ASTM F1844-97(2016)

Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage (Withdrawn 2023)

SIGNIFICANCE AND USE
4.1 Resistivity is a primary quantity for characterization and specification of coated glass plates used for flat panel displays. Sheet resistance is also a primary quantity for characterization, specification, and monitoring of thin film fabrication processes.  
4.2 This practice requires no specimen preparation.  
4.3 The eddy current method is non-destructive to the thin film being measured. Special geometrical correction factors, needed for some four-point probe electrical resistivity measurements, are not required to derive the true sheet resistance so long as the transducers have a continuous layer of conductive thin film between them.  
4.4 Test Methods F673 refers to a testing arrangement in which the transducers and specimen (a semiconductor grade silicon wafer) are rigidly positioned. Similar apparatus is commercially available for testing large glass or plastic substrates, not envisioned in the scope of Test Methods F673. A hand held probe can also be used, depending on throat depth required.  
4.5 For use as a referee method, the probe and measuring apparatus must first be checked and qualified before use by the procedures of Test Methods F673 (9.1.1 through 9.1.3 and 9.1.4.2 through 9.1.4.5), then this practice is used.  
4.6 For use as a routine quality assurance method, this practice may be employed with periodic qualifications of probe and measuring apparatus by the procedures of Test Methods F673 (9.1.1 through 9.1.3 and 9.1.4.2 through 9.1.4.5). The parties to the test must agree upon adequate qualification intervals for the test apparatus.
SCOPE
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat panel information displays.  
1.2 This practice is intended to be used with Test Methods F673. This practice pertains to a “manual” measurement procedure in which an operator positions the measuring head on the test specimen and then personally activates the test apparatus. The resulting test data may be tabulated by the operator, or, alternatively, sent to a computer-based data logging system. Both Methods I and II of Test Methods F673 (paragraphs 3.1 through 3.3.3 of Test Methods F673) are applicable to this practice.  
1.3 Sheet resistivity in the range 0.020 to 3000 Ω per square (sheet conductance in the range 3 by 10–4  to 50 mhos per square) may be measured by this practice. The sheet resistance is assumed to be uniform in the area being probed.
Note 1: Typical manual test units, as described in this practice, measure and report in the units “mhos per square”; this is the inverse of “ohms per square.”  
1.4 This practice is applicable to flat surfaces only.  
1.5 This practice is non-destructive. It may be used on production panels to help assure production uniformity.  
1.6 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates (glass or plastic), used in making flat panel information displays.
Formerly under the jurisdiction of Committee F01 on Electronics, this practice was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

General Information

• Status: Withdrawn
• Publication Date: 30-Apr-2016
• Withdrawal Date: 28-Nov-2023
• ICS: 31.120 - Electronic display devices
• Technical Committee: F01 - Electronics
• Drafting Committee: F01.17 - Sputter Metallization

Relations

• Replaces: ASTM F1844-97(2008) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors For Flat Panel Display Manufacturing Using a Noncontact Eddy Current Gage
• Effective Date: 01-May-2016
• Refers: ASTM F673-02 - Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage (Withdrawn 2003)
• Effective Date: 10-Dec-2002
• Refers: ASTM F673-90(1996)e1 - Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage
• Effective Date: 01-Jan-1996

Standards Content (Sample)

This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1844 − 97 (Reapproved 2016)
Standard Practice for
Measuring Sheet Resistance of Thin Film Conductors For
Flat Panel Display Manufacturing Using a Noncontact Eddy
1
Current Gage
This standard is issued under the fixed designation F1844; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2
2.1 ASTM Standards:
1.1 This practice describes methods for measuring the sheet
F673Test Methods for Measuring Resistivity of Semicon-
electrical resistance of sputtered thin conductive films depos-
ductor Slices or Sheet Resistance of Semiconductor Films
ited on large insulating substrates (glass or plastic), used in
3
withaNoncontactEddy-CurrentGage(Withdrawn2003)
making flat panel information displays.
1.2 This practice is intended to be used with Test Methods
3. Summary of Practice
F673. This practice pertains to a “manual” measurement
3.1 This practice describes the preferred means of applying
procedure in which an operator positions the measuring head
TestMethodsF673tomeasuretheelectricalsheetresistanceof
on the test specimen and then personally activates the test
thin films on very large, flat, nonconducting substrates. The
apparatus. The resulting test data may be tabulated by the
substrate, oriented with the conducting thin film up, is placed
operator, or, alternatively, sent to a computer-based data
betweenthetransducersoftheeddycurrentsensorassemblyat
logging system. Both Methods I and II of Test Methods F673
the point of interest. The test arrangement is illustrated in Fig.
(paragraphs 3.1 through 3.3.3 of Test Methods F673) are
1.
applicable to this practice.
3.2 Atypicalconductanceapparatusisdescribedindetailin
1.3 Sheetresistivityintherange0.020to3000Ωpersquare
4
–4
a paper by Miller, Robinson, and Wiley. This paper also
(sheet conductance in the range 3 by 10 to 50 mhos per
discusses skin-depth as a function of thickness and resistivity.
square) may be measured by this practice.The sheet resistance
is assumed to be uniform in the area being probed.
3.3 A typical apparatus operates as follows: when a speci-
men is inserted into the fixed gap between the two parallel
NOTE 1—Typical manual test units, as described in this practice,
sensing elements, or transducers, in a special oscillator circuit,
measure and report in the units “mhos per square”; this is the inverse of
“ohms per square.” eddy currents are induced in the specimen by the alternating
field between the transducers. The current needed to maintain
1.4 This practice is applicable to flat surfaces only.
constant voltage in the oscillator is determined internally; this
1.5 This practice is non-destructive. It may be used on
current is a function of the specimen conductance.
production panels to help assure production uniformity.
3.4 Further details are given in Test Methods F673, para-
1.6 The values stated in SI units are to be regarded as
graphs 3.1 through 3.3.3.
standard. No other units of measurement are included in this
3.5 This practice includes calibration procedures for using
standard.
5
NIST Silicon Standard Reference Material to ensure proper
1.7 This standard does not purport to address all of the
operation before testing panels.
safety concerns, if any, associated with its use. It is the
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
bility of regulatory limitations prior to use.
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
3
The last approved version of this historical standard is referenced on
1
This practice is under the jurisdiction ofASTM Committee F01 on Electronics www.astm.org.
4
and is the direct responsibility of Subcommittee F01.17 on Sputter Metallization. Miller, G.L., Robinson, D.A. H., and Wiley, J. D., “Contactless Measurement
Current edition approved May 1, 2016. Published May 2016. Originally of Semiconductor Conductivity by Radio Frequency-Free-Carrier Power
approved in 1997. Last previous edition approved in 2008 as F1844–97(2008). Absorption,” Review of Scientific Instruments , Vol 47, No. 7, July 1976.
5
DOI: 10.1520/F1844-97R16. Available from NIST, 100 Bureau Dr., Stop 3460, Gaithersburg, MD 20899.
Copyright © ASTM International, 100 Barr Harbor D
...

