ISO 18114:2003

Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Détermination des facteurs de sensibilité relative à l'aide de matériaux de référence à ions implantés

General Information

• Status: Withdrawn
• Publication Date: 13-Apr-2003
• Withdrawal Date: 13-Apr-2003
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 6 - Secondary ion mass spectrometry
• Drafting Committee: ISO/TC 201/SC 6 - Secondary ion mass spectrometry
• Current Stage: 9599 - Withdrawal of International Standard
• Completion Date: 11-May-2021

Relations

• Revised: ISO 18114:2021 - Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
• Effective Date: 23-Apr-2020
• Consolidated By: ISO 105-C06:2010 - Textiles — Tests for colour fastness — Part C06: Colour fastness to domestic and commercial laundering
• Effective Date: 06-Jun-2022

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 18114
First edition
2003-04-01

Surface chemical analysis —
Secondary-ion mass spectrometry —
Determination of relative sensitivity
factors from ion-implanted reference
materials
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Détermination des facteurs de sensibilité relative à
l'aide de matériaux de référence à ions implantés




Reference number
ISO 18114:2003(E)
©
ISO 2003

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ISO 18114:2003(E)
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©  ISO 2003
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ii © ISO 2003 — All rights reserved

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ISO 18114:2003(E)
Contents Page
Foreword .iv
Introduction.v
1 Scope.1
2 Normative references.1
3 Terms and definitions .1
4 Symbols and abbreviated terms.1
5 Principle .2
6 Apparatus.2
7 Ion-implanted reference materials.2
8 Procedure.2
9 Test report.3
Bibliography.4

© ISO 2003 — All rights reserved iii

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ISO 18114:2003(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 18114 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee
SC 6, Secondary ion mass spectrometry.
iv © ISO 2003 — All rights reserved

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ISO 18114:2003(E)
Introduction
Ion-implanted materials are commonly used in secondary-ion mass spectrometry for the calibration of
instruments. This international Standard was prepared to provide a uniform method for determining the
relative sensitivity factor of an element in a specified matrix from an ion-implanted reference material, and to
show how the concentration of the element in a different sample of the same matrix material can be
determined.

© ISO 2003 — All rights reserved v

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INTERNATIONAL STANDA
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