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ASTM F390-11

(Test Method)

Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)

Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)

ABSTRACT
This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films formed by deposition of a material or by a thinning process and supported by an insulating substrate. This test method is suitable for referee measurement purposes as well as for routine acceptance measurements. A collinear four-probe array is used to determine the sheet resistance by passing a measured direct current through the specimen between the outer probes and measuring the resulting potential difference between the inner probes. The sheet resistance is calculated from the measured current and potential values using correction factors associated with the geometry of the specimen and the probe spacing. The accuracy of the electrical measuring equipment is tested by means of an analog circuit containing a known standard resistor together with other resistors which simulate the resistance at the contacts between the probe tips and the film surface.
SCOPE
1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10   to 10  [omega]/[open-box] (see 3.1.3).  
1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.  
1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in January 2020 in accordance with section 10.6.3 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.

General Information

Status
Withdrawn
Publication Date
31-May-2011
Withdrawal Date
08-Jan-2020
ICS
77.040.99 - Other methods of testing of metals
Technical Committee
F01 - Electronics
Drafting Committee
F01.17 - Sputter Metallization
Current Stage
Ref Project

Relations

Referred By
ASTM F1711-96(2016) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe Method
Effective Date
01-Jun-2011
Referred By
ASTM B488-18 - Standard Specification for Electrodeposited Coatings of Gold for Engineering Uses
Effective Date
01-Jun-2011

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ASTM F390-11 - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)ASTM F390-11 - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)
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ASTM F390-11 - Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array (Withdrawn 2020)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F390 − 11
Standard Test Method for
Sheet Resistance of Thin Metallic Films With a Collinear
1
Four-Probe Array
ThisstandardisissuedunderthefixeddesignationF390;thenumberimmediatelyfollowingthedesignationindicatestheyearoforiginal
adoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.Asuperscript
epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 3.1.1 thin film—afilmhavingathicknessmuchsmallerthan
anylateraldimension,formedbydepositionofamaterialorby
1.1 This test method covers the measurement of the sheet
a thinning process.
resistance of metallic thin films with a collinear four-probe
array. It is intended for use with rectangular metallic films 3.1.2 thin metallic film—a thin film composed of a material
−8 −3
or materials with resistivity in the range from 10 to 10
between 0.01 and 100 µm thick, formed by deposition of a
material or by a thinning process and supported by an Ω·cm.
−2
insulating substrate, in the sheet resistance range from 10 to
3.1.3 sheet resistance, R [Ω/□]— in a thin film, the ratio of
s
4
10 Ω/□ (see 3.1.3).
the potential gradient parallel to the current to the product of
the current density and the film thickness; in a rectangular thin
1.2 This test method is suitable for referee measurement
purposes as well as for routine acceptance measurements. film, the quotient of the resistance, measured along the length
ofthefilm,dividedbythelength, l,towidth, w,ratio.Theratio
1.3 The values stated in SI units are to be regarded as the
l/w is the number of squares.
standard. The values given in parentheses are for information
only.
4. Summary of Test Method
1.4 This standard does not purport to address the safety
4.1 A collinear four-probe array is used to determine the
concerns, if any, associated with its use. It is the responsibility
sheet resistance by passing a measured direct current through
of whoever uses this standard to consult and establish appro-
the specimen between the outer probes and measuring the
priate safety and health practices and determine the applica-
resulting potential difference between the inner probes. The
bility of regulatory limitations prior to use.
sheet resistance is calculated from the measured current and
potential values using correction factors associated with the
2. Referenced Documents
geometry of the specimen and the probe spacing.
2
2.1 ASTM Standards:
4.2 This test method includes procedures for checking both
E2251Specification for Liquid-in-Glass ASTM Thermom-
the probe assembly and the electrical measuring apparatus.
eters with Low-Hazard Precision Liquids
4.2.1 The spacings between the four probe tips are deter-
F388Method for Measurement of Oxide Thickness on
mined from measurements of indentations made by the tips in
Silicon Wafers and Metallization Thickness by Multiple-
3
a suitable surface. This test also is used to determine the
BeamInterference(TolanskyMethod)(Withdrawn1993)
condition of the tips.
4.2.2 The accuracy of the electrical measuring equipment is
3. Terminology
tested by means of an analog circuit containing a known
3.1 Definitions:
standard resistor together with other resistors which simulate
the resistance at the contacts between the probe tips and the
film surface.
1
This test method is under the jurisdiction of ASTM Committee F01 on
Electronics and is the direct responsibility of Subcommittee F01.17 on Sputter
5. Apparatus
Metallization.
CurrenteditionapprovedJune1,2011.PublishedJuly2011.Originallyapproved
5.1 Probe Assembly:
in1973asF390–73T.Lastpreviouseditionapprovedin2003asF390–98(2003).
5.1.1 Probes—The probe shaft and tip shall be constructed
DOI: 10.1520/F0390-11.
2
oftungstencarbide,Monel,hardenedtoolsteel,orhardcopper
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
and have a conical tip with included angle of 45 to 90°.
Standards volume information, refer to the standard’s Document Summary page on
Alternatively, the tip may be formed from a platinum-
the ASTM website.
3
palladiumalloyandresistanceweldedtotheshaft.Thetipshall
Withdrawn. THe last approved version of this historical standard is referenced
on www.astm.org. have a nominal initial radius of 25 to 50 µm. In all cases all of
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
F390 − 11
the four paths from the electrical measurement equipment process, with no further cleaning or preparation. The test
inputs to the film surface must be identical. specimen shall be supported by a substrate consisting of a
5.1.2 Probe Force—Theprobesshallbeuniformlyloadedto suitable insulating material.
exert a f
...

