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ASTM F25-04

(Test Method)

Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

ABSTRACT
This test method covers the apparatus required, sampling methods, standard procedures and calculations, and test reports for counting and sizing airborne microparticulate matter, the sampling areas for which are specifically those with contamination levels typical of cleanrooms and dust-controlled areas. The test method is based on the microscopical examination of particles impinged upon a membrane filter with the aid of a vacuum. Sampling may be done in a cleanroom, clean zone, or other controlle areas, or in a duct or pipe, wherein the number of sampling points is proportional to the floor area of the enclosure to be checked. The apparatus and facilities required are typical of a laboratory for the study of macroparticle contamination. The operator must have adequate basic training in microscopy and the techniques of particle sizing and counting.
SCOPE
1.1 This test method covers counting and sizing airborne particulate matter 5 m and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.
1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory requirements prior to use.

General Information

Status
Historical
Publication Date
31-Aug-2004
ICS
13.040.30 - Workplace atmospheres
Technical Committee
E21 - Space Simulation and Applications of Space Technology
Drafting Committee
E21.05 - Contamination
Current Stage
Ref Project

Relations

Replaces
ASTM F25-68(1999) - Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Clean Rooms and Other Dust-Controlled Areas Designed for Electronic and Similar Applications
Effective Date
01-Sep-2004
Replaced By
ASTM F25/F25M-09 - Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
Effective Date
01-Apr-2009
Referred By
ASTM E2217-12(2019) - Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas
Effective Date
01-Sep-2004
Referred By
ASTM E2352-19 - Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments—Cleanroom Operations
Effective Date
01-Sep-2004
Referred By
ASTM E2090-12(2020) - Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy
Effective Date
01-Sep-2004
Referred By
ASTM E2042/E2042M-09(2021) - Standard Practice for Cleaning and Maintaining Controlled Areas and Clean Rooms
Effective Date
01-Sep-2004
Referred By
ASTM E2312-11(2019) - Standard Practice for Tests of Cleanroom Materials
Effective Date
01-Sep-2004

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ASTM F25-04 - Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled AreasASTM F25-04 - Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
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ASTM F25-04 - Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F 25 – 04
Standard Test Method for
Sizing and Counting Airborne Particulate Contamination in
1
Cleanrooms and Other Dust-Controlled Areas
ThisstandardisissuedunderthefixeddesignationF 25;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginal
adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.Asuperscript
epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope Particulate Contamination of Air in Dust-Controlled
5
Spaces by Particle Count Method, August 1962
1.1 This test method covers counting and sizing airborne
particulate matter 5 µm and larger (macroparticles). The
3. Terminology
sampling areas are specifically those with contamination levels
3.1 Definitions:
typical of cleanrooms and dust-controlled areas.
3.1.1 airflow:
1.2 The values stated in SI units are to be regarded as the
3.1.1.1 unidirectional airflow—air flow which has a singu-
standard. The values given in parentheses are for information
lar direction of flow and may or may not contain uniform
only.
velocities of air flow along parallel lines.
1.3 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the
NOTE 1—Formerly known as laminar airflow.
responsibility of the user of this standard to establish appro-
3.1.1.2 non-unidirectional airflow—air distribution where
priate safety and health practices and determine the applica-
the supply air entering the room mixes with the internal air by
bility of regulatory requirements prior to use.
means of induction.
3.1.2 critical pressure—for an orifice, with a constant up-
2. Referenced Documents
stream pressure, the downstream pressure at which the flow
2
2.1 ASTM Standards:
will not increase when the downstream pressure decreases.
F50 Practice for Continuous Sizing and Counting of Air-
3.1.3 critical pressure ratio—the ratio of the critical pres-
borne Particles in Dust-ControlledAreas and Clean Rooms
sure of an orifice to the entrance pressure.
Using Instruments Capable of Detecting Single Sub-
3.1.4 customer—organization, or the agent thereof, respon-
Micrometre and Larger Particles
sible for specifying the requirements of a cleanroom or clean
2.2 ISO Standard:
zone.
ISO 14644-1 Cleanrooms and Associated Controlled
3.1.5 fiber—particle having an aspect (length-to-width) ra-
3
Environments—Part 1: Classification of Air Cleanliness
tio of 10 or more.
2.3 IEST Document:
3.1.6 macroparticle—particle with an equivalent diameter
IEST-G-CC1003 Measurement of Airborne Macroparticles
greater than 5 µm.
4
(1999)
3.1.7 M descriptor—measured or specified concentration of
2.4 SAE Document:
macroparticles per cubic metre of air, expressed in terms of the
SAE AbstractARP-743, Procedure for the Determination of
equivalent diameter that is characteristic of the measurement
method used.
1
This test method is under the jurisdiction of ASTM Committee E21 on Space 3.1.7.1 Discussion—The M descriptor may be regarded as
Simulation andApplications of Space Technology and is the direct responsibility of
an upper limit for the averages at sampling locations (or as an
Subcommittee E21.05 on Contamination.
upper confidence limit, depending upon the number of sam-
Current edition approved Sept. 1, 2004. Published September 2004. Originally
pling locations used to characterize the cleanroom or clean
approved in 1963. Last previous edition approved in 1999 as F 25 – 68 (1999).
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
zone). M descriptors cannot be used to define airborne particu-
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
late cleanliness classes, but they may be quoted independently
Standards volume information, refer to the standard’s Document Summary page on
or in conjunction with airborne particulate cleanliness classes.
the ASTM website.
3
Available fromAmerican National Standards Institute (ANSI), 25 W. 43rd St.,
4th Floor, New York, NY 10036.
4 5
Available from Institute of Environmental Sciences and Technology (IEST), Available from Society of Automotive Engineers (SAE), 400 Commonwealth
5005 Newport Dr., Suite 506, Rolling Meadows, IL 60008-3841. Dr., Warrendale, PA 15096-0001.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

