isopropyl alcohol, (or 3 to 6 % semi-standard or reagent
grade, hydrogen peroxide), and insert the 2-in. needle com-
6. Apparatus
pletely into the sampling valve outlet port.
6.1 Sampling Tap, see Fig. 1. 8.1.4 Inject 5 mL of the sanitizing agent chosen into the
6 sampling port and allow to stand for 1 min. Remove the needle
6.2 Bacteriological Monitor with 0.45-µm membrane filter.
from the outlet port, and squirt some of the agent on the outside
6.3 Sanitarians Kit, consisting of metal syringe, special
of the male luer connector.
two way valve, and stainless steel graduated cup.
8.1.5 Flush the valve again for 1 min and close the valve.
8.1.6 Remove inlet and outlet caps from a bacteriological
6.4 Forceps with blunt stainless, unserrated tips.
monitor. Place caps aside on a clean surface, and avoid
6.5 Incubator , capable of holding temperature within 61°C
contaminating the inner surfaces. Connect the monitor to the
in a range from 27 to 40°C.
male luer outlet of the sampling valve, as shown in Fig. 2.
6.6 Illuminator, 15 to 30-W incandescent or 8 to 10-W
Avoid finger contacts of inlet and outlets of monitor.
fluorescent are generally acceptable. If incandescent light is
8.1.7 Open sampling valve, by turning counter-clockwise
concentrated through or by a magnifying lens, a lower wattage
the knurled outlet body, and allow 100 mL (Note 2) of sample
may suffice.
to pass through the monitor into a volumetric container. Close
the valve.
6.7 Magnifier, 5 to 15 × for counting colonies. An illumina-
tor hand magnifier or a stereoscopic (dissection-type) micro-
NOTE 2—To compensate for the natural bacterial growth variability in
scope are satisfactory.
different water samples, the size of sample tested should be chosen in
relation to the expected count level of organisms f
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.