EN 62047-7:2011

Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

IEC 62047-7:2011 describes terms, definition, symbols, configurations, and test methods that can be used to evaluate and determine the performance characteristics of BAW resonator, filter, and duplexer devices as radio frequency control and selection devices. This standard specifies the methods of tests and general requirements for BAW resonator, filter, and duplexer devices of assessed quality using either capability or qualification approval procedures.

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 7: BAW-MEMS-Filter und -Duplexer zur Hochfrequenz-Regelung und -Auswahl

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des fréquences radioélectriques

La CEI 62047-7:2011 définit les termes, les définitions, les symboles, les configurations, et les méthodes d'essai susceptibles d'être utilisés pour évaluer et déterminer les caractéristiques d'aptitude à la fonction des dispositifs de résonateurs, filtres et duplexeurs BAW en tant que dispositifs de commande et de choix des fréquences radioélectriques. La présente norme spécifie les méthodes d'essai et les exigences générales relatives aux dispositifs de résonateur, de filtre et de duplexeur BAW sous assurance de la qualité, au moyen des procédures d'agrément de savoir-faire ou d'homologation.

Polprevodniški elementi - Mikroelektromehanski elementi - 7. del: Filter & duplekser MEMS BAW za radiofrekvenčno krmiljenje in izbiranje

Ta del IEC 62047 opisuje izraze, definicijo, simbole, konfiguracije in preskusne metode, ki se lahko uporabljajo za vrednotenje in določevanje značilnosti delovanja resonatorja, filtra in duplekserja BAW kot naprav za radiofrekvenčno krmiljenje in izbiranje. Ta standard določa preskusne metode in splošne zahteve za resonatorje, filtre in duplekserje BAW ocenjene kakovosti z uporabo postopkov za odobritev zmogljivosti ali usposobljenosti.

General Information

• Status: Published
• Publication Date: 04-Aug-2011
• Withdrawal Date: 20-Jul-2014
• ICS: 31.080.99 - Other semiconductor devices
• Technical Committee: CLC/TC 47X - Semiconductor devices and trusted chips
• Drafting Committee: IEC/SC 47F - IEC_SC_47F
• Parallel Committee: IEC/SC 47F - IEC_SC_47F
• Current Stage: 6060 - Document made available - Publishing
• Start Date: 05-Aug-2011
• Completion Date: 05-Aug-2011
• Ref Project: SIST EN 62047-7:2011 - Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter & duplexer for radio frequency control and selection

Standards Content (Sample)

SLOVENSKI STANDARD
01-oktober-2011
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GXSOHNVHU0(06%$:]DUDGLRIUHNYHQþQRNUPLOMHQMHLQL]ELUDQMH
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter &
duplexer for radio frequency control and selection
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 7: Filtre &
duplexeur BAW MEMS pour la commande et le choix des fréquences radioélectriques
Ta slovenski standard je istoveten z: EN 62047-7:2011
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN 62047-7
NORME EUROPÉENNE
August 2011
EUROPÄISCHE NORM
ICS 31.080.99
English version
Semiconductor devices -
Micro-electromechanical devices -
Part 7: MEMS BAW filter and duplexer for radio frequency control and
selection
(IEC 62047-7:2011)
Dispositifs à semiconducteurs -  Halbleiterbauelemente -
Dispositifs microélectromécaniques - Bauelemente der Mikrosystemtechnik -
Partie 7: Filtre et duplexeur BAW MEMS Teil 7: BAW-MEMS-Filter und -Duplexer
pour la commande et le choix des zur Hochfrequenz-Regelung und -Auswahl
fréquences radioélectriques (IEC 62047-7:2011)
(CEI 62047-7:2011)
This European Standard was approved by CENELEC on 2011-07-21. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Management Centre: Avenue Marnix 17, B - 1000 Brussels

© 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 62047-7:2011 E
Foreword
The text of document 47F/79/FDIS, future edition 1 of IEC 62047-7, prepared by SC 47F, Micro-
electromechanical systems, of IEC TC 47, Semiconductor devices, was submitted to the IEC-CENELEC
parallel vote and was approved by CENELEC as EN 62047-7 on 2011-07-21.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN and CENELEC shall not be held responsible for identifying any or all such patent
rights.
The following dates were fixed:
– latest date by which the EN has to be implemented
at national level by publication of an identical
(dop) 2012-04-21
national standard or by endorsement
– latest date by which the national standards conflicting
(dow) 2014-07-21
with the EN have to be withdrawn
__________
Endorsement notice
The text of the International Standard IEC 62047-7:2011 was approved by CENELEC as a European
Standard without any modification.
In the official version, for Bibliography, the following notes have to be added for the standards indicated:
IEC 60368-1:2000 NOTE  Harmonized as EN 60368-1:2000 + A1:2004 (not modified).
+ A1:2004
IEC 60368-2-2 NOTE  Harmonized as EN 60368-2-2.
IEC 60862-1:2003 NOTE  Harmonized as EN 60862-1:2003 (not modified).
IEC 60862-2 NOTE  Harmonized as EN 60862-2.
__________
IEC 62047-7 ®
Edition 1.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des
fréquences radioélectriques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX U
ICS 31.080.99 ISBN 978-2-88912-537-1

– 2 – 62047-7  IEC:2011
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Related with BAW filter . 7
3.3 Related with BAW duplexer . 9
3.4 Characteristic parameters . 10
3.4.1 BAW resonator . 10
3.4.2 BAW filter and duplexer . 13
3.4.3 Temperature characteristics . 16
4 Essential ratings and characteristic parameters . 16
4.1 Resonator, filter and duplexer marking . 16
4.2 Additional information . 17
5 Test methods . 17
5.1 Test procedure . 17
5.2 RF characteristics . 19
5.2.1 Insertion attenuation, IA . 19
5.2.2 Return attenuation, RA . 20
5.2.3 Bandwidth . 21
5.2.4 Isolation . 21
5.2.5 Ripple . 22
5.2.6 Voltage standing wave ratio (VSWR) . 22
5.2.7 Impedances of input and output . 23
5.3 Reliability test method . 23
5.3.1 Test procedure . 23
Annex A (informative) Geometries of BAW resonators . 25
Annex B (informative) Operation of BAW resonators . 26
Bibliography . 28

Figure 1 – Basic structure of BAW resonator . 7
Figure 2 – Topologies for BAW filter design . 8
Figure 3 – Frequency responses of ladder and lattice type BAW filters . 8
Figure 4 – An example of BAW duplexer configuration . 9
Figure 5 – Equivalent circuit of BAW resonator (one-port resonator) . 10
Figure 6 – Measurement procedure of BAW filters and duplexers . 18
Figure 7 – Electrical measurement setup of BAW resonators, filters and duplexers . 19
Figure 8 – Insertion attenuation of BAW filter . 20
Figure 9 – Return attenuation of BAW filter . 21
Figure 10 – Isolation (Tx-Rx) of BAW duplexer . 22
Figure 11 – Ripple of BAW filter . 22
Figure 12 – Smith chart plot of input and output impedances of BAW filter . 23
Figure 13 – Block diagram of a test setup for evaluating the reliability of BAW
resonators and filters . 24

62047-7  IEC:2011 – 3 –
Figure A.1 – Geometry comparison of BAW resonators . 25
Figure B.1 – Modified BVD (Butterworth-Van Dyke) equivalent circuit model . 27

– 4 – 62047-7  IEC:2011
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 7: MEMS BAW filter and duplexer
for radio frequency control and selection

FOREWORD
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9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62047-7 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47F/79/FDIS 47F/87/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

SIST EN 6204
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