ASTM F1397-93(2020)
(Test Method)Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components (Withdrawn 2023)
Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components (Withdrawn 2023)
SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.
1.3 Limitations:
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.
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Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1397 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Moisture Contribution by Gas Distribution
System Components
This standard is issued under the fixed designation F1397; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope mine the applicability of regulatory limitations prior to use.
Specific hazard statements are given in Section 5.
1.1 This test method covers testing components for total
1.6 This international standard was developed in accor-
moisture contribution to a gas distribution system at ambient
dance with internationally recognized principles on standard-
temperature. In addition, the test method allows testing at
ization established in the Decision on Principles for the
elevated ambient temperatures as high as 70°C and of the
Development of International Standards, Guides and Recom-
component moisture capacity and recovery.
mendations issued by the World Trade Organization Technical
1.2 This test method applies to in-line components contain-
Barriers to Trade (TBT) Committee.
ing electronics grade materials such as those used in semicon-
ductor gas distribution systems.
2. Terminology
1.3 Limitations:
2.1 Definitions:
1.3.1 Thistestmethodislimitedbythesensitivityofcurrent
2.1.1 baseline—the instrument response under steady state
instrumentation, as well as by the response time of the
conditions.
instrumentation.This test method is not intended to be used for
test components larger than 12.7-mm ( ⁄2-in.) outside diameter
2.1.2 glove bag—an enclosure that contains a controlled
nominal size. This test method could be applied to larger atmosphere. A glove box could also be used for this test
components; however, the stated volumetric flow rate may not
method.
provide adequate mixing to ensure a representative sample.
2.1.3 heat trace— heating of a component, spool piece, or
Higher flow rates may improve the mixing but excessively
teststandbyauniformandcompletewrappingoftheitemwith
dilute the sample.
resistant heat tape.
1.3.2 This test method is written with the assumption that
2.1.4 minimumdetectionlimit(MDL)oftheinstrument—the
the operator understands the use of the apparatus at a level
lowest instrument response detectable and readable by the
equivalent to six months of experience.
instrument and at least two times the amplitude of the noise.
1.4 The values stated in SI units are to be regarded as the
2.1.5 response time—the time required for the system to
standard. The inch-pound units given in parentheses are for
information only. reach steady state after a change in concentration.
1.5 This standard does not purport to address all of the
2.1.6 spool piece—a null component, consisting of a
safety concerns, if any, associated with its use. It is the
straightpieceofelectropolishedtubingandappropriatefittings,
responsibility of the user of this standard to establish appro-
used in place of the test component to establish the baseline.
priate safety, health, and environmental practices and deter-
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32°F).
This test method is under the jurisdiction of ASTM Committee F01 on
2.1.8 test component—any device being tested, such as a
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
valve, regulator, or filter.
tion Control.
Current edition approved April 15, 2020. Published May 2020. Originally
2.1.9 test stand—the physical test system used to measure
approved in 1992. Last previous edition approved in 2012 as F1397 – 93(2012).
DOI: 10.1520/F1397-93R20. impurity levels.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1397 − 93 (2020)
2.1.10 V-1, V-2—inlet and outlet valves of bypass loop, upstream of the pressure gage P ) to the analyzer shall not be
respectively. more than 600 mm (2.4 in.) to minimize the effect (adsorption/
desorption) of the sample line on the result. The sample line
2.1.11 V-3, V-4—inlet and outlet valves of test loop, respec-
shall have no more than two mechanical joints.
tively.
4.1.3.1 Components With Stub Ends—Use compression fit-
2.1.12 zero gas—a purified gas that has an impurity
tings with nylon or teflon ferrules to connect the spool piece
concentration below the MDL of the analytical instrument.
and test component to the test loop. Keep the purged glove bag
This gas is to be used for both instrument calibration and
around each component for the duration of the test. In the case
component testing.
of long pieces of electropolished tubing, use two glove bags,
2.2 Abbreviations:
one at each end.
2.2.1 MFC—mass flow controller.
4.1.4 Valves, must be diaphragm or bellows type and ca-
pable of unimpaired operation at 94°C (200°F). The use of
2.2.2 ppbv—parts per billion by volume assuming ideal gas
all-welded, all-metal valves is preferred.
behavior, equivalent to nmole/mole (such as nL/L). The same
as molar parts per billion (ppb).
