ISO 20411:2018

Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry

ISO 20411:2018 specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector-type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also includes a correction method for saturated intensity caused by the dead time of the detector. The correction can increase the intensity range for 95 % linearity so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid. ISO 20411:2018 does not apply to time of flight mass spectrometers. ISO 20411:2018 is only applicable to elements with minor isotopes. It is not applicable if the element is monoisotopic or contains isotopes with equal abundances.

Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode de correction de l'intensité de saturation en SIMS dynamique à comptage d'ions individuel

General Information

• Status: Published
• Publication Date: 08-Mar-2018
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 6 - Secondary ion mass spectrometry
• Drafting Committee: ISO/TC 201/SC 6/WG 3 - Depth resolution for SIMS
• Current Stage: 9092 - International Standard to be revised
• Completion Date: 07-Nov-2023

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 20411
First edition
2018-03
Surface chemical analysis —
Secondary ion mass spectrometry
— Correction method for saturated
intensity in single ion counting
dynamic secondary ion mass
spectrometry
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Méthode de correction de l'intensité de saturation en
SIMS dynamique à comptage d'ions individuel
Reference number
ISO 20411:2018(E)
©
ISO 2018

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ISO 20411:2018(E)

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ii © ISO 2018 – All rights reserved

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ISO 20411:2018(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 2
5 Outline of method . 3
6 Procedure for evaluating intensity linearity . 5
6.1 Obtaining reference sample . 5
6.2 Setting the sample . 5
6.3 Operating the instrument . 5
6.3.1 Setting the ion beam and the mass analyser. 5
6.3.2 Setting the charge compensation . 5
6.3.3 Setting the ion detector . 5
6.4 Acquiring the data . 5
6.5 Assessing the linearity without and with intensity correction . 6
6.5.1 Interpolating the minor isotope intensity . 6
6.5.2 Correcting the ratio of the isotope abundance to the instrument transmittance . 7
6.5.3 Assessing the linearity of intensity . 8
6.5.4 Correcting the saturated intensity . .
...