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1844 − 97 (Reapproved 2016)
Standard Practice for
Measuring Sheet Resistance of Thin Film Conductors For
Flat Panel Display Manufacturing Using a Noncontact Eddy
1
Current Gage
This standard is issued under the fixed designation F1844; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2
2.1 ASTM Standards:
1.1 This practice describes methods for measuring the sheet
F673 Test Methods for Measuring Resistivity of Semicon-
electrical resistance of sputtered thin conductive films depos-
ductor Slices or Sheet Resistance of Semiconductor Films
ited on large insulating substrates (glass or plastic), used in
3
with a Noncontact Eddy-Current Gage (Withdrawn 2003)
making flat panel information displays.
1.2 This practice is intended to be used with Test Methods
3. Summary of Practice
F673. This practice pertains to a “manual” measurement
3.1 This practice describes the preferred means of applying
procedure in which an operator positions the measuring head
Test Methods F673 to measure the electrical sheet resistance of
on the test specimen and then personally activates the test
thin films on very large, flat, nonconducting substrates. The
apparatus. The resulting test data may be tabulated by the
substrate, oriented with the conducting thin film up, is placed
operator, or, alternatively, sent to a computer-based data
between the transducers of the eddy current sensor assembly at
logging system. Both Methods I and II of Test Methods F673
the point of interest. The test arrangement is illustrated in Fig.
(paragraphs 3.1 through 3.3.3 of Test Methods F673) are
1.
applicable to this practice.
3.2 A typical conductance apparatus is described in detail in
1.3 Sheet resistivity in the range 0.020 to 3000 Ω per square
4
–4
a paper by Miller, Robinson, and Wiley. This paper also
(sheet conductance in the range 3 by 10 to 50 mhos per
discusses skin-depth as a function of thickness and resistivity.
square) may be measured by this practice. The sheet resistance
is assumed to be uniform in the area being probed.
3.3 A typical apparatus operates as follows: when a speci-
men is inserted into the fixed gap between the two parallel
NOTE 1—Typical manual test units, as described in this practice,
sensing elements, or transducers, in a special oscillator circuit,
measure and report in the units “mhos per square”; this is the inverse of
eddy currents are induced in the specimen by the alternating
“ohms per square.”
field between the transducers. The current needed to maintain
1.4 This practice is applicable to flat surfaces only.
constant voltage in the oscillator is determined internally; this
1.5 This practice is non-destructive. It may be used on
current is a function of the specimen conductance.
production panels to help assure production uniformity.
3.4 Further details are given in Test Methods F673, para-
1.6 The values stated in SI units are to be regarded as
graphs 3.1 through 3.3.3.
standard. No other units of measurement are included in this
3.5 This practice includes calibration procedures for using
standard. 5
NIST Silicon Standard Reference Material to ensure proper
1.7 This standard does not purport to address all of the
operation before testing panels.
safety concerns, if any, associated with its use. It is the
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
bility of regulatory limitations prior to use.
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
3
The last approved version of this historical standard is referenced on
1
This practice is under the jurisdiction of ASTM Committee F01 on Electronics www.astm.org.
4
and is the direct responsibility of Subcommittee F01.17 on Sputter Metallization. Miller, G.L., Robinson, D. A. H., and Wiley, J. D., “Contactless Measurement
Current edition approved May 1, 2016. Published May 2016. Originally of Semiconductor Conductivity by Radio Frequency-Free-Carrier Power
approved in 1997. Last previous edition approved in 2008 as F1844 – 97(2008). Absorption,” Review of Scientific Instruments , Vol 47, No. 7, July 1976.
5
DOI: 10.1520/F1844-97R16. Available from NIST, 100 Bureau Dr., Stop 3460, Gaithersburg, MD 20899.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

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