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SCOPE
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5.1 Duplex grain size may occur in some metals and alloys as a result of their thermomechanical processing history. For comparison of mechanical properties with metallurgical features, or for specification purposes, it may be important to be able to characterize grain size in such materials. Assigning an average grain size value to a duplex grain size specimen does not adequately characterize the appearance of that specimen, and may even misrepresent its appearance. For example, averaging two distinctly different grain sizes may result in reporting a size that does not actually exist anywhere in the specimen.  
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Standard Practice for Determining the Inclusion or Second-Phase Constituent Content of Metals by Automatic Image Analysis

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5.1 This practice is used to assess the indigenous inclusions or second-phase constituents of metals using basic stereological procedures performed by automatic image analyzers.  
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5.3 Because the characteristics of the indigenous inclusion population vary within a given lot of material due to the influence of compositional fluctuations, solidification conditions and processing, the lot must be sampled statistically to assess its inclusion content. The largest lot sampled is the heat lot but smaller lots, for example, the product of an ingot, within the heat may be sampled as a separate lot. The sampling of a given lot must be adequate for the lot size and characteristics.  
5.4 The practice is suitable for assessment of the indigenous inclusions in any steel (or other metal) product regardless of its size or shape as long as enough different fields can be measured to obtain reasonable statistical confidence in the data. Because the specifics of the manufacture of the product do influence the morphological characteristics of the inclusions, the report should state the relevant manufacturing details, that is, data regarding the deformation history of the product.  
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SCOPE
1.1 This practice describes a procedure for obtaining stereological measurements that describe basic characteristics of the morphology of indigenous inclusions in steels and other metals using automatic image analysis. The practice can be applied to provide such data for any discrete second phase.  
Note 1: Stereological measurement methods are used in this practice to assess the average characteristics of inclusions or other second-phase particles on a longitudinal plane-of-polish. This information, by itself, does not produce a three-dimensional description of these constituents in space as deformation processes cause rotation and alignment of these constituents in a preferred manner. Development of such information requires measurements on three orthogonal planes and is beyond the scope of this practice.  
1.2 This practice specifically addresses the problem of producing stereological data when the features of the constituents to be measured make attainment of statistically reliable data difficult.  
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SCOPE
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1.3 The precision of this comparative test method is higher than that of other push-rod dilatometry techniques (for example, Test Method D696) and thermomechanical analysis (for example, Test Method E831) but is significantly lower than that of absolute methods such as interferometry (for example, Test Method E289). It is generally applicable to materials having absolute linear expansion coefficients exceeding 0.5 μm/(m·°C) for a 1000 °C range, and under special circumstances can be used for lower expansion materials when special precautions are used to ensure that the produced expansion of the specimen falls within the capabilities of the measuring system. In such cases, a sufficiently long specimen was found to meet the specification.  
1.4 Units—The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Or...

