Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method

SIGNIFICANCE AND USE
These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.
The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.
These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.
The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
1.2 Three methods are described as follows: SectionsTest Method A--Sample Tap-Direct Filtration6 to 8Test Method B--Presterilized Plastic Bag Technique9 to 12Test Method B2--Dip Strip Technique2/Presterilized Plastic Bag
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use .

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Historical
Publication Date
09-Jun-1999
Technical Committee
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ASTM F1094-87(2005) - Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1094 − 87 (Reapproved 2005)
StandardTest Methods for
Microbiological Monitoring of Water Used for Processing
Electron and Microelectronic Devices by Direct Pressure
Tap Sampling Valve and by the Presterilized Plastic Bag
Method
This standard is issued under the fixed designation F1094; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope F488Test Method for On-Site Screening of Heterotrophic
Bacteria in Water (Withdrawn 2005)
1.1 These test methods cover sampling and analysis of high
purity water from water purification systems and water trans-
3. Terminology
missionsystemsbythedirectsamplingtapandfiltrationofthe
3.1 Definitions:
sample collected in the bag.These test methods cover both the
3.1.1 total bacteria count—number of viable heterotrophic
sampling of water lines and the subsequent microbiological
bacteria capable of growing under test conditions specified.
analysis of the sample by the culture technique. The microor-
3.1.1.1 Discussion—Total bacteria count is the general term
ganisms recovered from the water samples and counted on the
for heterotrophic plate count, now commonly used. Hetero-
filters include both aerobes and facultative anaerobes.
trophic bacteria are those microorganisms that cannot use CO
1.2 Three methods are described as follows:
for food. They require more complex organic compounds for
Sections
use as growth nutrients. The majority of bacteria fall into this
Test Method A—Sample Tap—Direct Filtration 6 to 8
major grouping.
Test Method B—Presterilized Plastic Bag Technique 9 to 12
Test Method B2 —Dip Strip Technique /Presterilized Plastic
3.1.2 For definition of other terms used in this test method,
Bag
refer to Terminology D1129.
1.3 This standard does not purport to address all of the
3.2 Definitions of Terms Specific to This Standard:
safety concerns, if any, associated with its use. It is the
3.2.1 presterilized plastic bag—a commercial presterilized
responsibility of the user of this standard to establish appro-
plastic bag of 200-mL capacity (or as appropriate to larger
priate safety and health practices and determine the applica-
sample sizes) to hold sample water. The bag should have
bility of regulatory limitations prior to use .
integral fold over tabs to allow for resealing.
3.2.2 bacteriological monitor—a commercial presterilized
2. Referenced Documents
plastic filter holder containing a 0.45-µm membrane filter. (No
2.1 ASTM Standards:
other filter pore size should be used.)
D1129Terminology Relating to Water
NOTE1—Ifalargerporesizefilterisused,organismsmaypassthrough
D1193Specification for Reagent Water
the filter; a smaller pore size filter does not wick up sufficient growth
F60Test Methods for Detection and Estimation of Micro-
media, hence the level of recovery will be less than that of the 0.45-µm
biological Contaminants in Water Used for Processing
filter.
Electron and Microelectronic Devices (Withdrawn 1991)
3.2.3 total count tester—a paddle shaped plastic filter as-
sembly containing a 0.45-µm membrane filter and dehydrated
nutrient pad.
These test methods are under the jurisdiction of ASTM Committee F01 on
Electronics and are the direct responsibility of Subcommittee F01.10 on Contami-
4. Summary of Test Method
nation Control.
Current edition approved Jan. 1, 2005. Published January 2005. Originally 4.1 Test MethodA—Sample Tap—Direct Filtration—Asam-
approvedin1987.Lastpreviouseditionapprovedin1999asF1094–87(1999).DOI:
pling valve as or similar to that shown in Fig. 1 is installed in
10.1520/F1094-87R05.
a pressurized line. The valve illustrated has a self closure and
The dip strip (Total Count Tester or SPC Sampler) method is permissible for
a male luer outlet fitting. This valve design minimized the
waters containing >10 microorganisms per millilitre.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on The last approved version of this historical standard is referenced on
the ASTM website. www.astm.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1094 − 87 (Reapproved 2005)
