ISO 13084:2018

Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Étalonnage de l'échelle de masse pour un spectromètre de masse des ions secondaires à temps de vol

General Information

• Status: Published
• Publication Date: 14-Nov-2018
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 6 - Secondary ion mass spectrometry
• Drafting Committee: ISO/TC 201/SC 6/WG 4 - Organic and Nano SIMS
• Current Stage: 9060 - Close of review
• Start Date: 04-Jun-2029

Relations

• Revises: ISO 13084:2011 - Surface chemical analysis — Secondary-ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer
• Effective Date: 28-Jan-2017

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 13084
Second edition
2018-11
Surface chemical analysis —
Secondary ion mass spectrometry
— Calibration of the mass scale for
a time-of-flight secondary ion mass
spectrometer
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Étalonnage de l'échelle de masse pour un spectromètre
de masse des ions secondaires à temps de vol
Reference number
ISO 13084:2018(E)
©
ISO 2018

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ISO 13084:2018(E)

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ii © ISO 2018 – All rights reserved

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ISO 13084:2018(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 1
4.1 Symbols . 1
4.2 Abbreviated terms . 2
5 Outline of method . 2
6 Method for improving mass accuracy . 3
6.1 Obtaining the reference sample for optimization . 3
6.2 Preparation of polycarbonate sample . 4
6.3 Obtaining the SIMS spectral data . 4
6.4 Calculating mass accuracy . 5
6.5 Optimizing instrumental parameters . 7
6.6 Calibration procedure . 9
Annex A (informative) Calibration uncertainty .11
Annex B (informative) Internal addition method .13
Bibliography .
...