IEC 62047-33:2019
(Main)Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device
Semiconductor devices - Micro-electromechanical devices - Part 33: MEMS piezoresistive pressure-sensitive device
IEC 62047-33:2019 (E) defines terms, definitions, essential ratings and characteristics, as well as test methods applicable to MEMS piezoresistive pressure-sensitive device. This document applies to piezoresistive pressure-sensitive devices for automotive, medical treatment, electronic products.
General Information
Standards Content (Sample)
IEC 62047-33 ®
Edition 1.0 2019-04
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –
Part 33: MEMS piezoresistive pressure-sensitive device
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.
IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.
IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary
(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and
once a month by email. French extracted from the Terms and Definitions clause of
IEC publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or CISPR.
need further assistance, please contact the Customer Service
Centre: sales@iec.ch.
IEC 62047-33 ®
Edition 1.0 2019-04
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –
Part 33: MEMS piezoresistive pressure-sensitive device
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99; 31.140 ISBN 978-2-8322-6718-9
– 2 – IEC 62047-33:2019 © IEC 2019
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 7
4 Essential ratings and characteristics . 8
4.1 Ratings (Limiting values) . 8
4.2 Recommended operating conditions . 8
4.3 Characteristics . 8
5 Test methods . 9
5.1 Input resistance . 9
5.2 Output resistance . 9
5.3 Leakage current . 9
5.3.1 P-N junction isolation type sensitive device . 9
5.3.2 Insulating medium type sensitive device . 10
5.4 Breakdown voltage . 10
5.5 Isolation voltage . 10
5.6 Static performances . 10
5.6.1 Test method . 10
5.6.2 Output under normal pressure . 12
5.6.3 Zero output . 12
5.6.4 Output symmetry . 13
5.6.5 Full-span output . 13
5.6.6 Nonlinearity . 13
5.6.7 Pressure hysteresis . 13
5.6.8 Repeatability . 14
5.6.9 Accuracy . 15
5.6.10 Sensitivity . 15
5.6.11 Zero drift. 15
5.7 Stability. 16
5.7.1 Test method . 16
5.7.2 Zero long-term stability . 16
5.7.3 Sensitivity long-term stability . 16
5.8 Temperature influence . 16
5.8.1 Test method . 16
5.8.2 Thermal zero drift . 17
5.8.3 Thermal sensitivity drift . 17
5.8.4 Thermal zero output hysteresis . 17
5.8.5 Thermal sensitivity hysteresis . 17
5.8.6 Temperature hysteresis . 18
5.9 Static pressure influence . 18
5.9.1 Two way static pressure . 18
5.9.2 Unidirectional static pressure . 19
5.10 Overload . 19
5.11 Dynamic performance . 19
5.11.1 Test method . 19
5.11.2 Frequency response . 20
5.11.3 Ringing frequency . 20
5.11.4 Damping ratio . 20
5.11.5 Rise time . 21
5.11.6 Resonant frequency . 21
5.11.7 Overshoot . 21
5.12 Environment test . 21
5.12.1 Storage at high temperature . 21
5.12.2 Storage at low temperature . 21
5.12.3 Temperature cycling . 22
5.12.4 Vibration . 22
5.12.5 Mechanical shock . 22
5.12.6 Acceleration . 22
5.12.7 Moisture resistance . 22
5.12.8 Mucedine . 22
5.12.9 Salt atmosphere . 22
5.12.10 Electromagnetic compatibility . 23
5.12.11 Low pressure . 23
5.12.12 High temperature electric life . 23
5.12.13 Fatigue life . 23
Bibliography . 24
Figure 1 – Structure schematic diagram of the device . 7
Figure 2 – Test connection graph for P-N junction isolation type sensitive device . 10
Figure 3 – Test connection graph for insulating medium type sensitive device . 10
Figure 4 – Test system . 11
Figure 5 – The output wave . 20
Table 1 – Characteristics of the device . 8
– 4 – IEC 62047-33:2019 © IEC 2019
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –
Part 33: MEMS piezoresistive pressure-sensitive device
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servan
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.