Standard Test Method for Radiologic Examination of Semiconductors and Electronic Components

SCOPE
1.1 This test method provides a standard procedure for nondestructive radiographic examination of semiconductor devices, electronic components, and the materials used for construction of these items. This test method covers the radiographic testing of these items for possible defective conditions such as extraneous material within the sealed case, improper internal connections, voids in materials used for element mounting, or the sealing glass, or physical damage.  
1.2 The quality level and acceptance criteria for the specimens being tested shall be specified in the detail drawing, purchase order or contract.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Historical
Publication Date
31-Dec-1994
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ASTM E1161-95 - Standard Test Method for Radiologic Examination of Semiconductors and Electronic Components
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NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
Designation: E 1161 – 95
Standard Test Method for
Radiologic Examination of Semiconductors and Electronic
Components
This standard is issued under the fixed designation E 1161; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
1.1 This test method provides a standard procedure for 3.1 Definitions—For definitions of terms used in this test
nondestructive radiographic examination of semiconductor method, see Terminology E 1316.
devices, electronic components, and the materials used for
4. Significance and Use
construction of these items. This test method covers the
4.1 This test method is useful for determination of voiding
radiographic testing of these items for possible defective
conditions such as extraneous material within the sealed case, in semiconductor element to header mounting material, glass
seal, and lid seal areas. It is also useful for examination of the
improper internal connections, voids in materials used for
element mounting, or the sealing glass, or physical damage. internal cavities of devices for extraneous material, wire dress,
and bond placement for unattached elements.
1.2 The quality level and acceptance criteria for the speci-
mens being tested shall be specified in the detail drawing,
5. Apparatus
purchase order or contract.
5.1 Radiation Source—Only x-radiation generating equip-
1.3 This standard does not purport to address all of the
ment shall be used. It shall provide the proper quality level and
safety concerns, if any, associated with its use. It is the
film density when used in accordance with this test method.
responsibility of the user of this standard to establish appro-
5.1.1 Focal Spot—The focal spot size shall be such that the
priate safety and health practices and determine the applica-
resolution specified in 8.4 can be achieved.
bility of regulatory limitations prior to use.
5.2 Radiographic Viewer, capable of resolving a flaw of
2. Referenced Documents
0.025 mm at a density of 1.0 to 2.0.
2.1 ASTM Standards: 5.3 Holding Fixtures, capable of holding specimens in the
required positions without interfering with the accuracy or ease
E 94 Guide for Radiographic Testing
E 431 Guide to Interpretation of Radiographs of Semicon- of interpretation.
5.4 Lead-Topped Tables—Perform all semiconductor and
ductors and Related Devices
E 801 Practice for Controlling Quality of Radiographic electronic component radiographic testing on a lead-topped
table. The lead shall be at least 1.5 mm thick.
Examination of Electronic Devices
5.5 Film Holders—Film holders and cassettes shall be light
E 1255 Practice for Radioscopy
E 1316 Terminology for Nondestructive Examinations tight. They may be flexible vinyl, plastic, or other durable
material.
2.2 ASNT Standard:
SNT-TC-1A Personnel Qualification and Certification 5.6 IQI’s, shall be in accordance with Practice E 801.
5.7 Density Measurement Apparatus—Use a densitometer
2.3 Federal Standard:
FED-STD-595 Color (Requirements for Individual Color capable of repeatable measurements within 0.02 density units
and step wedge comparison films.
Chits)
6. Materials
This test method is under the jurisdiction of ASTM Committee E-7 on 6.1 Films—Films used for radiographic testing of semicon-
Nondestructive Testing and is the direct responsibility of Subcommittee E07.01 on
ductors and electronic components must be very fine grain. The
Radiographic Practice and Penetrameters.
grain must be fine enough to permit resolution of discontinui-
Current edition approved Dec. 10, 1995. Published February 1996. Originally
ties that are 0.025 mm.
published as E 1161 – 87. Last previous edition E 1161 – 92.
Annual Book of ASTM Standards, Vol 03.03.
6.2 Non-Film Techniques, When Specified—The use of
Available from the American Society for Nondestructive Testing, 1711 Arlin-
non-film techniques is permitted if agreed upon between
gate Plaza, P.O. Box 28518, Columbus, OH 43228.
4 purchaser and supplier and the equipment is capable of
Available from Standardization Documents Order Desk, Bldg. 4 Section D, 700
Robbins Ave., Philadelphia, PA 19111-5094, Attn: NPODS. producing results of equal quality when compared with film
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
E1161–95
techniques, and all requirements of this test method are with, and shall meet the requirements of, Practice E 801. For
complied with, except those pertaining to the actual film. Types radioscopic images (where allowed) the additional require-
of permanent records using non-film techniques if required are, ments of Practice E 1255 shall be met.
for example, digital magnetic tape or disc, video tape, and
8.4 Film and Marking—Place the radiographic film in a film
photograph of video image.
holder on the lead-topped table. Identify the film using tech-
niques that print the following information, photographically,
7. Calibration
on the radiograph:
7.1 The step wedge comparison films used for densitometer
8.4.1 Marking:
calibration shall be currently calibrated with traceability to the
8.4.1.1 Device manufacturer’s name or code identification
National Institute of Standards and Technology.
number.
8.4.1.2 Device type or part number.
8. Procedure
8.4.1.3 Production lot number or date code or inspection lot
8.1 Select or adjust the X-ray exposure factors, voltage,
number.
milliampere setting, and time settings as necessary to obtain
8.4.1.4 Radiographic film view number and date.
satisfactory exposures and image detail within the sensitivity
requirements for the device or defect features the radiographic
8.4.1.5 Device serial or cross-refer
...

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