Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 4-4: Piezoelectric materials - Single crystal wafers for surface acoustic wave (SAW) devices

IEC TS 61994-4-4:2018 is available as IEC TS 61994-4-4:2018 RLV which contains the International Standard and its Redline version, showing all changes of the technical content compared to the previous edition.
IEC 61994-4-4:2018 gives the terms and definition for single crystal wafers for surface acoustic wave (SAW) devices representing the state of the art. This edition includes the following significant technical changes with respect to the previous edition:
- the new terms and definitions given in IEC 62276:2016 have been taken into account;
- the general title has been changed according to the change in the title of TC 49 in 2009.
- the part title has been changed according to the title of IEC 62276:2016.

General Information

Status
Published
Publication Date
15-Nov-2018
Current Stage
PPUB - Publication issued
Completion Date
16-Nov-2018
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IEC TS 61994-4-4:2018 - Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection - Glossary - Part 4-4: Piezoelectric materials - Single crystal wafers for surface acoustic wave (SAW) devices
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IEC TS 61994-4-4
Edition 3.0 2018-11
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 4-4: Piezoelectric materials – Single crystal wafers for surface acoustic
wave (SAW) devices
IEC TS 61994-4-4:2018-11(en)
---------------------- Page: 1 ----------------------
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---------------------- Page: 2 ----------------------
IEC TS 61994-4-4
Edition 3.0 2018-11
TECHNICAL
SPECIFICATION
Piezoelectric, dielectric and electrostatic devices and associated materials for
frequency control, selection and detection – Glossary –
Part 4-4: Piezoelectric materials – Single crystal wafers for surface acoustic
wave (SAW) devices
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 01.040.31; 31.140 ISBN 978-2-8322-6178-1

Warning! Make sure that you obtained this publication from an authorized distributor.

® Registered trademark of the International Electrotechnical Commission
---------------------- Page: 3 ----------------------
– 2 – IEC TS 61994-4-4:2018 © IEC 2018
CONTENTS

FOREWORD ........................................................................................................................... 3

1 Scope .............................................................................................................................. 5

2 Normative references ...................................................................................................... 5

3 There are no normative references in this document.Terms and definitions ..................... 5

3.1 Single crystals for SAW wafer ................................................................................. 5

3.2 Terms and definitions related to LN and LT crystals ................................................ 6

3.3 Terms and definitions related to all crystals ............................................................ 7

3.4 Flatness .................................................................................................................. 7

3.5 Definitions of appearance defects ......................................................................... 10

3.6 Other terms and definitions ................................................................................... 11

Bibliography .......................................................................................................................... 14

Figure 1 – Example of site distribution for LTV measurement .................................................. 7

Figure 2 – LTV value of each site ............................................................................................ 8

Figure 3 – Schematic diagram of Sori ..................................................................................... 9

Figure 4 – Wafer sketch and measurement points for TV5 determination ................................ 9

Figure 5 – Schematic diagram of TTV ................................................................................... 10

Figure 6 – Schematic diagram of warp .................................................................................. 10

Table 1 – Description of wafer orientations ........................................................................... 12

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IEC TS 61994-4-4:2018 © IEC 2018 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL, SELECTION
AND DETECTION – GLOSSARY –
Part 4-4: Piezoelectric materials – Single crystal wafers
for surface acoustic wave (SAW) devices
FOREWORD

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• the required support cannot be obtained for the publication of an International Standard,

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Technical specifications are subject to review within three years of publication to decide whether

they can be transformed into International Standards.

IEC TS 61944-4-4, which is a technical specification, has been prepared by IEC technical

committee 49: Piezoelectric, dielectric and electrostatic devices and associated materials for

frequency control, selection and detection.
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– 4 – IEC TS 61994-4-4:2018 © IEC 2018

This third edition of IEC 61994-4-4 cancels and replaces the second edition published in 2010.

This edition constitutes a technical revision.

This edition includes the following significant technical changes with respect to the previous

edition:

a) the new terms and definitions given in IEC 62276:2016 have been taken into account;

b) the general title has been changed according to the change in the title of TC 49 in 2009.

c) the part title has been changed according to the title of IEC 62276:2016.
The text of this technical specification is based on the following documents:
Enquiry draft Report on voting
49/1283/DTS 49/1287/RVC

Full information on the voting for the approval of this technical specification can be found in the

report on voting indicated in the above table.

This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts in the IEC 61994 series, published under the general title Piezoelectric,

dielectric and electrostatic devices and associated materials for frequency control, selection and

detection – Glossary, can be found on the IEC website.

Future standards in this series will carry the new general title as cited above. Titles of existing

standards in this series will be updated at the time of the next edition.

The committee has decided that the contents of this document will remain unchanged until the

stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to

the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.
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IEC TS 61994-4-4:2018 © IEC 2018 – 5 –
PIEZOELECTRIC, DIELECTRIC AND ELECTROSTATIC DEVICES
AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL, SELECTION
AND DETECTION – GLOSSARY –
...

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