Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.
This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.
The following issues are not considered in this document:
—    requirements for the cleanliness and suitability of surfaces for specific processes;
—    procedures for the cleaning of surfaces;
—    material characteristics;
—    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;
—    selection and use of statistical methods for assessment and testing;
—    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

Reinräume und zugehörige Reinraumbereiche - Teil 9: Bewertung der partikulären Oberflächenreinheit (ISO 14664‑9:2022)

Dieses Dokument beschreibt ein Verfahren für die Bewertung der partikulären Reinheitsgrade auf festen Oberflächen für Anwendungen in Reinräumen und zugehörigen Reinraumbereichen. Empfehlungen zu Prüf- und Messverfahren sowie Angaben zu Oberflächenkenngrößen sind in Anhang A bis Anhang D enthalten.
Dieses Dokument ist anzuwenden für alle festen Oberflächen in Reinräumen und zugehörigen Reinraumbereichen, wie z. B. Wände, Decken, Fußböden, Arbeitsbereiche, Werkzeuge, Ausrüstungsgegenstände und Produkte. Das Verfahren für die Bewertung der partikulären Oberflächenreinheit (SCP, en: surface cleanliness by particle concentration) ist auf Partikel zwischen 0,05 µm und 500 µm begrenzt.
Die folgenden Punkte werden in diesem Dokument nicht behandelt:
   Anforderungen an die Reinheit und Eignung von Oberflächen für bestimmte Prozesse;
   Verfahrensweisen für die Reinigung von Oberflächen;
   Materialkenngrößen;
   Bezüge auf die wechselseitigen Bindungskräfte oder Entstehungsprozesse, die üblicherweise zeitabhängig und prozessabhängig sind;
   Auswahl und Anwendung statistischer Bewertungs- und Prüfverfahren;
   weitere Kenngrößen von Partikeln, wie z. B. elektrostatische Ladung, Ionenladungen und mikrobiologischer Zustand.

Salles propres et environnements maîtrisés apparentés - Partie 9: Évaluation de la propreté des surfaces en fonction de la concentration de particules (ISO 14644-9:2022)

Le présent document établit un mode opératoire pour l’évaluation des niveaux de propreté particulaire des surfaces solides, applicables aux salles propres et aux environnements maîtrisés apparentés. Les Annexes A à D fournissent des recommandations relatives aux essais et aux méthodes de mesurage, ainsi que des informations sur les caractéristiques des surfaces.
Le présent document s’applique à toutes les surfaces solides dans les salles propres et environnements maîtrisés apparentés telles que les murs, les plafonds, les sols, les environnements de travail, les outils, les équipements et les produits. Le mode opératoire d’évaluation de la propreté des surfaces par la concentration de particules (SCP) se limite à des tailles de particules comprises entre 0,05 µm et 500 µm.
Le présent document n’aborde pas les points suivants:
—    les exigences pour la propreté et l’adéquation des surfaces à des processus spécifiques;
—    les modes opératoires de nettoyage des surfaces;
—    les caractéristiques des matériaux;
—    les références aux forces de liaison ou aux processus de génération qui sont généralement fonction du temps et qui dépendent du procédé;
—    le choix et l’utilisation de méthodes statistiques pour l’évaluation et les essais;
—    d’autres caractéristiques des particules, telles que la charge électrostatique, les charges ioniques et l’état microbiologique.

Čiste sobe in podobna nadzorovana okolja - 9. del: Ocenjevanje čistosti površine na osnovi koncentracije delcev (ISO 14644-9:2022)

Ta dokument določa postopek za ocenjevanje stopenj čistosti delcev na trdnih površinah v čistih sobah in podobnih nadzorovanih okoljih. V dodatkih od A do D so navedena priporočila za preskušanje, merilne metode ter informacije o značilnostih površine. Ta dokument se uporablja za vse trdne površine v čistih sobah in podobnih nadzorovanih okoljih, kot so stene, stropi, tla, delovna okolja, orodja, oprema in izdelki. Postopek ocenjevanja čistosti površine s koncentracijo delcev (SCP) je omejena na delce velikosti od 0,05 μm do 500 μm. V tem dokumentu niso zajeti naslednji elementi: – zahteve glede čistosti in primernosti površin za specifične postopke; – postopki čiščenja površin; – značilnosti materialov; – sklicevanja na interaktivne sile spajanja ali postopke nastajanja, ki so običajno odvisni od časa in postopka; – izbira in uporaba statističnih metod za ocenjevanje in preskušanje; – druge značilnosti delcev, na primer elektrostatični naboj, naboji ionov in mikrobiološko stanje.

