ASTM F1513-99(2011)

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications (Withdrawn 2020)

ABSTRACT
This specification sets purity grade levels, physical attributes, analytical methods, and packaging of three grades of pure unalloyed aluminum source materials for electronic thin film applications such as evaporation sources and sputtering targets. The impurity levels should be analyzed using the proposed method and should be within the specified range for each grade.
SCOPE
1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
WITHDRAWN RATIONALE
This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).
Formerly under the jurisdiction of Committee F01 on Electronics, this specification was withdrawn in January 2020 in accordance with section 10.6.3 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.

General Information

• Status: Withdrawn
• Publication Date: 31-May-2011
• Withdrawal Date: 08-Jan-2020
• ICS: 31.200 - Integrated circuits. Microelectronics
• Technical Committee: F01 - Electronics
• Drafting Committee: F01.17 - Sputter Metallization

Relations

• Replaces: ASTM F1513-99(2003) - Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications
• Effective Date: 01-Jun-2011

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:F1513 −99 (Reapproved 2011)
Standard Specification for
Pure Aluminum (Unalloyed) Source Material for Electronic
Thin Film Applications
This standard is issued under the fixed designation F1513; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 5. Ordering Information
1.1 This specification covers pure aluminum metal (unal-
5.1 Orders for pure aluminum source material shall include
loyed) for use in evaporation sources and sputtering targets.
the following:
This material is intended as a raw material for electronic
5.1.1 Grade (4.1),
applications. The material is used as-supplied in some cases
5.1.2 Configuration (8.1 and 8.2),
(for example, as e-beam evaporation sources). In other in-
5.1.3 Whether or not certification is required (12.1), and
stances it may be remelted, alloyed, cast and processed by the
5.1.4 Whether or not a sample representative of the finished
purchaser to make finished products (for example, sputtering
product is required to be provided by the supplier to the
targets).
purchaser.
1.2 This specification sets purity grade levels, physical
attributes, analytical methods, and packaging.
6. Impurities
1.3 The values stated in SI units are to be regarded as
6.1 The minimum suite of metallic impurity elements to be
standard. No other units of measurement are included in this
analyzed is defined in Table 2. Acceptable analysis methods
standard.
and detection limits are specified in Section 11. Elements not
detected will be counted and reported as present at the
2. Referenced Documents
detection limit. Additional elements may be analyzed and
2.1 ASTM Standards:
reported, as agreed upon between the supplier and the
D1971 Practices for Digestion of Water Samples for Deter-
purchaser, but these shall not be counted in defining the grade
minationofMetalsbyFlameAtomicAbsorption,Graphite
designation.
Furnace Atomic Absorption, Plasma Emission
Spectroscopy, or Plasma Mass Spectrometry 6.2 Nonmetalic elements to be analyzed and reported are C,
H, O, N, and S .
3. Terminology
6.3 Acceptable limits and analytical techniques for particu-
3.1 materiallot—materialmeltedandcastfromonecrucible
lar elements in critical applications shall be as agreed upon
charge.
between the supplier and the purchaser.
6.4 Fluorine and chlorine may be important impurities in
4. Classification
some applications.Acceptable limits and analytical techniques
4.1 Grades of aluminum are defined in Table 1. Impurity
shall be agreed upon between the supplier and the purchaser.
contents are reported in parts per million by weight (wt ppm).
4.2 Purity and total metallic impurity levels are based upon
7. Grain Size
elements listed in Table 2.
7.1 Grain size and measurement method for grain size shall
be agreed upon between the supplier and the purchaser.
This specification is under the jurisdiction of ASTM Committee F01 on
Electronics and is the direct responsibility of Subcommittee F01.17 on Sputter
8. Dimensions
Metallization.
Current edition approved June 1, 2011. Published June 2011. Originally
8.1 Each product shall conform to an appropriate engineer-
published in 1994. Last previous edition approved in 2003 as F1513–94 (2003).
ing drawing, as agreed upon between the supplier and the
DOI: 10.1520/F1513-99R11.
2 purchaser.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
8.2 Nominal dimensions, tolerances, and other attributes
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. shall be agreed upon between the supplier and the purchaser.
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F1513−99 (2011)
TABLE 1 Aluminum Grades
11.1.3 Nitrogen—Fusion and gas extraction/thermal con-
Maximum Metallic Impurity ductivity analysis; mdl 5 wt. ppm.
Grade Purity, %
Content (by weight), pp
...