4.2 Instrumentation:
2.2.3 ppbw—parts per billion by weight (such as ng/g). 4.2.1 Moisture Analyzer—Moisture analyzers (such as
electrolytic, piezo-electric, chilled mirror, or opto-electronic)
2.2.4 ppmv—parts per million by volume assuming ideal
are used to measure moisture levels. The analyzer is to be
gas behavior, equivalent to µmole/mole (such as µL/L). The
placed downstream of the test component. Accurate baseline
same as molar parts per million (ppm).
readings must be obtained prior to and subsequent to each of
2.2.5 ppmw—parts per million by weight (such as µg/g).
the tests. Excessive deviations in baseline levels (620 ppbv)
2.3 Symbols:
before or after the tests require that all results be rejected. The
2.3.1 P —The inlet pressure measured upstream of the
analyzer must be capable of accurately recording changes in
purifier and filter in the test apparatus.
moisture concentrations on a real time basis (see Appendix
X1.1).
2.3.2 P —The outlet pressure measured downstream of the
4.2.2 Pressure and Flow Control—Upstream pressure is to
analyzer in the test apparatus.
be controlled with a regular upstream of the test component.
2.3.3 Q —the bypass sample flow not going through the
Flow is to be controlled at a point downstream of the sampling
analytical system.
port and monitored at that point. A mass flow controller is
2.3.4 Q —the total sample flow through the analytical
preferred for maintaining the flow as described in 8.3. Sam-
system.
pling is to be performed via a tee in the line, with a run of
2.3.5 Q —the flow through the spool piece or component.
straight tubing before the mass flow controller. All lines must
s
conform to 4.1.3. Inlet pressure is monitored by P . Test flow
2.3.6 T —the temperature of the air discharged by the
a
is the sum of Q and Q . Q is directly controlled, and Q is the
analyzer’s cooling exhaust. 1 2 1 2
total flow through the analyzer (see Fig. 1).
2.3.7 T —the temperature of the spool piece or component.
s
4.3 Bypass Loop—The design of the bypass loop is not
2.3.7.1 Discussion—The thermocouple must be in contact
restrictedtoanyonedesign.Itcouldbe,forexample,a3.2-mm
with the outside wall of the component or spool piece.
( ⁄8-in.)316Lstainlesssteelcoil,oraflexibletubesection.This
3. Significance and Use
allows the flexibility necessary to install test components of
different lengths.
3.1 The purpose of this test method is to define a procedure
for testing components being considered for installation into a
5. Hazards
high-purity gas distribution system. Application of this test
method is expected to yield comparable data among compo-
5.1 It is required that the user have a working knowledge of
nents tested for the purposes of qualification for this installa-
the respective instrumentation and that the user practice proper
tion.
4. Apparatus
4.1 Materials:
4.1.1 Nitrogen or Argon, clean, dry, as specified in 8.4.
4.1.2 Spool Piece, that can be installed in place of the test
component is required. This piece is to be a straight section of
316Lelectropolished stainless steel tubing with no restrictions.
The length of the spool piece shall be 200 mm (0.8 in.). The
spool piece should have the same end connections as the test
component.
4.1.3 Tubing, used downstream of the purifier shall be 316L
electropolishedstainlesssteelseamlesstubing.Thediameterof
the sample line to the analyzer shall not be larger than 6.4 mm
( ⁄4 in.). The length of the sample line from the tee (installed FIG. 1 Test Schematic
F1397 − 93 (2020)
handling of test components for trace moisture analysis. Good 7. Calibration
laboratory practices must also be understood.
7.1 Calibrate instruments regularly in accordance with
5.2 It is required that the user be familiar with proper manufacturer’s instructions.
component installation and that the test components be in-
7.2 Moisture Analyzer Calibration —Zero gas must contain
stalled on the test stand in accordance with manufacturer’s
moisture below the MDL of the instrument, supplied by
instructions.
purifiedgas,withthepurifierincloseproximitytotheanalyzer.
5.3 Do not exceed ratings (such as pressure, temperature,
Use the instrument’s internal standard, if available, is to be
and flow) of the component.
usedforthespancalibration.Ifsuchastandardisnotavailable,
calibrate the analyzer with an external moisture generator
5.4 Gloves are to be worn for all steps.
according to the manufacturer’s instructions.