FIG. 1 Sampling Valve in Wall of Pressurized Line
chance of extraneous contamination. Any valve used for 5.4 The test methods described employ culture techniques
sampling should be constructed in a manner to reduce or forbacteriologicalanalysis.Theusershouldbeawarethatsuch
prevent the retention of bacteria within its internal surfaces, techniques cannot provide a complete count of the total viable
and should be easily sanitized. The bacterial monitor is bacteria present, since clumps and clusters of bacteria will
connected to either the luer outlet of the illustrated sampling appear as one single colony when cultured, and since some
valve,orinasuitablemannertoanequivalentvalve.Thewater viable bacteria will not grow under the test conditions used.
sample is passed directly through the monitor, and the effluent However, a meaningful comparative bacteria count will be
volume is measured after this filtration. Test Methods F60 are achievedbythismethodiftheculturingofthesampleisalways
then employed for bacteriological examination of the sample. done at the same temperature, and for the same period of time.
The temperature of incubation should always be at 28 6 2°C,
4.2 Test Method B—Presterilized Plastic Bag—The sam-
and the period of incubation should be 48 h (or 72 h if time
pling valve is installed as inTest MethodA, then flushed clean
permits). The period of incubation and temperature should be
priortotakingthesamples.Thewatersampleisdirectlyflowed
the same for all comparative studies.
into a presterilized, precalibrated plastic disposable bag.After
sampling, the plastic bag is sealed and stored briefly prior to
TEST METHOD A—DIRECT SAMPLE TAP
bacteriological analysis of the sample. The sample may be
storedatroomtemperatureifanalyzedwithin2h,otherwise,it
6. Apparatus
should be stored from 4 to to 10°C and analyzed within 6 h.
6.1 Sampling Tap, see Fig. 1.
4.2.1 Sample analysis is conducted by either Test Methods
F60 or Test Method F488 for bacterial content of the water.
6.2 Bacteriological Monitor with0.45-µmmembranefilter.
6.3 Sanitarians Kit, consisting of metal syringe, special
5. Significance and Use
two way valve, and stainless steel graduated cup.
5.1 These test methods provide a field technique for the
6.4 Forceps with blunt stainless, unserrated tips.
bacteriological analysis of electronic process waters. The
samplingofthesewatersandsubsequentbacteriologicalanaly-
6.5 Incubator ,capableofholdingtemperaturewithin 61°C
sis may be critical to electronic product yields. Bacteria can be
in a range from 27 to 40°C.
the prime source of harmful contamination which can signifi-
cantly reduce the yield of satisfactory microelectronic device
production.
The sole source of supply of valves, YY2004000, and YY20E4010 (catalogue
5.2 The test methods described here may be used both to
number), known to the committee at this time is Millipore Corp., Bedford, MA. If
you are aware of alternative suppliers, please provide this information to ASTM
monitor the bacteriological quality of water used in microelec-
Headquarters.Your comments will receive careful consideration at a meeting of the
tronic product processing, and to locate the source of bacterial
responsible technical committee, which you may attend.
contamination in a water purification system.
Thesolesourceofsupplyoftheseproductsknowntothecommitteeatthistime
is Millipore Corp., Bedford, MA. If you are aware of alternative suppliers, please
5.3 Thesetestmethodsaresimplefieldmethods,combining
provide this information to ASTM Headquarters. Your comments will receive
sampling and bacteriological analysis techniques that do not
careful consideration at a meeting of the responsible technical committee, which
require bacteriological laboratory facilities. you may attend.
F1094 − 87 (Reapproved 2005)
6.6 Illuminator, 15 to 30-W incandescent or 8 to 10-W
fluorescent are generally acceptable. If incandescent light is
concentrated through or by a magnifying lens, a lower wattage
may suffice.
6.7 Magnifier, 5 to 15×for counting colonies.An illumina-
tor hand magnifier or a stereoscopic (dissection-type) micro-
scope are satisfactory.
6.8 Hypodermic Needle, No. 18, 2-in. blunt nose with
plastic syringe.
FIG. 2 Monitor on Luer Outlet of Sampling Valve
7. Reagents and Materials
7.1 Isopropyl alcohol,70to90%,or3to6%semi-standard
or reagent grade, hydrogen peroxide solution.
(2 to 10 organisms per millilitre). For high count waters (>10 organisms
per millilitre), the sample size may be as little as 1 mL.
7.2 Nutrient media —Supplied in double-tip scored am-
poule or impervious plastic ampoule of either type listed: 8.1.8 Removethemonitorfromtheoutletluerandattachthe
7.2.1 Membrane heterotrophic plate count, M-HPC Formu-
syringe pump to the outlet side of the monitor. Draw the
lation: residual fluid f
...

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