IEC TR 62632:2013
(Main)Nanoscale electrical contacts and interconnects
Nanoscale electrical contacts and interconnects
IEC/TR 62632:2013(E), which is a technical report, describes a variety of nanoscale contacts and nano-interconnects used in research and development and in present-day products. The intent of this technical report is to identify nanoscale contacts and nano-interconnects that will be common in products, to describe the state-of-the-art and to describe some key features and issues related to these contacts. In particular, the following aspects are discussed for each of the nanoscale contacts or nano-interconnects listed:
- type and configuration of the nanoscale contacts and interconnects formed;
- requirements of the nanoscale contacts and interconnects in products;
- fabrication technologies, processes, and process controls used to make the nanoscale contacts and interconnects;
- characterization techniques used to quantify nanoscale contacts and nano-interconnects;
- functionality and performance of nanoscale contacts and interconnects;
- reliability of the nanoscale contacts and interconnects in products;
- and expectations of when the product and the associated nanoscale contacts will reach the market. This technical report points out the positive and negative characteristics of the nanoscale contacts and interconnects in each technology or nanomaterial discussed. This information may be helpful to product designers and researchers in their efforts to bring other nano-enabled products to the market. Recommendations for the formation and use of nanoscale contacts and interconnects are also indicated. Key words: nanotechnology, nanocontact, nano-contact
General Information
Standards Content (Sample)
IEC/TR 62632 ®
Edition 1.0 2013-09
TECHNICAL
REPORT
Nanoscale electrical contacts and interconnects
IEC/TR 62632:2013(E)
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester.
If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication,
please contact the address below or your local IEC member National Committee for further information.
IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé Fax: +41 22 919 03 00
CH-1211 Geneva 20 info@iec.ch
Switzerland www.iec.ch
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.
About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigenda or an amendment might have been published.
Useful links:
IEC publications search - www.iec.ch/searchpub Electropedia - www.electropedia.org
The advanced search enables you to find IEC publications The world's leading online dictionary of electronic and
by a variety of criteria (reference number, text, technical electrical terms containing more than 30 000 terms and
committee,…). definitions in English and French, with equivalent terms in
It also gives information on projects, replaced and additional languages. Also known as the International
withdrawn publications. Electrotechnical Vocabulary (IEV) on-line.
IEC Just Published - webstore.iec.ch/justpublished Customer Service Centre - webstore.iec.ch/csc
Stay up to date on all new IEC publications. Just Published If you wish to give us your feedback on this publication
details all new publications released. Available on-line and or need further assistance, please contact the
also once a month by email. Customer Service Centre: csc@iec.ch.
IEC/TR 62632 ®
Edition 1.0 2013-09
TECHNICAL
REPORT
Nanoscale electrical contacts and interconnects
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
PRICE CODE
W
ICS 07.030 ISBN 978-2-8322-1113-7
– 2 – TR 62632 © IEC:2013(E)
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 9
2 Normative references . 9
3 Terms and definitions . 9
4 Framework of the technical report: . 10
5 Analysis of state-of-the-art nanoscale contacts and nano-interconnect
technologies . 12
5.1 Nanotubes and nanowires . 12
5.1.1 Type and configuration of the nanoscale contacts formed . 12
5.1.2 Requirements of the nanoscale contacts in products. 12
5.1.3 Fabrication technologies, processes, and process controls
used to make the nanoscale contacts . 13
5.1.4 Characterization techniques used to quantify a nanoscale
contact . 14
5.1.5 Functionality and performance of the nanoscale contacts . 14
5.1.6 Reliability of the nanoscale contacts in the product . 17
5.1.7 Expectations of when the product and the associated
nanoscale contacts will reach the market . 17
5.2 Via interconnects using CNTs and CNFs . 17
5.2.1 Type and configuration of the nanoscale interconnects formed . 17
5.2.2 Requirements of the nanoscale interconnects in products . 17