5.5 Limit exposure of the instrument and test component to
atmospheric contamination before and during the test.
8. Conditioning
5.6 Ensure that adequate mixing of the test gas is attained.
8.1 Pressure—Test the test component at 200 kPa gage (30
psig) as measured by P .
6. Preparation of Apparatus
8.2 Temperature—T is to be in the ambient temperature
6.1 A schematic drawing of a recommended test apparatus s
range of 18 to 26°C (64 to 78°F) and the higher range of 69 to
located inside a clean laboratory is shown in Fig. 1. Deviations
71°C (156 to 160°F). T must not deviate more than 62°C
from this design are acceptable as long as baseline levels a
(4°F) from the time of calibration to the termination of the test.
consistent with 9.2 can be maintained. Nitrogen or argon gas is
T must either be within the range of 18 to 26°C (64 to 78°F)
purified to remove water and hydrocarbons. The base gas is a
or be consistent with the analytical systems manufacturer’s
then filtered by an electronics grade high purity, point of use
specifications, whichever is more stringent.
gas filter (pore size rating of ≤0.02 µm) before it is delivered to
the test component.
8.3 The flow rate Q for components is 1 standard L/min
s
with 62 % tolerance.
6.2 A bypass loop may be used to divert gas flow through
the test stand and the analyzer whenever the spool piece or a
8.4 The test gas shall be purified nitrogen or argon with a
testcomponentisinstalledorremovedfromtheteststand.This
maximum moisture concentration not exceeding a moisture
prevents the ambient air from contaminating the test apparatus
concentration level of 20 ppb. Gas quality must be maintained
and the moisture analyzer; thus, the analyzer baseline remains
at flow specified in 8.3. The test gas must be passed through a
the same. A glove bag is used to enclose test component lines
gasfilterhavingaporesizeratingof0.02µmorfiner.Thefilter
of the test apparatus during the installation and removal of the
must be compatible with the 94°C (200°F) bake-out.
spool piece and the test piece.
9. Procedure (See Fig. 2)
6.3 A moisture analyzer capable of detecting moisture
9.1 Bake-Out—With the spool piece installed and valves
concentration levels down to 10 ppb is connected to the test
V-1, V-2, V-3, and V-4 open, bake out the system (downstream
stand to sample the gas flowing through the test piece. The
of purifier to upstream of analyzer, exclusive of the exhaust
purifiedandfilteredbasegasfromtheteststandcontaining<10
ppb moisture is used as the zero moisture gas source for the
analyzer.Sincetheanalyzerissensitivetothesampleflowrate,
the metering valves within the analyzer should be adjusted to
yield the flow rates required by the specification for an inlet
pressure of 30 psig. The gas flow rate Q is set to 1 L/min.
s
6.4 Inlet gas pressure is controlled by a pressure regulator
and measured immediately upstream of the purifier by an
electronic grade pressure gage. Flow measurement is carried
outbyamassflowcontroller(MFC)locateddownstreamofthe
analyzer. The outlet pressure of the gas is measured immedi-
ately downstream of the analyzer by another electronic grade
pressure gage. The MFC along with its digital readout should
be calibrated before use to control and display the gas flow rate
Q .
6.5 The temperature of the spool piece, test specimen,
analyzer cell compartment, and the moisture concentration
measured by the analyzer can either be recorded continuously
by a multichannel data logger or collected and stored in a
computer using a data acquisition program.
6.6 A moisture generator capable of generating moisture
concentration levels over the range of 100 ppb to 2000 ppb is
connected upstream of the test component through valve V-5. FIG. 2 Test Procedure Sequence
F1397 − 93 (2020)
leg) at 94°C (200°F) until outlet moisture concentration is flushed with clean, dry nitrogen. Open valvesV-1 andV-2 first,
stable (<40 ppbv). Flow of the gas is specified in 8.3. Cool to then close V-3 and V-4. Disconnect and recap the spool piece
lower T . Close valves V-1 and V-2. while maintaining flow. Maintain flow through the analyzer
s
continuouslywithvalvesV-1andV-2duringdisconnectionand
9.2 Baseline—Flowgasthroughtheteststandwiththespool
installation. Remove the test component caps and install the
piece installed on the test stand. Use the flow rate as defined in
testcomponent.OpenV-3andV-4first,thencloseV-1andV-2.
