ASTM F1396-93(2012)
(Test Method)Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components
Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components
SIGNIFICANCE AND USE
3.1 This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.
1.3 Limitations:
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.
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Designation: F1396 − 93 (Reapproved 2012)
Standard Test Method for
Determination of Oxygen Contribution by Gas Distribution
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System Components
This standard is issued under the fixed designation F1396; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope bility of regulatory limitations prior to use. Specific hazard
statements are given in Section 6.
1.1 This test method covers a procedure for testing compo-
nents for oxygen contribution to ultra-high purity gas distribu-
2. Terminology
tion systems at ambient temperature. In addition, this test
2.1 Definitions:
method allows testing of the component at elevated ambient
temperatures as high as 70°C. 2.1.1 baseline—the instrument response under steady state
conditions.
1.2 This test method applies to in-line components contain-
2.1.2 glove bag—an enclosure that contains a controlled
ing electronics grade materials such as those used in a
atmosphere. A glove box could also be used for this test
semiconductor gas distribution system.
method.
1.3 Limitations:
2.1.3 heat trace— heating of a component, spool piece, or
1.3.1 Thistestmethodislimitedbythesensitivityofcurrent
teststandbyauniformandcompletewrappingoftheitemwith
instrumentation, as well as the response time of the instrumen-
resistant heat tape.
tation. This test method is not intended to be used for test
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components larger than 12.7-mm ( ⁄2-in.) outside diameter
2.1.4 minimum detection limit (MDL) of the instrument—the
nominal size. This test method could be applied to larger lowest instrument response detectable and readable by the
components; however, the stated volumetric flow rate may not
instrument, and at least two times the amplitude of the noise.
provide adequate mixing to ensure a representative sample.
2.1.5 response time—the time required for the system to
Higher flow rates may improve the mixing but excessively
reach steady state after a change in concentration.
dilute the sample.
2.1.6 spool piece—a null component, consisting of a
1.3.2 This test method is written with the assumption that
straightpieceofelectropolishedtubingandappropriatefittings,
the operator understands the use of the apparatus at a level
used in place of the test component to establish the baseline.
equivalent to six months of experience.
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
1.4 The values stated in SI units are to be regarded as the
32°F).
standard. The inch-pound units given in parentheses are for
2.1.8 test component—any device being tested, such as a
information only.
valve, regulator, or filter.
1.5 This standard does not purport to address all of the
2.1.9 test stand—the physical test system used to measure
safety concerns, if any, associated with its use. It is the
impurity levels.
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica- 2.1.10 zero gas—a purified gas that has an impurity concen-
tration below the MDLof the analytical instrument.This gas is
to be used for both instrument calibration and component
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This test method is under the jurisdiction of ASTM Committee F01 on
testing.
Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamina-
tion Control.
2.2 Symbols:
Current edition approved July 1, 2012. Published August 2012. Originally
2.2.1 P —The inlet pressure measured upstream of the
approved in 1992. Last previous edition approved in 2005 as F1396 – 93(2005). 1
DOI: 10.1520/F1396-93R12. purifier and filter in the test apparatus.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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F1396 − 93 (2012)
2.2.2 P —The outlet pressure measured downstream of the shall not be more than 600 mm, so as to minimize the effect
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analyzer in the test apparatus. (adsorption/desorption) of the sample line on the result. The
sample line shall have no more than two mechanical joints.
2.2.3 ppbv—Parts per billion by volume assuming ideal gas
4.1.4 Valves, diaphragm or bellows type, capable of unim-
behavior, equivalent to nmole/mole (such as nL/L). The same
paired operation at 94°C (200°F). The use of all-welded,
as molar parts per billion (ppb).
all-metal valves is preferred.
2.2.4 ppbw—Parts per billion by weight (such as ng/g).
4.2 Instrumentation:
2.2
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