SIST EN ISO 10692-1:2002
(Main)Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections (ISO 10692-1:2001)
Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections (ISO 10692-1:2001)
Selection of valve outlets for cylinders specific to pure gases for special applications.
Ortsbewegliche Gasflaschen - Ventilanschlüsse für die Anwendung in der Mikroelektronik - Teil 1: Seitenanschlüsse (ISO 10692-1:2001)
Anwendungsbereich
Dieser Teil von ISO 10692 gilt für Seitenanschlüsse von Gasflaschenventilen für Gase und Gasgemische
im Hinblick auf besondere Anforderungen an den höchsten Reinheitsgrad und die grö ß te Partikelfreiheit
bei der Herstellung von Komponenten für die Mikroelektronik oder ähnlichen Anwendungen.
Bouteilles a gaz - Raccords pour robinets de bouteilles a gaz pour l'industrie de la microélectronique - Partie 1: Raccords de sortie (ISO 10692-1:2001)
La présente partie de l'ISO 10692 s'applique aux raccords de sortie des robinets de bouteilles à gaz pour gaz et mélanges de gaz et traite des exigences particulières à appliquer lorsqu'une propreté et une absence de particules maximales sont exigées dans le cadre de la fabrication des composants microélectroniques ou applications similaires.
Plinske jeklenke - Priključki ventila plinskih jeklenk za uporabo v mikroelektroniki - 1. del: Zunanji priključki (ISO 10692-1:2001)
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 10692-1:2002
01-maj-2002
3OLQVNHMHNOHQNH3ULNOMXþNLYHQWLODSOLQVNLKMHNOHQN]DXSRUDERYPLNURHOHNWURQLNL
GHO =XQDQMLSULNOMXþNL ,62
Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry -
Part 1: Outlet connections (ISO 10692-1:2001)
Ortsbewegliche Gasflaschen - Ventilanschlüsse für die Anwendung in der
Mikroelektronik - Teil 1: Seitenanschlüsse (ISO 10692-1:2001)
Bouteilles a gaz - Raccords pour robinets de bouteilles a gaz pour l'industrie de la
microélectronique - Partie 1: Raccords de sortie (ISO 10692-1:2001)
Ta slovenski standard je istoveten z: EN ISO 10692-1:2001
ICS:
23.020.30 7ODþQHSRVRGHSOLQVNH Pressure vessels, gas
MHNOHQNH cylinders
SIST EN ISO 10692-1:2002 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 10692-1:2002
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SIST EN ISO 10692-1:2002
EUROPEAN STANDARD
EN ISO 10692-1
NORME EUROPÉENNE
EUROPÄISCHE NORM
August 2001
ICS 23.020.30
English version
Gas cylinders - Gas cylinder valve connections for use in the
microelectronics industry - Part 1: Outlet connections (ISO
10692-1:2001)
Bouteilles à gaz - Raccords pour robinets de bouteilles à Ortsbewegliche Gasflaschen - Ventilanschlüsse für die
gaz pour l'industrie de la microélectronique - Partie 1: Anwendung in der Mikroelektonik - Teil 1: Seitenanschlüsse
Raccords de sortie (ISO 10692-1:2001) (ISO 10692-1:2001)
This European Standard was approved by CEN on 16 June 2001.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the Management Centre has the same status as the official
versions.
CEN members are the national standards bodies of Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece,
Iceland, Ireland, Italy, Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36 B-1050 Brussels
© 2001 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 10692-1:2001 E
worldwide for CEN national Members.
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SIST EN ISO 10692-1:2002
EN ISO 10692-1:2001 (E)
CORRECTED 2001-09-19
Foreword
The text of the International Standard ISO 10692-1:2001 has been prepared by Technical
Committee ISO/TC 58 "Gas cylinders" in collaboration with Technical Committee CEN/TC 23
"Transportable gas cylinders", the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication
of an identical text or by endorsement, at the latest by February 2002, and conflicting national
standards shall be withdrawn at the latest by February 2002.