5.2.3 Fabrication technologies, processes, and process controls
used to make the nanoscale interconnects . 17
5.2.4 Characterization techniques used to quantify a nanoscale
interconnect . 18
5.2.5 Functionality and performance of the nanoscale interconnects . 18
5.2.6 Reliability of the nanoscale interconnects in the product . 19
5.2.7 Expectations of when the product and the associated
nanoscale contacts will reach the market . 19
5.3 Surface (lateral) interconnects using CNTs and CNFs . 19
5.3.1 Type and configuration of the nanoscale interconnects formed . 19
5.3.2 Requirements of nanoscale interconnects in products . 20
5.3.3 Fabrication technologies, processes, and process controls
used to make the nanoscale interconnects . 20
5.3.4 Characterization techniques used to quantify a nanoscale
interconnects . 20
5.3.5 Functionality and performance of the nanoscale interconnects . 20
5.3.6 Reliability of the nanoscale interconnects in the product . 22
5.3.7 Expectations of when the product and the associated
nanoscale contacts will reach the market . 22
5.4 Graphene . 22
5.4.1 General . 22
5.4.2 Type and configuration of the nanoscale contacts formed: . 23
5.4.3 Requirements of the nanoscale contacts in the products: . 24
5.4.4 Fabrication technologies, processes, and process controls
used to make the nanoscale contacts: . 24
5.4.5 Characterization techniques used to quantify a nanoscale
contact . 27
TR 62632 © IEC:2013(E) – 3 –
5.4.6 Functionality and performance of the nanoscale contacts . 27
5.4.7 Reliability of the nanoscale contacts in the product . 27
5.4.8 Expectations of when the product and the associated
nanoscale contacts will reach the market . 28
5.5 Organic devices . 29
5.6 Nanoscale contacts to GaAs – Functionality and performance . 29
5.7 Magnetic nanoscale contacts . 29
5.7.1 Type and configuration of the nanoscale contacts formed . 29
5.7.2 Fabrication technologies, processes, and process controls
used to make the nanoscale contacts . 30
6 Standardization needs to support commercialisation . 30
7 Summary . 31
Bibliography . 34
– 4 – TR 62632 © IEC:2013(E)
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOSCALE ELECTRICAL CONTACTS AND INTERCONNECTS
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
The main task of IEC technical committees is to prepare International Standards. However, a
technical committee may propose the publication of a technical report when it has collected
data of a different kind from that which is normally published as an International Standard, for
example "state of the art".
IEC 62632, which is a technical report, has been prepared by IEC technical committee 113:
Nanotechnology standardization for electrical and electronic products and systems.
The text of this technical report is based on the following documents:
Enquiry draft Report on voting
113/135/DTR 113/167/RVC
Full information on the voting for the approval of this technical report can be found in the
report on voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
TR 62632 © IEC:2013(E) – 5 –
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.
– 6 – TR 62632 © IEC:2013(E)
INTRODUCTION
The purpose of this technical report is to assess the current status of nanoscale contacts and
interconnects, and to provide a basis for establishing international standards with the goal of
accelerating innovation in nano-electrotechnology.
Nanoscale contacts and interconnects are expected to constitute challenges for many
applications of nano-electrotechnology. The commercial success of many nanoscale
electrotechnical subassemblies for electrical, optical, and magnetic products and systems will
require contacts or connections to micro- and macroscale devices and systems. Present
instrumentation used to characterize and view nanoscale contacts in three dimensions is not
adequate for accelerating innovation and therefore commercialization. The standards and
measurement methods associated with such instrumentation, and the theories used to
interpret measurement results make it difficult to assess performance, reliability, and
durability of subassemblies with enhanced functionalities based on nano-electrotechnology.
Nano-electrotechnology stakeholders tend to prefer those standards for nanoscale contacts
that are technology- and material-neutral. Promoting standards that are too nano-
electromaterial- and process-specific may impede creativity and innovation. Those
developing nano-electrotechnology standards will face
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.