EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Ellipsometrie - Grundlagen (ISO 23131:2021)

Dieses Dokument legt ein Verfahren zur Bestimmung optischer und dielektrischer Konstanten im UV VIS NIR Spektralbereich sowie von Schichtdicken im Bereich der at line Fertigungskontrolle, der Qualitätssicherung und der Materialentwicklung durch akkreditierte Prüflaboratorien fest.
Es ist anwendbar für stand alone Messsysteme. Die Darstellung der Ergebnisunsicherheit entspricht dem ISO/IEC Guide 98 3.

Ellipsométrie - Principes (ISO 23131:2021)

Le présent document spécifie une méthode de détermination des constantes optiques et diélectriques dans la gamme spectrale UV-VIS-PIR ainsi que des épaisseurs de couche dans le domaine du contrôle de production sur ligne, de l’assurance qualité et de la mise au point de matériau par des laboratoires d’essai accrédités.
Il s’applique aux systèmes de mesure indépendants. La présentation de l’incertitude des résultats est conforme à l’ISO/IEC Guide 98-3.

Elipsometrija - Načela (ISO 23131:2021)

Ta dokument določa metodo za določanje optičnih in dielektričnih konstant v spektralnem območju UV-VIS-NIR kot tudi debeline plasti na področju sprotne kontrole proizvodnje, zagotavljanja kakovosti in razvoja materialov prek akreditiranih preskusnih laboratorijev.
Uporablja se za samostojne merilne sisteme. Predstavitev negotovosti rezultatov je v skladu z vodilom ISO/IEC 98-3.

General Information

• Status: Published
• Publication Date: 08-Nov-2022
• ICS: 17.020 - Metrology and measurement in general
• Technical Committee: CEN/TC 262 - Metallic and other inorganic coatings
• Drafting Committee: CEN/TC 262/WG 12 - Maintenance and ISO co-ordination
• Current Stage: 6060 - Definitive text made available (DAV) - Publishing
• Start Date: 09-Nov-2022
• Due Date: 07-Jul-2024
• Completion Date: 09-Nov-2022
• Ref Project: SIST EN ISO 23131:2023 - Ellipsometry - Principles (ISO 23131:2021)

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN ISO 23131:2023
01-januar-2023
Elipsometrija - Načela (ISO 23131:2021)
Ellipsometry - Principles (ISO 23131:2021)
Ellipsometrie - Grundlagen (ISO 23131:2021)
Ellipsométrie - Principes (ISO 23131:2021)
Ta slovenski standard je istoveten z: EN ISO 23131:2022
ICS:
17.020 Meroslovje in merjenje na Metrology and measurement
splošno in general
SIST EN ISO 23131:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 23131:2023


EN ISO 23131
EUROPEAN STANDARD

NORME EUROPÉENNE

November 2022
EUROPÄISCHE NORM
ICS 17.020
English Version

Ellipsometry - Principles (ISO 23131:2021)
Ellipsométrie - Principes (ISO 23131:2021) Ellipsometrie - Grundlagen (ISO 23131:2021)
This European Standard was approved by CEN on 30 October 2022.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 23131:2022 E
worldwide for CEN national Members.

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SIST EN ISO 23131:2023
EN ISO 23131:2022 (E)
Contents Page
European foreword . 3

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SIST EN ISO 23131:2023
EN ISO 23131:2022 (E)
European foreword
The text of ISO 23131:2021 has been prepared by Technical Committee ISO/TC 107 "Metallic and other
inorganic coatings” of the International Organization for Standardization (ISO) and has been taken over
as EN ISO 23131:2022 by Technical Committee CEN/TC 262 “Metallic and other inorganic coatings,
including for corrosion protection and corrosion testing of metals and alloys” the secretariat of which is
held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by May 2023, and conflicting national standards shall be
withdrawn at the latest by May 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards body.
A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 23131:2021 has been approved by CEN as EN ISO 23131:2022 without any modification.


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SIST EN ISO 23131:2023
INTERNATIONAL ISO
STANDARD 23131
First edition
2021-04
Ellipsometry — Principles
Ellipsométrie — Principes
Reference number
ISO 23131:2021(E)
©
ISO 2021

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ISO 23131:2021(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2021
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