According to the CEN/CENELEC Internal Regulations, the national standards organizations of
the following countries are bound to implement this European Standard: Austria, Belgium,
Czech Republic, Denmark, Finland, France, Germany, Greece, Iceland, Ireland, Italy,
Luxembourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland and the United
Kingdom.
Endorsement notice
The text of the International Standard ISO 10692-1:2001 was approved by CEN as a
European Standard without any modification.
NOTE: Normative references to International Standards are listed in annex ZA (normative).
2
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SIST EN ISO 10692-1:2002
EN ISO 10692-1:2001 (E)
Annex ZA (normative)
Normative references to international publications
with their relevant European publications
This European Standard incorporates by dated or undated reference, provisions from other
publications. These normative references are cited at the appropriate places in the text and the
publications are listed hereafter. For dated references, subsequent amendments to or revisions
of any of these publications apply to this European Standard only when incorporated in it by
amendment or revision. For undated references the latest edition of the publication referred to
applies (including amendments).
NOTE Where an International Publication has been modified by common modifications,
indicated by (mod.), the relevant EN/HD applies.
Publication Year Title EN/HD Year
ISO 6506-1 1999 Metallic materials - Brinell hardness test EN ISO 6506-1 1999
- Part 1: Test method
ISO 11114-1 1997 Transportable gas cylinders - EN ISO 11114-1 1997
Compatibility of cylinder and valve
materials with gas contents - Part 1:
Metallic materials
3
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SIST EN ISO 10692-1:2002
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SIST EN ISO 10692-1:2002
INTERNATIONAL ISO
STANDARD 10692-1
First edition
2001-08-15
Gas cylinders — Gas cylinder valve
connections for use in the micro-electronics
industry —
Part 1:
Outlet connections
Bouteilles à gaz — Raccords pour robinets de bouteilles à gaz pour
l'industrie de la microélectronique —
Partie 1: Raccords de sortie
Reference number
ISO 10692-1:2001(E)
©
ISO 2001
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SIST EN ISO 10692-1:2002
ISO 10692-1:2001(E)
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ii © ISO 2001 – All rights reserved
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SIST EN ISO 10692-1:2002
ISO 10692-1:2001(E)
Contents Page
Foreword.iv
1 Scope .1
2 Normative references .1
3 General requirements.1
4 General design.2
5 Dimensions.2
6 630 and 640 series connections.2
7 710 and 720 series connections.6
8 Components common to both series .10
9 Thread profile.12
10 Allocation of outlet to single gases listed in annex A .12
11 Allocation of other gases and of gas mixtures to outlets .13
Annex A (normative) Mandatory outlet allocations for selected single gases.14
Annex B (informative) Examples showing how to use the information given in clauses 10 and 11.16
Bibliography.17
© ISO 2001 – All rights reserved iii
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SIST EN ISO 10692-1:2002
ISO 10692-1:2001(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO
member bodies). The work of preparing International Standards is normally carried out through ISO technical
committees. Each member body interested in a subject for which a technical committee has been established has
the right to be represented on that committee. International organizations, governmental and non-governmental, in
liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical
Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3.
Draft International Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this part of ISO 10692 may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights.
International Standard ISO 10692-1 was prepared by Technical Committee ISO/TC 58, Gas cylinders,
Subcommittee SC 2, Cylinder fittings.
ISO 10692 consists of the following parts, under the general title Gas cylinders — Gas cylinder valve connections
for use in the micro-electronics industry:
— Part 1: Outlet connections
— Part 2: Specification and type testing for valve to cylinder connections
Annex A forms a normative part of this part of ISO 10692. Annex B is for information only.
iv © ISO 2001 – All rights reserved
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SIST EN ISO 10692-1:2002
INTERNATIONAL STANDARD ISO 10692-1:2001(E)
Gas cylinders — Gas cylinder valve connections for use in the
micro-electronics industry —
Part 1:
Outlet connections
1 Scope
This part of ISO 10692 applies to the outlet connections of gas cylinder valves for gases and gas mixtures and
concerns special requirements where the highest levels of cleanliness and freedom from particles are demanded
for the manufacture of microelectronic components or similar applications.
