ASTM F1394-92(2005)
(Test Method)Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
Background Testing—This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test.
This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.
SCOPE
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.
1.1.2 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.
1.1.3 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.
1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm ( 1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.
1.2.1 Valves larger than 12.7 mm ( 1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm ( 1/2 in.) should be tested while maintaining a Reynolds number of 20000 to 21000. This is the Reynolds number for 12.7-mm ( 1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).
1.3 Limitations:
1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.
1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.
1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.
1.3.4 This test method is intended for use by operators ...
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Designation: F1394 − 92(Reapproved 2005)
Standard Test Method for
Determination of Particle Contribution from Gas Distribution
1
System Valves
This standard is issued under the fixed designation F1394; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presentsaprocedurethatmaybeappliedfortheevaluationofoneormorecomponentsconsideredfor
use in such systems.
1. Scope condensation nucleus particle counter and does not consider
classifying data into various size ranges.
1.1 This test method covers gas distribution system compo-
1.3.1.1 It is questionable whether significant data can be
nents intended for installation into a high-purity gas distribu-
generated from nondynamic components (such as fittings and
tion system.
short lengths of tubing) to compare, with statistical
1.1.1 This test method describes a procedure designed to
significance, to the data generated from the spool piece. For
draw statistically significant comparisons of particulate gen-
this reason, this test method cannot reliably support compari-
eration performance of valves tested under aggressive condi-
sons between these types of components.
tions.
1.3.1.2 If detection or classification of particles, or both, in
1.1.2 This test method is not intended as a methodology for
the size range of laser particle counter (LPC) technology is of
monitoring on-going particle performance once a particular
interest, an LPC can be utilized for testing components. Flow
valve has been tested.
rates,testtimes,samplingapparatus,anddataanalysisoutlined
1.2 Thistestmethodutilizesacondensationnucleuscounter
in this test method do not apply for use with an LPC. Because
(CNC) applied to in-line gas valves typically used in semicon-
ofthesevariations,datafromCNCsarenotcomparabletodata
ductor applications. It applies to automatic and manual valves
from LPCs.
of various types (such as diaphragms or bellows), 6.3 through
1.3.2 This test method specifies flow and mechanical stress
1 1
12.7-mm ( ⁄4 through ⁄2-in.) size. For applications of this test
conditions in excess of those considered typical. These condi-
method to larger valves, see the table in the appendix.
tions should not exceed those recommended by the manufac-
1
1.2.1 Valves larger than 12.7 mm ( ⁄2 in.) can be tested by
turer. Actual performance under normal operating conditions
this methodology. The test stand must be sized accordingly.
may vary.
1
Components larger than 12.7 mm ( ⁄2 in.) should be tested
1.3.3 The test method is limited to nitrogen or clean dry air.
while maintaining a Reynolds number of 20000 to 21000.
Performance with other gases may vary.
1
This is the Reynolds number for 12.7-mm ( ⁄2-in.) components
1.3.4 This test method is intended for use by operators who
tested at a velocity of 30.5 m/s (100 ft/s).
understand the use of the apparatus at a level equivalent to six
months of experience.
1.3 Limitations:
1.3.1 This test method is applicable to total particle count 1.3.5 The appropriate particle counter manufacturer’s oper-
ating and maintenance manuals should be consulted when
greater than the minimum detection limit (MDL) of the
using this test method.
1.4 The values stated in SI units are to be regarded as the
1
This test method is under the jurisdiction of ASTM Committee F01 on
standard. The inch-pound units given in parentheses are for
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
tion Control.
information only.
Current edition approved Jan. 1, 2005. Published January 2005. Originally
1.5 This standard does not purport to address all of the
approvedin1992.Lastpreviouseditionapprovedin1999asF1394–92(1999).DOI:
10.1520/F1394-92R05. safety concerns, if any, associated with its use. It is the
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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F1394 − 92 (2005)
responsibility of the user of this standard to establish appro- 3.1.12 test flow rate—volumetric flow at test pressure and
priate safety and health practices and determine the applica- temperature.
bility of regulatory limitations prior to use. Specific hazard
3.1.13 test pressure—pressure immediately downstream of
statements are given in Section 6, Hazards.
the test component.
3.1.14 test velocity—the average velocity of the test gas in
2. Referenced Documents
the outlet tube of the test valve (volumetric flow at ambient
2.1 Federal Standard:
pressure and temperature di
...
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