General Information

Status
Published
Publication Date
24-May-2022
Withdrawal Date
29-Nov-2022
Current Stage
6060 - Definitive text made available (DAV) - Publishing
Start Date
25-May-2022
Completion Date
25-May-2022

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Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN ISO 14644-9:2022
01-julij-2022
Nadomešča:
SIST EN ISO 14644-9:2012
Čiste sobe in podobna nadzorovana okolja - 9. del: Ocenjevanje čistosti površine
na osnovi koncentracije delcev (ISO 14644-9:2022)
Cleanrooms and associated controlled environments - Part 9: Assessment of surface
cleanliness for particle concentration (ISO 14644-9:2022)
Reinräume und zugehörige Reinraumbereiche - Teil 9: Klassifizierung der partikulären
Oberflächenreinheit (ISO 14644-9:2022)
Salles propres et environnements maîtrisés apparentés - Partie 9: Évaluation de la
propreté des surfaces en fonction de la concentration de particules (ISO 14644-9:2022)
Ta slovenski standard je istoveten z: EN ISO 14644-9:2022
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-9:2022 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-9:2022

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SIST EN ISO 14644-9:2022


EN ISO 14644-9
EUROPEAN STANDARD

NORME EUROPÉENNE

May 2022
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-9:2012
English Version

Cleanrooms and associated controlled environments - Part
9: Assessment of surface cleanliness for particle
concentration (ISO 14644-9:2022)
Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil 9:
- Partie 9: Évaluation de la propreté des surfaces en Klassifizierung der partikulären Oberflächenreinheit
fonction de la concentration de particules (ISO 14644- (ISO 14644-9:2022)
9:2022)
This European Standard was approved by CEN on 18 April 2022.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-9:2022 E
worldwide for CEN national Members.

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SIST EN ISO 14644-9:2022
EN ISO 14644-9:2022 (E)
Contents Page
European foreword . 3

2

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SIST EN ISO 14644-9:2022
EN ISO 14644-9:2022 (E)
European foreword
This document (EN ISO 14644-9:2022) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by November 2022, and conflicting national standards
shall be withdrawn at the latest by November 2022.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 14644-9:2012.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
...

SLOVENSKI STANDARD
oSIST prEN ISO 14644-9:2022
01-februar-2022
Čiste sobe in podobna nadzorovana okolja - 9. del: Ocenjevanje čistosti površine
na osnovi koncentracije delcev (ISO/FDIS 14644-9:2021)
Cleanrooms and associated controlled environments - Part 9: Assessment of surface
cleanliness for particle concentration (ISO/FDIS 14644-9:2021)
Reinräume und zugehörige Reinraumbereiche - Teil 9: Klassifizierung der partikulären
Oberflächenreinheit (ISO/FDIS 14644-9:2021)
Salles propres et environnements maîtrisés apparentés - Partie 9: Évaluation de la
propreté des surfaces en fonction de la concentration de particules (ISO/FDIS 14644-
9:2021)
Ta slovenski standard je istoveten z: prEN ISO 14644-9
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
oSIST prEN ISO 14644-9:2022 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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oSIST prEN ISO 14644-9:2022

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oSIST prEN ISO 14644-9:2022
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 14644-9
ISO/TC 209
Cleanrooms and associated controlled
Secretariat: ANSI
environments —
Voting begins on:
2021-12-14
Part 9:
Voting terminates on:
Assessment of surface cleanliness for
2022-03-08
particle concentration
ISO/CEN PARALLEL PROCESSING
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 14644-9:2021(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2021

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oSIST prEN ISO 14644-9:2022
ISO/FDIS 14644-9:2021(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
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Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
  © ISO 2021 – All rights reserved

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oSIST prEN ISO 14644-9:2022
ISO/FDIS 14644-9:2021(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Abbreviated terms . 2
5 The surface cleanliness level assessment system . 3
5.1 ISO-SCP grading level format . 3
5.2 Designation . 6
5.3 General information on surface cleanliness levels of particle concentration . 6
6 Demonstration of conformity .
...

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