---------------------- Page: 1 ----------------------
F25–04
apparatus and facilities required are typical of a laboratory for
the study of macroparticle contamination. The operator must
have adequate basic training in microscopy and the techniques
of particle sizing and counting.
5. Apparatus
6
5.1 Filter Holder, aerosol open type having an effective
2
filtering area of 960 6 25 mm .
7
5.2 Adapter.
8
5.3 Flow-Limiting Orifice, 10 L/
...

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Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Controlled Areas and Clean Rooms Using Instruments Capable of Detecting Single Sub-Micrometre and Larger Particles

SIGNIFICANCE AND USE
5.1 The primary purpose of this practice is to describe a procedure for collecting near real-time data on airborne particle concentration and size distribution in clean areas as indicated by single particle counting techniques. Implementation of some government and industry specifications requires acquisition of particle size and concentration data using an SPC.  
5.2 The processing requirements of many products manufactured in a clean room involves environmental cleanliness levels so low that a single particle counter with capability for detecting very small particles is required to characterize clean room air. Real-time information on concentration of airborne particles in size ranges from less than 0.1 μm to 5 μm and greater can be obtained only with an SPC. Definition of particles larger than approximately 0.05 μm may be carried out with direct measurement of light scattering from individual particles; other techniques may be required for smaller particles, such as preliminary growth by condensation before particle measurement.  
5.3 Particle size data are referenced to the particle system used to calibrate the SPC. Differences in detection, electronic and sample handling systems among the various SPCs may contribute to differences in particle characterization. Care must be exercised in attempting to compare data from particles that vary significantly in composition or shape from the calibration base material. Variations may also occur between instruments using similar particle sensing systems with different operating parameters. These effects should be recognized and minimized by using standard methods for SPC calibration and operation.  
5.4 In applying this practice, the fundamental assumption is made that the particles in the sample passing through the SPC are representative of the particles in the entire dust-controlled area being analyzed. Care is required that good sampling procedures are used and that no artifacts are produced at any point in the samp...
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1.1 This practice covers the determination of the particle concentration, by number, and the size distribution of airborne particles in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 μm. Particle concentrations not exceeding 3.5 × 106 particles/m 3 (100 000/ft3) are covered for all particles equal to and larger than the minimum size measured.  
1.2 This practice uses an airborne single particle counting device (SPC) whose operation is based on measuring the signal produced by an individual particle passing through the sensing zone. The signal must be directly or indirectly related to particle size.  
Note 1: The SPC type is not specified here. The SPC can be a conventional optical particle counter (OPC), an aerodynamic particle sizer, a condensation nucleus counter (CNC) operating in conjunction with a diffusion battery or differential mobility analyzer, or any other device capable of counting and sizing single particles in the size range of concern and of sampling in a cleanroom environment.  
1.3 Individuals performing tests in accordance with this practice shall be trained in use of the SPC and shall understand its operation.  
1.4 Since the concentration and the particle size distribution of airborne particles are subject to continuous variations, the choice of sampling probe configuration, locations, and sampling times will affect sampling results. Further, the differences in the physical measurement, electronic, and sample handling systems between the various SPCs and the differences in physical properties of the various particles being measured can contribute to variations in the test results. These differences should be recognized and minimized by using a standard method of primary calibration and by minimizing variability of sample acquisition procedures.  
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Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

ABSTRACT
This test method covers the apparatuses required, sampling methods, standard procedures and calculations, and test reports for counting and sizing airborne microparticulate matter, the sampling areas for which are specifically those with contamination levels typical of cleanrooms and dust-controlled areas. The test method is based on the microscopical examination of particles impinged upon a membrane filter with the aid of a vacuum. Sampling may be done in a cleanroom, clean zone, or other controlle areas, or in a duct or pipe, wherein the number of sampling points is proportional to the floor area of the enclosure to be checked. The apparatus and facilities required are typical of a laboratory for the study of macroparticle contamination. The operator must have adequate basic training in microscopy and the techniques of particle sizing and counting.
SCOPE
1.1 This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.  
1.2 Units—The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system are not necessarily exact equivalents; therefore, to ensure conformance with the standard, each system shall be used independently of the other, and values from the two systems shall not be combined.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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ASTM F91-06(2019)(Practice)
Standard Practice for Testing for Leaks in the Filters Associated With Laminar Flow Clean Rooms and Clean Work Stations by Use of a Condensation Nuclei Detector