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ASTM
ASTM E975-22(Test Method)
Standard Test Method for X-Ray Determination of Retained Austenite in Steel with Near Random Crystallographic Orientation

SIGNIFICANCE AND USE
2.1 Significance—Retained austenite with a near random crystallographic orientation is found in the microstructure of heat-treated low-alloy, high-strength steels that have medium (0.40 weight %) or higher carbon contents. Although the presence of retained austenite may not be evident in the microstructure, and may not affect the bulk mechanical properties such as hardness of the steel, the transformation of retained austenite to martensite during service can affect the performance of the steel.  
2.2 Use—The measurement of retained austenite can be included in low-alloy steel development programs to determine its effect on mechanical properties. Retained austenite can be measured on a companion specimen or test section that is included in a heat-treated lot of steel as part of a quality control practice. The measurement of retained austenite in steels from service can be included in studies of material performance.
SCOPE
1.1 This test method covers the determination of retained austenite phase in steel using integrated intensities (area under peak above background) of X-ray diffraction peaks using chromium  Kα  or molybdenum Kα  X-radiation.  
1.2 The method applies to carbon and alloy steels with near random crystallographic orientations of both ferrite and austenite phases.  
1.3 This test method is valid for retained austenite contents from 1 % by volume and above.  
1.4 If possible, X-ray diffraction peak interference from other crystalline phases such as carbides should be eliminated from the ferrite and austenite peak intensities.  
1.5 Substantial alloy contents in steel cause some change in peak intensities which have not been considered in this method. Application of this method to steels with total alloy contents exceeding 15 weight % should be done with care. If necessary, the users can calculate the theoretical correction factors to account for changes in volume of the unit cells for austenite and ferrite resulting from variations in chemical composition.  
1.6 Units—The values stated in inch-pound units are to be regarded as standard. The values given in parentheses are mathematical conversions to SI units that are provided for information only and are not considered standard.  
1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.8 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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ASTM
ASTM E96/E96M-22ae1(Test Method)
Standard Test Methods for Gravimetric Determination of Water Vapor Transmission Rate of Materials

SIGNIFICANCE AND USE
5.1 The purpose of these tests is to obtain, by means of simple apparatus, reliable values for water vapor transfer rate through materials, expressed in suitable units.  
5.2 A WVTR value obtained in one method under one set of test conditions is not necessarily indicative of the value that would be obtained using the other method or under a different set of conditions. See Appendix X3 for discussion of determining dependency of WVTR on different relative humidity (at a given temperature).  
5.3 Commonly used test conditions are listed in Appendix X1, but given the caution in 5.2, the selection of test conditions other than those listed, and which closely approach exposure conditions of material in actual use, is allowed. Where tests are conducted for classification or compliance purposes, environmental conditions are typically defined in product standard specifications.
SCOPE
1.1 These test methods cover the determination of water vapor transmission rate (WVTR) of materials, such as, but not limited to, paper, plastic films, other sheet materials, coatings, foams, fiberboards, gypsum and plaster products, wood products, and plastics. Two basic methods, the Desiccant Method and the Water Method, are provided for the measurement of WVTR. In these tests, the desired temperature and side-to-side humidity conditions, with resultant vapor drive through the specimen, are used. The test conditions employed are at the discretion of the user, but in all cases, are reported with the results.  
1.2 The values stated in either Inch-Pound or SI units are to be regarded separately as standard. The values stated in each system are not necessarily exact equivalents; therefore, each system shall be used independently of the other. Derived results are converted from one system to the other using appropriate conversion factors (see Table 1).  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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