8.3. Flow for 30 min after the moisture concentration values
The time from disconnection of the spool piece to installation
have attained a level of <20 ppbv. Utilizing heat tape, heat the
of the test component must be less than 2 min.
spool piece and upstream tubing to
...
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1397 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Moisture Contribution by Gas Distribution
System Components
This standard is issued under the fixed designation F1397; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope mine the applicability of regulatory limitations prior to use.
Specific hazard statements are given in Section 5.
1.1 This test method covers testing components for total
1.6 This international standard was developed in accor-
moisture contribution to a gas distribution system at ambient
dance with internationally recognized principles on standard-
temperature. In addition, the test method allows testing at
ization established in the Decision on Principles for the
elevated ambient temperatures as high as 70°C and of the
Development of International Standards, Guides and Recom-
component moisture capacity and recovery.
mendations issued by the World Trade Organization Technical
1.2 This test method applies to in-line components contain-
Barriers to Trade (TBT) Committee.
ing electronics grade materials such as those used in semicon-
ductor gas distribution systems.
2. Terminology
1.3 Limitations:
2.1 Definitions:
1.3.1 This test method is limited by the sensitivity of current
2.1.1 baseline—the instrument response under steady state
instrumentation, as well as by the response time of the
conditions.
instrumentation. This test method is not intended to be used for
test components larger than 12.7-mm ( ⁄2-in.) outside diameter 2.1.2 glove bag—an enclosure that contains a controlled
nominal size. This test method could be applied to larger
atmosphere. A glove box could also be used for this test
components; however, the stated volumetric flow rate may not method.
provide adequate mixing to ensure a representative sample.
2.1.3 heat trace— heating of a component, spool piece, or
Higher flow rates may improve the mixing but excessively
test stand by a uniform and complete wrapping of the item with
dilute the sample.
resistant heat tape.
1.3.2 This test method is written with the assumption that
2.1.4 minimum detection limit (MDL) of the instrument—the
the operator understands the use of the apparatus at a level
lowest instrument response detectable and readable by the
equivalent to six months of experience.
instrument and at least two times the amplitude of the noise.
1.4 The values stated in SI units are to be regarded as the
standard. The inch-pound units given in parentheses are for 2.1.5 response time—the time required for the system to
reach steady state after a change in concentration.
information only.
1.5 This standard does not purport to address all of the
2.1.6 spool piece—a null component, consisting of a
safety concerns, if any, associated with its use. It is the
straight piece of electropolished tubing and appropriate fittings,
responsibility of the user of this standard to establish appro-
used in place of the test component to establish the baseline.
priate safety, health, and environmental practices and deter-
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32°F).
This test method is under the jurisdiction of ASTM Committee F01 on
2.1.8 test component—any device being tested, such as a
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
valve, regulator, or filter.
tion Control.
Current edition approved April 15, 2020. Published May 2020. Originally
2.1.9 test stand—the physical test system used to measure
approved in 1992. Last previous edition approved in 2012 as F1397 – 93(2012).
DOI: 10.1520/F1397-93R20. impurity levels.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
F1397 − 93 (2020)
2.1.10 V-1, V-2—inlet and outlet valves of bypass loop, upstream of the pressure gage P ) to the analyzer shall not be
respectively. more than 600 mm (2.4 in.) to minimize the effect (adsorption/
desorption) of the sample line on the result. The sample line
2.1.11 V-3, V-4—inlet and outlet valves of test loop, respec-
shall have no more than two mechanical joints.
tively.
4.1.3.1 Components With Stub Ends—Use compression fit-
2.1.12 zero gas—a purified gas that has an impurity
tings with nylon or teflon ferrules to connect the spool piece
concentration below the MDL of the analytical instrument.
and test component to the test loop. Keep the purged glove bag
This gas is to be used for both instrument calibration and
around each component for the duration of the test. In the case
component testing.
of long pieces of electropolished tubing, use two glove bags,
2.2 Abbreviations:
one at each end.
2.2.1 MFC—mass flow controller.
4.1.4 Valves, must be diaphragm or bellows type and ca-
pable of unimpaired operation at 94°C (200°F). The use of
2.2.2 ppbv—parts per billion by volume assuming ideal gas
all-welded, all-metal valves is preferred.
behavior, equivalent to nmole/mole (such as nL/L). The same
as molar parts per billion (ppb).
