ASTM F816-83(1998)e1
(Test Method)Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
SCOPE
1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
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e1
Designation: F 816 – 83 (Reapproved 1998)
AMERICAN SOCIETY FOR TESTING AND MATERIALS
100 Barr Harbor Dr., West Conshohocken, PA 19428
Reprinted from the Annual Book of ASTM Standards. Copyright ASTM
Standard Test Method for
Combined Fine and Gross Leaks for Large Hybrid
Microcircuit Packages
This standard is issued under the fixed designation F 816; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
e NOTE—Editorial changes made throughout in May l998.
1. Scope helium leak detector using an interface seal (See Fig. 2). After
the internal volume is evacuated, a cloud of helium gas is
1.1 This test method applies to hermetic package leak
brought into close proximity to the entire outer surface of the
testing to detect leaks of a broad spectrum in size with a
package. Helium passing into the inner volume of the package
minimum detection level equal to the sensitivity of the helium
through any leak orifice in an amount greater than the
mass spectrometer equipment used in the test.
minimum sensitivity of the leak detector will be detected
1.2 This standard does not purport to address all of the
within a few seconds. The successfully sealed product is then
safety concerns, if any, associated with its use. It is the
placed into a controlled atmosphere dry box for vacuum
responsibility of the user of this standard to establish appro-
purging and back filling the internal volume of the package
priate safety and health practices and determine the applica-
through the vent hole with an inert gas having some detectable
bility of regulatory limitations prior to use.
partial pressure level of helium gas. While under this latter
2. Referenced Documents
condition, the vent hole is sealed off by a suitable manner. The
specimen is then immediately retested by the above method to
2.1 ASTM Standards:
detect successful sealing of the vent hole.
E691 Practice for Conducting an Interlaboratory Study to
Determine the Precision of a Test Method
4. Significance and Use
F78 Test Method for Calibration of Helium Leak Detectors
4.1 This test method provides an evaluation of the quality of
by Use of Secondary Standards
an in-line sealing process on a real time basis for sealed
F98 Practices for Determining Hermeticity of Electron
4 packages. It eliminates the need to expose the specimen to long
Devices by a Bubble Test
exposures of high pressure to drive the helium gas into the
F134 Test Methods for Determining Hermeticity of Elec-
package to later be detected by the same method herein used.
tron Devices with a Helium Mass Spectrometer Leak
Previously, separate test methods were required to detect large
Detector
or small leaks. This method provides only one test to accom-
2.2 Federal Standard:
plish all test levels without potential for specimens with leaks
Federal Standard 209B Clean Room and Work Station Re-
6 to escape detection within the range of detection being em-
quirements, Controlled Environment
ployed (see Practices F 98).
3. Summary of Method 4.2 Both development and research, along with manufactur-
ing control, may be served by using this test method. Current
3.1 This test method for the hermeticity of packages used
gross leak test methods and fine leak test methods may be
for housing multichip and hybrid microcircuits is to be applied
2 2
combined into one using this method. No exposure to high
generally to those equal to or greater than 1 in. (645 mm )in
pressure processing hazards is involved and safety of operation
area or 0.60 cm in volume. A vent hole (See Fig. 1) is designed
in production environment is enhanced.
into the lid of the package. After sealing the lid on the package,
the vent hole in the lid is presented to a port in the inlet of the
5. Interferences
5.1 The use of the helium leak detector requires a specific
This test method is under the jurisdiction of ASTM Committee F-1 on
gas transit time for the helium to pass through a leak orifice in
Electronics and is the direct responsibility of Subcommittee F01.03 on Metallic
Materials. the specimen and travel into the mass spectrometer sensing
Current edition approved May 27, 1983. Published July 1983.
element for detection. The value of this time constant should be
Annual Book of ASTM Standards, Vol 14.02.
exceeded for all test conditions to be considered valid. For
Annual Book of ASTM Standards, Vol 10.04.
small leaks, the time constant will be maximum. Allowing the
Discontinued; see 1990 Annual Book of ASTM Standards, Vol 10.04.
Discontinued; see 1996 Annual Book of ASTM Standards, Vol 10.04. helium gas to bathe the specimen for a time in excess of this
Available from Standardization Documents Order Desk, Bldg. 4 Section D, 700
time constant will suffice. This time constant should normally
Robbins Ave., Philadelphia, PA 19111-5094, Attn: NPODS.
NOTICE:¬This¬standard¬has¬either¬been¬superceded¬and¬replaced¬by¬a¬new¬version¬or¬discontinued.¬
Contact¬ASTM¬International¬(www.astm.org)¬for¬the¬latest¬information.¬
F 816
FIG. 1 Lid Vent Hole Design Option
be no longer than 5 s. 7.4 Soft Solder and Soldering Iron.
5.2 Any contaminating films or seal defects in the interface
8. Sampling
between the apparatus port and the vent hole in the lid of the
8.1 No specific sampling plan is to be implied by the use of
package may indicate a false leak. Adequate handling, clean-
liness, and operator performance to ensure the integrity of this this test method. The user is encouraged to adopt this method
for 100 % testing of production product.
interface seal is necessary.
5.3 When a large leak is encountered that allows a large
9. Preparation of Apparatus
charge of helium gas to enter the mass spectrometer, it may be
necessary to allow the system to regain a normal (unsaturated) 9.1 Prepare apparatus in accordance with Test Methods
F 134.
condition before proceeding.
10. Calibration of Apparatus
6. Apparatus
10.1 Calibrate apparatus in accordance with Test Method
6.1 See Test Methods F 134 for helium leak detector test
F 78.
apparatus.
6.2 See Fed. Std. No. 209B.
11. Procedure
6.3 See Fig. 2 for a sketch of manifold for specimen
11.1 Place each specimen to be tested on the test port (Note
interface with leak detector and helium cup enclosure. The
1), one to each port for multiport manifold apparatus designs,
elastomer seal material may be made of butyl rubber, neoprene,
with the vent hole centered on the interface seal surface
or fluorocarbon rubber (Viton) depending on the desired
location.
compression force being used. The O-ring squeeze should be
about 0.2 mm to assure a tight seal on a dry surface.
NOTE 1—A background or tare reading may be taken for each package
6.4 The dry box in which the vent hole is sealed may either
style (plating) by rotating it 180° so the seal surface location is covered by
be provided with a soldering iron or a spot welding head
a portion of the package lid that does not have a vent hole. This establishes
a measurement threshold value for each package style and lid plating
depending upon which method of seal is selected. The dry box
material.
shall also be provided with an adequate flow of dry nitrogen or
some other inert gas to which can be added up to 10 % by
11.2 Vent the leak test apparatus to evacuation mode by
volume of helium gas. A tube connected to a vacuum source
opening Valve A (See Fig. 2).
shall be available inside the dry box for purging the
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