EN 62047-21:2014
(Main)Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosystemtechnik
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 21: Méthode d'essai relative au coefficient de Poisson des matériaux MEMS en couche mince
L'IEC 62047-21:2014 spécifie la détermination du coefficient de Poisson à partir des résultats obtenus par l'application d'essais de charges uniaxiales et biaxiales aux matériaux pour systèmes microélectromécaniques (MEMS, Micro-Electrical-Mechanical Systems) à couche mince dont les longueurs et les largeurs sont inférieures à 10 mm et les épaisseurs sont inférieures à 10 µm.
Polprevodniški elementi - Mikroelektromehanski elementi - 21. del: Preskusne metode za Poissonovo razmerje tankoplastnih materialov MEMS (IEC 62047-21:2014)
Standard EN IEC 62047-21 določa ugotavljanje Poissonovega razmerja na podlagi preskusnih rezultatov, pridobljenih z uporabo enoosnih in dvoosnih obremenitev pri tankoplastnih materialih mikroelektromehanskih sistemov (MEMS) z dolžinami in širinami pod 10 mm ter debelinami pod 10 μm.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN 62047-21:2014
01-november-2014
Polprevodniški elementi - Mikroelektromehanski elementi - 21. del: Preskusne
metode za Poissonovo razmerje tankoplastnih materialov MEMS (IEC 62047-
21:2014)
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for
Poisson's ratio of thin film MEMS materials
/
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 21: Méthode
d'essai relative au coefficient de Poisson des matériaux MEMS en couche mince
Ta slovenski standard je istoveten z: EN 62047-21:2014
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 62047-21:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN 62047-21:2014
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SIST EN 62047-21:2014
EUROPEAN STANDARD EN 62047-21
NORME EUROPÉENNE
EUROPÄISCHE NORM
September 2014
ICS 31.080.99
English Version
Semiconductor devices - Micro-electromechanical devices -
Part 21: Test method for Poisson's ratio of thin film MEMS
materials
(IEC 62047-21:2014)
Dispositifs à semiconducteurs - Dispositifs Halbleiterbauelemente - Bauelemente der
microélectromécaniques - Mikrosystemtechnik -
Partie 21: Méthode d'essai relative au coefficient de Teil 21: Prüfverfahren zur Querkontraktionszahl von
Poisson des matériaux MEMS en couche mince Dünnschichtwerkstoffen der Mikrosystemtechnik
(CEI 62047-21:2014) (IEC 62047-21:2014)
This European Standard was approved by CENELEC on 2014-07-24. CENELEC members are bound to comply with the CEN/CENELEC
Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC
Management Centre or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the
same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,
Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2014 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.
Ref. No. EN 62047-21:2014 E
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SIST EN 62047-21:2014
EN 62047-21:2014 - 2 -
Foreword
The text of document 47F/185/FDIS, future edition 1 of IEC 62047-21, prepared by SC 47F
“Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices" was submitted to the
IEC-CENELEC parallel vote and approved by CENELEC as EN 62047-21:2014.
The following dates are fixed:
(dop) 2015-04-24
• latest date by which the document has to be
implemented at national level by
publication of an identical national
standard or by endorsement
• latest date by which the national (dow) 2017-07-24
standards conflicting with the
document have to be withdrawn
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such
patent rights.
Endorsement notice
The text of the International Standard IEC 62047-21:2014 was approved by CENELEC as a European
Standard without any modification.
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SIST EN 62047-21:2014
- 3 - EN 62047-21:2014
Annex ZA
(normative)
Normative references to international publications
with their corresponding European publications
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
NOTE 1 When an International Publication has been modified by common modifications, indicated by (mod), the relevant
EN/HD applies.
NOTE 2 Up-to-date information on the latest versions of the European Standards listed in this annex is ava
...
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