EN 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 1: Termes et définitions

L'IEC 62047-1:2016 définit des termes pour les dispositifs microélectromécaniques en incluant le procédé de production de ces dispositifs. Cette édition inclut les modifications techniques majeures suivantes par rapport à l'édition précédente: a) retrait de dix termes; b) révision de douze termes; c) ajout de seize nouveaux termes.

Polprevodniški elementi - Mikroelektromehanski elementi - 1. del: Izrazi in definicije (IEC 62047-1:2016)

Ta del standarda IEC 62047 opredeljuje izraze za mikroelektromehanske elemente, vključno s postopkom proizvodnje takšnih elementov.

General Information

• Status: Published
• Publication Date: 07-Apr-2016
• Withdrawal Date: 09-Feb-2019
• ICS: 31.080.99 - Other semiconductor devices
• Technical Committee: CLC/SR 47F - CLC_SR_47F
• Drafting Committee: IEC/SC 47F - IEC_SC_47F
• Current Stage: 6060 - Document made available - Publishing
• Start Date: 08-Apr-2016
• Completion Date: 08-Apr-2016
• Ref Project: SIST EN 62047-1:2016 - Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2016)

Relations

• Replaces: EN 62047-1:2006 - Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
• Effective Date: 07-Jun-2022

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN 62047-1:2016
01-julij-2016
1DGRPHãþD
SIST EN 62047-1:2007
Polprevodniški elementi - Mikroelektromehanski elementi - 1. del: Izrazi in
definicije (IEC 62047-1:2016)
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
(IEC 62047-1:2016)
Ta slovenski standard je istoveten z: EN 62047-1:2016
ICS:
01.040.31 Elektronika (Slovarji) Electronics (Vocabularies)
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 62047-1:2016 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN 62047-1:2016

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SIST EN 62047-1:2016


EUROPEAN STANDARD EN 62047-1

NORME EUROPÉENNE

EUROPÄISCHE NORM
April 2016
ICS 31.080.99 Supersedes EN 62047-1:2006
English Version
Semiconductor devices - Micro-electromechanical devices - Part
1: Terms and definitions
(IEC 62047-1:2016)
Dispositifs à semi-conducteurs - Dispositifs Halbleiterbauelemente - Bauelemente der
microélectromécaniques - Partie 1: Termes et définitions Mikrosystemtechnik - Teil 1: Begriffe
(IEC 62047-1:2016) (IEC 62047-1:2016)
This European Standard was approved by CENELEC on 2016-02-10. CENELEC members are bound to comply with the CEN/CENELEC
Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC
Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the
same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,
Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.



European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2016 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.
 Ref. No. EN 62047-1:2016 E

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SIST EN 62047-1:2016
EN 62047-1:2016
European foreword
The text of document 47F/232/FDIS, future edition 2 of IEC 62047-1, prepared by SC 47F
“Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices" was submitted to the
IEC-CENELEC parallel vote and approved by CENELEC as EN 62047-1:2016.

The following dates are fixed:
(dop) 2016-11-10
• latest date by which the document has to be
implemented at national level by
publication of an identical national
standard or by endorsement
• latest date by which the national (dow) 2019-02-10
standards conflicting with the
document have to be withdrawn

This document supersedes EN 62047-1:2006.

Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such
patent rights.

Endorsement notice
The text of the International Standard IEC 62047-1:2016 was approved by CENELEC as a European
Standard without any modification.
In the official version, for Bibliography, the following note has to be added for the standard indicated:
IEC 62047-1:2005 NOTE Harmonized as EN 62047-1:2006.

2

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SIST EN 62047-1:2016



IEC 62047-1

®


Edition 2.0 2016-01




INTERNATIONAL



STANDARD




NORME



INTERNATIONALE











Semiconductor devices – Micro-electromechanical devices –

Part 1: Terms and definitions




Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –

Partie 1: Termes et définitions
















INTERNATIONAL

ELECTROTECHNICAL

COMMISSION


COMMISSION

ELECTROTECHNIQUE


INTERNATIONALE




ICS 31.080.99 ISBN 978-2-8322-3099-2



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