ABSTRACT
This practice covers the testing of the integrity of high-efficiency particulate air (HEPA) filters installed in laminar flow clean rooms of the ceiling to floor or wall to wall type, and laminar flow clean work stations using condensation nuclei detector. The recommended practice may be used to detect faults or voids in the filter media itself or in the joints between the filter and the room or work station structure. The preparation for testing and the procedure for the proper testing are presented in details.
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4.1 Exposure to aerosols in the industrial metal removal environment has been associated with adverse respiratory effects.  
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1.3 This practice focuses on employee exposure via inhalation of metal removal fluids and associated airborne agents.  
1.4 Metal removal fluids used for wet machining operations (such as cutting, drilling, milling, or grinding) that remove metal to produce the finished part are a subset of metalworking fluids. This practice does not apply to other operations (such as stamping, rolling, forging, or casting) that use metalworking fluids other than metal removal fluids. These other types of metalworking fluid operations are not included in this document because of limited information on health effects, including epidemiology studies, and on control technologies. Nonetheless, some of the exposure control approaches and guidance contained in this document may be useful for managing respiratory hazards associated with other types of metalworking fluids.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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1.4 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
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1.1 This test method describes the sampling and continuous analysis of ozone (O3) in the atmosphere at concentrations ranging from 10 to 2000 μg/m3 of O3  in air (5 ppb(v) to 1 ppm(v)).  
1.1.1 The test method is limited to applications by its sensitivity to interferences as described in Section 6. The interference sensitivities may limit its use for ambient and workplace atmospheres.  
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5.1 Exposure to beryllium can cause a potentially fatal disease, and occupational exposure limits for beryllium in air and on surfaces have been established to reduce exposure risks to potentially affected workers (4-7). Sampling and analytical methods for beryllium are needed in order to meet the challenges relating to exposure assessment and risk reduction. Sampling and analysis methods, such as the procedure described in this test method, are desired in order to facilitate on-site and fixed-site laboratory measurement of trace beryllium. Beryllium analysis results can then be used as a basis for exposure assessment and protection of human health.
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1.3 Determination of beryllium in soil is not within the scope of this test method. See Test Method D7458 for determination of beryllium in soil samples.  
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1.5 The procedure is suitable for on-site use in the field for occupational and environmental hygiene monitoring purposes. The method is also applicable for use in fixed-site laboratories.  
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1.7 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.8 This test method contains notes that are explanatory and not part of mandatory requirements of the standard.  
1.9 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.10 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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ASTM D6494-22(Test Method)
Standard Test Method for Determination of Asphalt Fume Particulate Matter in Workplace Atmospheres as Benzene Soluble Fraction

SIGNIFICANCE AND USE
5.1 Asphalt is a material used in the construction of roads and as a roofing material and sealant.  
5.2 This test method provides a means of evaluating exposure to asphalt fume in the working environment at the presently recommended exposure guidelines (for example, Threshold Limit Values and Biological Exposure Indices, ACGIH).7  
5.3 This procedure has been adapted from NIOSH Method 5023 (withdrawn prior to 4th edition (1994) and replaced in 1998 with NIOSH Method 5042) and OSHA Method 58 to reduce the level of background contamination providing better reproducibility.
SCOPE
1.1 This test method covers the determination of asphalt fume particulate matter (as benzene soluble fraction) and total particulate matter weight in workplace atmospheres using a polytetrafluoroethylene (PTFE) filter methodology.  
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1.5 The applicable concentration range for the TWA sample is from 0.2 to 2.0 mg/m3.
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1.6 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
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SIGNIFICANCE AND USE
5.1 This test method provides a means of evaluating exposures to benzene-soluble particulate matter in a concentration range that can be related to occupational exposures.
SCOPE
1.1 This test method describes the sampling and gravimetric determination of benzene-soluble particulate matter that has become airborne as a result of certain industrial processes. This test method can be used to determine the total weight of benzene-soluble materials and to provide a sample that may be used for specific and detailed analyses of the soluble components.  
1.2 The limit of detection is 0.05 mg/m3 by sampling a 1 m3 volume of air.
Note 1: Other volatile organic solvents have been used for this determination and whereas a less toxic solvent for this analysis might be desirable, the substitution of a solvent other than benzene is unwise at this time. A tremendous volume of environmental sampling data based on benzene-soluble determinations has been accumulated over many years in several industries.2 Some of the determinations have been used in epidemiological studies. Furthermore, the use of benzene is specified in existing United States federal standards.3 As a result, it appears imprudent to use a different solvent until the qualitative and quantitative relationship of analyses derived from benzene and a substitute solvent is established. With proper care, benzene can be safely used in the laboratory.  
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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