4.2 Instrumentation:
4.2.1 Moisture Analyzer—Moisture analyzers (such as
2.2.3 ppbw—parts per billion by weight (such as ng/g).
electrolytic, piezo-electric, chilled mirror, or opto-electronic)
2.2.4 ppmv—parts per million by volume assuming ideal
are used to measure moisture levels. The analyzer is to be
gas behavior, equivalent to µmole/mole (such as µL/L). The
placed downstream of the test component. Accurate baseline
same as molar parts per million (ppm).
readings must be obtained prior to and subsequent to each of
2.2.5 ppmw—parts per million by weight (such as µg/g).
the tests. Excessive deviations in baseline levels (620 ppbv)
2.3 Symbols:
before or after the tests require that all results be rejected. The
2.3.1 P —The inlet pressure measured upstream of the
analyzer must be capable of accurately recording changes in
purifier and filter in the test apparatus.
moisture concentrations on a real time basis (see Appendix
X1.1).
2.3.2 P —The outlet pressure measured downstream of the
4.2.2 Pressure and Flow Control—Upstream pressure is to
analyzer in the test apparatus.
be controlled with a regular upstream of the test component.
2.3.3 Q —the bypass sample flow not going through the
Flow is to be controlled at a point downstream of the sampling
analytical system.
port and monitored at that point. A mass flow controller is
2.3.4 Q —the total sample flow through the analytical
preferred for maintaining the flow as described in 8.3. Sam-
system.
pling is to be performed via a tee in the line, with a run of
2.3.5 Q —the flow through the spool piece or component. straight tubing before the mass flow controller. All lines must
s
conform to 4.1.3. Inlet pressure is monitored by P . Test flow
2.3.6 T —the temperature of the air discharged by the 1
a
is the sum of Q and Q . Q is directly controlled, and Q is the
1 2 1 2
analyzer’s cooling exhaust.
total flow through the analyzer (see Fig. 1).
2.3.7 T —the temperature of the spool piece or component.
s
4.3 Bypass Loop—The design of the bypass loop is not
2.3.7.1 Discussion—The thermocouple must be in contact
restricted to any one design. It could be, for example, a 3.2-mm
with the outside wall of the component or spool piece.
( ⁄8 -in.) 316L stainless steel coil, or a flexible tube section. This
3. Significance and Use
allows the flexibility necessary to install test components of
different lengths.
3.1 The purpose of this test method is to define a procedure
for testing components being considered for installation into a
5. Hazards
high-purity gas distribution system. Application of this test
method is expected to yield comparable data among compo-
5.1 It is required that the user have a working knowledge of
nents tested for the purposes of qualification for this installa-
the respective instrumentation and that the user practice proper
tion.
4. Apparatus
4.1 Materials:
4.1.1 Nitrogen or Argon, clean, dry, as specified in 8.4.
4.1.2 Spool Piece, that can be installed in place of the test
component is required. This piece is to be a straight section of
316L electropolished stainless steel tubing with no restrictions.
The length of the spool piece shall be 200 mm (0.8 in.). The
spool piece should have the same end connections as the test
component.
4.1.3 Tubing, used downstream of the purifier shall be 316L
electropolished stainless steel seamless tubing. The diameter of
the sample line to the analyzer shall not be larger than 6.4 mm
( ⁄4 in.). The length of the sample line from the tee (installed FIG. 1 Test Schematic
F1397 − 93 (2020)
handling of test components for trace moisture analysis. Good 7. Calibration
laboratory practices must also be understood.
7.1 Calibrate instruments regularly in accordance with
5.2 It is required that the user be familiar with proper
manufacturer’s instructions.
component installation and that the test components be in-
7.2 Moisture Analyzer Calibration —Zero gas must contain
stalled on the test stand in accordance with manufacturer’s
moisture below the MDL of the instrument, supplied by
instructions.
purified gas, with the purifier in close proximity to the analyzer.
5.3 Do not exceed ratings (such as pressure, temperature,
Use the instrument’s internal standard, if available, is to be
and flow) of the component.
used for the span calibration. If such a standard is not available,
calibrate the analyzer with an external moisture generator
5.4 Gloves are to be worn for all steps.
according to the manufacturer’s instructions.
5.5 Limit exposure of the instrument and test component to
atmospheric contamination before and during the test.
