ASTM E493/E493M-11

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

SIGNIFICANCE AND USE
Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.
SCOPE
1.1 This practice covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 10−10 to 10−6 Pa m3/s (10−9 standard cm3/s to 10−5 standard cm3/s at 0°C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances.
1.2 Two test methods are described:
1.2.1 Test Method A—Test part preparation by bombing.
1.2.2 Test Method B—Test part preparation by prefilling.
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 30-Jun-2011
• ICS: 19.100 - Non-destructive testing
• Technical Committee: E07 - Nondestructive Testing
• Drafting Committee: E07.08 - Leak Testing Method

Relations

• Replaces: ASTM E493-06 - Standard Test Methods for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
• Effective Date: 01-Jul-2011
• Referred By: ASTM E2533-21 - Standard Guide for Nondestructive Examination of Polymer Matrix Composites Used in Aerospace Applications
• Effective Date: 01-Jul-2011
• Referred By: ASTM E2982-21 - Standard Guide for Nondestructive Examination of Thin-Walled Metallic Liners in Filament-Wound Pressure Vessels Used in Aerospace Applications
• Effective Date: 01-Jul-2011

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E493/E493M − 11
Standard Practice for
Leaks Using the Mass Spectrometer Leak Detector in the
1
Inside-Out Testing Mode
This standard is issued under the fixed designation E493/E493M; the number immediately following the designation indicates the year
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.
1. Scope* 2. Referenced Documents
2 3
1.1 This practice covers procedures for testing devices that 2.1 ASTM Standards:
are sealed prior to testing, such as semiconductors, hermeti- E1316Terminology for Nondestructive Examinations
cally enclosed relays, pyrotechnic devices, etc., for leakage 2.2 Other Documents:
through the walls of the enclosure. They may be used with SNT-TC-1ARecommended Practice for Personnel Qualifi-
4
various degrees of sensitivity (depending on the internal cation and Certification in Nondestructive Testing
volume, the strength of the enclosure, the time available for ANSI/ASNT CP-189ASNT Standard for Qualification and
4
preparation of test, and on the sorption characteristics of the Certification of Nondestructive Testing Personnel
enclosure material for helium). In general practice the sensi- MIL-STD-410Nondestructive Testing Personnel Qualifica-
−10 −6 3 −9 5
tivity limits are from 10 to 10 Pa m /s (10 standard tion and Certification
3 −5 3
cm /sto10 standardcm /sat0°C)forhelium,althoughthese NAS-410Certification and Qualification of Nondestructive
6
limits may be exceeded by several decades in either direction Test Personnel
in some circumstances.
3. Terminology
1.2 Two test methods are described:
3.1 Definitions—For definitions of terms used in this
1.2.1 Test Method A—Test part preparation by bombing.
practice, see Terminology E1316, Section E.
1.2.2 Test Method B—Test part preparation by prefilling.
1.3 Units—The values stated in either SI or std-cc/sec units 4. Summary of Practice
are to be regarded separately as standard. The values stated in
4.1 Thetestmethodscoveredinthispracticerequirethatthe
each system may not be exact equivalents: therefore, each
test part contain helium at some calculable pressure at the time
system shall be used independently of the other. Combining
oftest.Ifthedevicecannotbesealedwithaknownpressureof
values from the two systems may result in non-conformance
helium inside, it is necessary to “bomb” the part in a helium
with the standard.
pressurechamberinordertointroduceheliumintothetestpart
1.4 This standard does not purport to address all of the
if a leak exists.
safety concerns, if any, associated with its use. It is the
4.2 After the test part has been subjected to helium pressur-
responsibility of the user of this standard to establish appro-
izing means, it is placed in an enclosure which is then
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use.
3
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
1
This practice is under the jurisdiction of ASTM Committee E07 on Nonde- Standards volume information, refer to the standard’s Document Summary page on
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak the ASTM website.
4
Testing Method. AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
CurrenteditionapprovedJuly1,2011.PublishedJuly2011.Originallyapproved 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
5
in 1973. Last previous edition approved in 2006 as E493-06. DOI: 10.1520/E0493 Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
_E0493M-11. Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://
2
Theinside-outtestingmodeischaracterizedbyanexternalvacuumandinternal dodssp.daps.dla.mil.
6
pressure. This standard covers “evacuated,” “sealed with tracer,” and “air-sealed” Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1000
testing procedures shown in Terminology E1316. WilsonBlvd.,Suite1700,Arlington,VA22209-3928,http://www.aia-aerospace.org.
*A Summary of Changes section appears at the end of this standard
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
E493/E493M − 11
evacuatedandcoupledtoamassspectrometerleakdetector.In 8.3 Pressure Vessel, capable of safely withstanding the
the event of a leak, an output signal will be obtained from the desired helium “bombing” pressure. The pressure containers
leak detector. If the actual leak rate
...

