ASTM E1392-96(2002)

Standard Practice for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces (Withdrawn 2003)

SCOPE
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This practice explains a procedure for the determination of the amount and angular distribution of optical scatter from an opaque surface. In particular it focuses on measurement of the bidirectional reflectance distribution function (BRDF). BRDF is a convenient and well accepted means of expressing optical scatter levels for many purposes (1,2). Additional data presentation formats described in Appendix X1 have advantages for certain applications. Surface parameters can be calculated from optical scatter data when assumptions are made about model relationships. Some of these extrapolated parameters are described in Appendix X2.
1.2 Optical scatter from an opaque surface results from surface topography, surface contamination, and subsurface effects. It is the user's responsibility to be certain that measured scatter levels are ascribed to the correct mechanism. Scatter from small amounts of contamination can easily dominate the scatter from a smooth surface. Likewise, subsurface effects may play a more important scatter role than typically realized when surfaces are superpolished.
1.3 This practice does not provide a method to extrapolate from data for one wavelength to data for any other wavelength. Data taken at particular incident and scatter directions are not extrapolated to other directions. In other words, no wavelength or angle scaling is to be inferred from this practice. Normally the user must make measurements at the wavelengths and angles of interest.
1.4 This practice applies only to BRDF measurements on opaque samples. It does not apply to scatter from translucent or transparent materials. There are subtle complications which affect measurement of translucent or transparent materials that are best addressed in separate standards (see Practice E167 and Guide E179).
1.5 The wavelengths for which this practice applies include the ultraviolet, visible, and infrared regions. Difficulty in obtaining appropriate sources, detectors, and low scatter optics complicate its practical application at wavelengths less than about 0.25 [mu]m. Diffraction effects that start to become important for wavelengths greater than 15 [mu]m complicate its practical application at longer wavelengths. Diffraction effects can be properly dealt with in scatter measurements (3), but they are not discussed in this practice.
1.6 Any experimental parameter is a possible variable. Parameters that remain constant during a measurement sequence are reported as header information for the tabular data set. Appendix X3 gives a recommended reporting format that is adaptable to varying any of the sample or system parameters.
1.7 This practice applies to flat or curved samples of arbitrary shape. However, only a flat, circular sample is addressed in the discussion and examples. It is the user's responsibility to define an appropriate sample coordinate system to specify the measurement location on the sample surface for samples that are not flat.
1.8 The apparatus and measurement procedure are generic, so that specific instruments are neither excluded nor implied in the use of this practice.
1.9  This standard does not purport to address the safety concerns if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Withdrawn
• Publication Date: 09-Dec-1996
• Withdrawal Date: 09-May-2003
• ICS: 17.180.01 - Optics and optical measurements in general
• Technical Committee: F01 - Electronics

Relations

• Replaces: ASTM E1392-96 - Standard Practice for Angle Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces
• Effective Date: 10-Dec-1996

Standards Content (Sample)

NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
Designation: E 1392 – 96 (Reapproved 2002)
Standard Practice for
Angle Resolved Optical Scatter Measurements on Specular
1
or Diffuse Surfaces
This standard is issued under the fixed designation E 1392; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.
1. Scope obtaining appropriate sources, detectors, and low scatter optics
complicate its practical application at wavelengths less than
1.1 This practice explains a procedure for the determination
about 0.25 μm. Diffraction effects that start to become impor-
of the amount and angular distribution of optical scatter from
tant for wavelengths greater than 15 μm complicate its practical
an opaque surface. In particular it focuses on measurement of
application at longer wavelengths. Diffraction effects can be
the bidirectional reflectance distribution function (BRDF).
properly dealt with in scatter measurements (3), but they are
BRDF is a convenient and well accepted means of expressing
2 not discussed in this practice.
optical scatter levels for many purposes (1,2). Additional data
1.6 Any experimental parameter is a possible variable.
presentation formats described in Appendix X1 have advan-
Parameters that remain constant during a measurement se-
tages for certain applications. Surface parameters can be
quence are reported as header information for the tabular data
calculated from optical scatter data when assumptions are
set. Appendix X3 gives a recommended reporting format that is
made about model relationships. Some of these extrapolated
adaptable to varying any of the sample or system parameters.
parameters are described in Appendix X2.
1.7 This practice applies to flat or curved samples of
1.2 Optical scatter from an opaque surface results from
arbitrary shape. However, only a flat, circular sample is
surface topography, surface contamination, and subsurface
addressed in the discussion and examples. It is the user’s
effects. It is the user’s responsibility to be certain that measured
responsibility to define an appropriate sample coordinate
scatter levels are ascribed to the correct mechanism. Scatter
system to specify the measurement location on the sample
from small amounts of contamination can easily dominate the
surface for samples that are not flat.
scatter from a smooth surface. Likewise, subsurface effects
1.8 The apparatus and measurement procedure are generic,
may play a more important scatter role than typically realized
so that specific instruments are neither excluded nor implied in
when surfaces are superpolished.
the use of this practice.
1.3 This practice does not provide a method to extrapolate
1.9 This standard does not purport to address the safety
data for one wavelength from data for any other wavelength.
concerns, if any, associated with its use. It is the responsibility
Data taken at particular incident and scatter directions are not
of the user of this standard to establish appropriate safety and
extrapolated to other directions. In other words, no wavelength
health practices and determine the applicability of regulatory
or angle scaling is to be inferred from this practice. Normally
limitations prior to use.
the user must make measurements at the wavelengths and
angles of interest.
2. Referenced Documents
1.4 This practice applies only to BRDF measurements on
2.1 ASTM Standards:
opaque samples. It does not apply to scatter from translucent or
E 167 Practice for Goniophotometry of Objects and Mate-
transparent materials. There are subtle complications which
3
rials
affect measurement of translucent or transparent materials that
E 179 Guide for Selection of Geometric Conditions for
are best addressed in separate standards (see Practice E 167
Measurement of Reflection and Transmission Properties of
and Guide E 179).
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Materials
1.5 The wavelengths for which this practice applies include
3
E 284 Terminology Relating to Appearance
the ultraviolet, visible, and infrared regions. Difficulty in
F 1048 Test Method for Measuring the Effective Surface
Roughness of Optical Components by Total Integrated
1
This practice is under the jurisdiction of ASTM Committee F01 on Electronics 4
Scattering
and is the direct responsibility of Subcommittee F01.06 on Silicon Materials and
Process Control.
Current edition approved Dec. 10, 1996. Published December 1997. Originally
published as E 1392 - 90. Last previous edition E 1392 – 90.
2 3
The boldface numbers in parentheses refer to a list of references at the end of Annual Book of ASTM Standards, Vol 06.01.
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the te
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