8. Conditioning
5.6 Ensure that adequate mixing of the test gas is attained.
8.1 Pressure—Test the test component at 200 kPa gage (30
psig) as measured by P .
6. Preparation of Apparatus
8.2 Temperature—T is to be in the ambient temperature
s
6.1 A schematic drawing of a recommended test apparatus
range of 18 to 26°C (64 to 78°F) and the higher range of 69 to
located inside a clean laboratory is shown in Fig. 1. Deviations
71°C (156 to 160°F). T must not deviate more than 62°C
a
from this design are acceptable as long as baseline levels
(4°F) from the time of calibration to the termination of the test.
consistent with 9.2 can be maintained. Nitrogen or argon gas is
T must either be within the range of 18 to 26°C (64 to 78°F)
a
purified to remove water and hydrocarbons. The base gas is
or be consistent with the analytical systems manufacturer’s
then filtered by an electronics grade high purity, point of use
specifications, whichever is more stringent.
gas filter (pore size rating of ≤0.02 µm) before it is delivered to
the test component.
8.3 The flow rate Q for components is 1 standard L/min
s
with 62 % tolerance.
6.2 A bypass loop may be used to divert gas flow through
the test stand and the analyzer whenever the spool piece or a
8.4 The test gas shall be purified nitrogen or argon with a
test component is installed or removed from the test stand. This
maximum moisture concentration not exceeding a moisture
prevents the ambient air from contaminating the test apparatus
concentration level of 20 ppb. Gas quality must be maintained
and the moisture analyzer; thus, the analyzer baseline remains
at flow specified in 8.3. The test gas must be passed through a
the same. A glove bag is used to enclose test component lines
gas filter having a pore size rating of 0.02 µm or finer. The filter
of the test apparatus during the installation and removal of the
must be compatible with the 94°C (200°F) bake-out.
spool piece and the test piece.
9. Procedure (See Fig. 2)
6.3 A moisture analyzer capable of detecting moisture
9.1 Bake-Out—With the spool piece installed and valves
concentration levels down to 10 ppb is connected to the test
V-1, V-2, V-3, and V-4 open, bake out the system (downstream
stand to sample the gas flowing through the test piece. The
of purifier to upstream of analyzer, exclusive of the exhaust
purified and filtered base gas from the test stand containing <10
ppb moisture is used as the zero moisture gas source for the
analyzer. Since the analyzer is sensitive to the sample flow rate,
the metering valves within the analyzer should be adjusted to
yield the flow rates required by the specification for an inlet
pressure of 30 psig. The gas flow rate Q is set to 1 L/min.
s
6.4 Inlet gas pressure is controlled by a pressure regulator
and measured immediately upstream of the purifier by an
electronic grade pressure gage. Flow measurement is carried
out by a mass flow controller (MFC) located downstream of the
analyzer. The outlet pressure of the gas is measured immedi-
ately downstream of the analyzer by another electronic grade
pressure gage. The MFC along with its digital readout should
be calibrated before use to control and display the gas flow rate
Q .
6.5 The temperature of the spool piece, test specimen,
analyzer cell compartment, and the moisture concentration
measured by the analyzer can either be recorded continuously
by a multichannel data logger or collected and stored in a
computer using a data acquisition program.
6.6 A moisture generator capable of generating moisture
concentration levels over the range of 100 ppb to 2000 ppb is
connected upstream of the test component through valve V-5. FIG. 2 Test Procedure Sequence
F1397 − 93 (2020)
leg) at 94°C (200°F) until outlet moisture concentration is flushed with clean, dry nitrogen. Open valves V-1 and V-2 first,
stable (<40 ppbv). Flow of the gas is specified in 8.3. Cool to then close V-3 and V-4. Disconnect and recap the spool piece
lower T . Close valves V-1 and V-2. while maintaining flow. Maintain flow through the analyzer
s
continuously with valves V-1 and V-2 during disconnection and
9.2 Baseline—Flow gas through the test stand with the spool
installation. Remove the test component caps and install the
piece installed on the test stand. Use the flow rate as defined in
test component. Open V-3 and V-4 first, then close V-1 and V-2.
8.3. Flow for 30 min after the moisture concentration values
The time from disconnection of the spool piece to installation
have attained a level of <20 ppbv. Utilizing heat tape, heat the
of the te
...
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