ISO 20341:2003
(Main)Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode d'estimation des paramètres de résolution en profondeur à l'aide de matériaux de référence multicouches minces
General Information
Standards Content (Sample)
INTERNATIONAL ISO
STANDARD 20341
First edition
2003-07-15
Surface chemical analysis — Secondary-
ion mass spectrometry — Method for
estimating depth resolution parameters
with multiple delta-layer reference
materials
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Méthode d'estimation des paramètres de résolution en
profondeur à l'aide de matériaux de référence multicouches minces
Reference number
©
ISO 2003
PDF disclaimer
This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall
not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In
downloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The ISO Central Secretariat
accepts no liability in this area.
Adobe is a trademark of Adobe Systems Incorporated.
Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation
parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the
unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below.
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,
electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or
ISO's member body in the country of the requester.
ISO copyright office
Case postale 56 CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
©
ii ISO 2003 – All rights reserved
Contents Page
1 Scope . 1
2 Normative references . 1
3 Symbols . 1
4 Requirements for multiple delta-layer reference materials . 1
5 Procedures . 2
6 Test report . 3
Annex A (normative) Simpler options of estimating SIMS depth resolution parameters . 4
Bibliography . 5
©
ISO 2003 – All rights reserved iii
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International
Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 20341 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee
SC 6, Secondary ion mass spectrometry.
©
iv ISO 2003 – All rights reserved
Introduction
Depth resolution is one of the important parameters in SIMS depth profiling. However, sputter depth profiles in
SIMS analysis are affected by many factors which may include ion-beam-induced mixing and segregation,
charge-driven diffusion, matrix effects, crater shape, surface microtopography, etc. To obtain the best depth
resolution, the deterioration of the depth resolution due to these factors should be understood and minimized.
The best depth resolution generally requires special conditions of analysis which may include an ultra-low
primary-ion beam energy, glancing incidence angle, specimen rotation, specimen cooling to cryogenic
temperature, etc., all of which cannot be easily adopted for daily SIMS analysis. In addition to this, the
optimization of the analysis parameters may be quite different for each specimen. Moreover, different aspects of
the depth resolution are also affected by instrumental factors such as the crater shape, ion beam homogeneity,
removal of the crater edge effect, mass interference, memory effect, residual gas effect, etc.
Therefore, it is not straightforward to estimate the depth resolution under given daily SIMS analysis conditions.
In this International Standard, the three essential component parameters of the depth resolution, the leading-
edge decay length, the trailing-edge decay length and the Gaussian broadening, are described and procedures
are provided for the measurement of each parameter. The depth resolution parameters under daily SIMS
analysis conditions can be estimated using multiple delta-layer reference materials.
©
ISO 2003 – All rights reserved v
.
vi
INTERNATIONAL STANDARD ISO 20341:2003(E)
Surface chemical analysis — Secondary-ion mass
spectrometry — Method for estimating depth resolution
parameters with multiple delta-layer reference materials
1Scope
1.1 This International Standard specifies procedures for estimating three depth resolution parameters, viz the
leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling
using multiple delta-layer reference materials.
1.2 This International Standard is not applicable to delta-layers where the chemical and physical state of the
near-surface region, modified by the incident primary ions, is not in the steady state.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO 18115:2001
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.