2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of
this part of ISO 10692. For dated references, subsequent amendments to, or revisions of, any of these publications
do not apply. However, parties to agreements based on this part of ISO 10692 are encouraged to investigate the
possibility of applying the most recent editions of the normative documents indicated below. For undated
references, the latest edition of the normative document referred to applies. Members of ISO and IEC maintain
registers of currently valid International Standards.
ISO 68-2, ISO general-purpose screw threads — Basic profile — Part 2: Inch screw threads.
ISO 6506-1, Metallic materials — Brinell hardness test — Part 1: Test method.
ISO 10156, Gases and gas mixtures — Determination of fire potential and oxidizing ability for the selection of
cylinder valve outlets.
ISO 10297, Gas cylinders — Refillable gas cylinder valves — Specification and type testing.
ISO 10298, Determination of toxicity of a gas or gas mixture.
ISO 11114-1, Transportable gas cylinders — Compatibility of cylinder and valve materials with gas contents —
Part 1: Metallic materials.
3 General requirements
3.1 Materials
The following materials and specifications are recommended:
� For valve and nipple: AISI 316L, microfinished, hardness at least 130 HBW in accordance with ISO 6506-1;
� For the union nut: AISI 304, threading silver plated.
Other materials and values may be chosen if they give at least equivalent performance in terms of yield stress and
resistance to corrosion (see ISO 11114-1).
© ISO 2001 – All rights reserved 1
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SIST EN ISO 10692-1:2002
ISO 10692-1:2001(E)
3.2 Operation
�7 �1
For these connections the outboard leak rate shall not exceed a value of 1 � 10 mbar�l�s at 137 bar helium
when the connection is tightened to 50 N�m.
�9 �1
When this outboard leak rate is obtained, an inboard helium leak rate shall be no greater than 1 � 10 mbar�l�s .
The gasket shall be an unused recessed flat, uncoated gasket of Ni 200, fully annealed with the requirements of
8.1. Its hardness shall be HBW 2,5/62,5: 80 to 100 HBW (in accordance with ISO 6506-1) with a surface finish
� 0,8µm turned in the sealing area. Gaskets of other materials, e.g. polymers, may be used if they do not
compromise the leak integrity of the connection and are compatible with the duty. These gaskets shall be used at a
torque appropriate for the material.
NOTE Conditions of use may cause significant differences in both the inboard and outboard leak rates, e.g. nickel gaskets
should be used only once.
3.3 Marking
The valves shall be marked with the requirements listed in ISO 10297, as far as appropriate. In addition to all the
required valve marking the letters "nnn", where nnn is the outlet number, shall be marked.
4 General design
Figure 1 shows the connection in the assembled state (view from the top). The nipple tip has two notches to
facilitate the removal of the gasket.
A pair of keys on the nipple and of the corresponding key ways on the valve prevent rotation of the parts during
assembly. The keys shall be opposite to each other and vertically oriented. The antirotational device shall always
be in place. The nut shall not engage on the outlet thread until the antirotational pins fitted to the plug are engaged
in the slots on the valve outlet. An alternative way to design the antirotational device of the nipple is described in
8.3.
The union nut shall have two venting holes opposite to each other.
5 Dimensions
Dimensions for the outlet connections are given in Figures 2 to 9. Only dimensions explicitly given there are
mandatory. Others shall be chosen as appropriate. All dimensions are in millimetres. The thread definition is given
in clause 9.
The diameters d , d , d and d are not dimensioned in the figures because they assume different values for each
A B M N
connection. They are chosen in such a way that combinations other than the intended ones are impossible. The
diameters d and d on the valve outlet as well as d and d on the nipple shall be con
...
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