This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E493–06
Standard Test Methods for Designation:E493/E493M–11
Standard Practice for
Leaks Using the Mass Spectrometer Leak Detector in the
1
Inside-Out Testing Mode
This standard is issued under the fixed designation E493/E493M; the number immediately following the designation indicates the year
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.
1. Scope
1.1These test methods*
2
1.1 This practice covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically
enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees
of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on
−15−10
thesorptioncharacteristicsoftheenclosurematerialforhelium).Ingeneralpracticethesensitivitylimitsarefrom4.431010
−11−6 3 −9 3 −5 3
to 4.431010 moles/sPa m /s (10 standard cm /s to 10 standard cm /s at 0°C) for helium, although these limits may be
exceeded by several decades in either direction in some circumstances.
1.2 Two test methods are described:
1.2.1 Test Method A—Test part preparation by bombing.
1.2.2 Test Method B—Test part preparation by prefilling.
1.3
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard.The values stated in each
system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the
two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
3
2.1 ASTM Standards:
E1316 Terminology for Nondestructive Examinations
2.2 Other Documents:
4
SNT-TC-1A Recommended Practice for Personnel Qualification and Certification in Nondestructive Testing
4
ANSI/ASNT CP-189 ASNT Standard for Qualification and Certification of Nondestructive Testing Personnel
5
MIL-STD-410 Nondestructive Testing Personnel Qualification and Certification
6
NAS-410 Certification and Qualification of Nondestructive Test Personnel
1
These test methods are under the jurisdiction of ASTM Committee
1
This practice is under the jurisdiction ofASTM Committee E07 on Nondestructive Testing and areis the direct responsibility of Subcommittee E07.08 on Leak Testing
Method.
Current edition approved Feb.July 1, 2006.2011. Published February 2006.July 2011. Originally approved in 1973. Last previous edition approved in 19972006 as
E493-97.E493-06. DOI: 10.1520/E0493-06.10.1520/E0493_E0493M-11.
2
Theinside-outtestingmodeischaracterizedbyanexternalvacuumandinternalpressure.Thisstandardcovers“evacuated,”“sealedwithtracer,”and“air-sealed”testing
procedures shown in Terminology E1316.
3
ForreferencedASTMstandards,visittheASTMwebsite,www.astm.org,[e-mail] Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
4
Available from American Society for Nondestructive Testing (ASNT), P.O. Box 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
5
Available from Standardization Documents Order Desk, DODSSP, Bldg. 4, Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://dodssp.daps.dla.mil.
6
Available from Aerospace Industries Association of America, Inc. (AIA), 1250 Eye St., NW, Washington, DC 20005.
6
Available from Aerospace Industries Association of America, Inc. (AIA), 1000 Wilson Blvd., Suite 1700, Arlington, VA 22209-3928, http://www.aia-aerospace.org.
*A Summary of Changes section appears at the end of this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

---------------------- Page: 1 ----------------------
E493/E493M–11
3. Terminology
3.1 Definitions—For definitions of terms used in this standard,practice, see Terminology E1316, Section E.
4. Summary of Test MethodsPractice
4.1These4.1 The test methods covered in this practice require that the test part contain
...