SIST EN 62415:2010

Semiconductor devices - Constant current electromigration test (IEC 62415:2010)

This standard describes a method for conventional constant current electromigration testing of
metal lines, via string and contacts.

Halbleiterbauelemente - Konstantstrom-Prüfverfahren zur Elektromigration (IEC 62415:2010)

Dispositifs à semiconducteurs - Essai d'électromigration en courant constant (CEI 62415:2010)

La CEI 62415:2010 décrit une méthode pour des essais conventionnels d'électromigration en courant constant de lignes métalliques, de chaînes de trous de liaison et de contacts de trous de liaison.

Polprevodniški elementi - Preskušanje elektromigracije s konstantnim tokom (IEC 62415:2010)

Ta standard opisuje metodo za konvencionalno preskušanje kovinskih vodov s konstantnim tokom preko vrvice in stikov.

General Information

• Status: Published
• Publication Date: 12-Jul-2010
• ICS: 31.080.01 - Semiconductor devices in general
• Technical Committee: I11 - Imaginarni 11
• Current Stage: 6060 - National Implementation/Publication (Adopted Project)
• Start Date: 28-Jun-2010
• Due Date: 02-Sep-2010
• Completion Date: 13-Jul-2010
• Ref Project: EN 62415:2010 - Semiconductor devices - Constant current electromigration test

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN 62415:2010
01-september-2010
Polprevodniški elementi - Preskušanje elektromigracije s konstantnim tokom (IEC
62415:2010)
Semiconductor devices - Constant current electromigration test (IEC 62415:2010)
Halbleiterbauelemente - Konstantstrom-Prüfverfahren zur Elektromigration (IEC
62415:2010)
Dispositifs à semiconducteurs - Essai d'électromigration en courant constant (CEI
62415:2010)
Ta slovenski standard je istoveten z: EN 62415:2010
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 62415:2010 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------

SIST EN 62415:2010

---------------------- Page: 2 ----------------------

SIST EN 62415:2010

EUROPEAN STANDARD
EN 62415

NORME EUROPÉENNE
June 2010
EUROPÄISCHE NORM

ICS 31.080


English version


Semiconductor devices -
Constant current electromigration test
(IEC 62415:2010)


Dispositifs à semiconducteurs -  Halbleiterbauelemente -
Essai d'électromigration en courant Konstantstrom-Prüfverfahren
constant zur Elektromigration
(CEI 62415:2010) (IEC 62415:2010)




This European Standard was approved by CENELEC on 2010-06-01. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Management Centre: Avenue Marnix 17, B - 1000 Brussels


© 2010 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 62415:2010 E

---------------------- Page: 3 ----------------------

SIST EN 62415:2010
EN 62415:2010 - 2 -
Foreword
The text of document 47/2044/FDIS, future edition 1 of IEC 62415, prepared by IEC TC 47,
Semiconductor devices, was submitted to the IEC-CENELEC parallel vote and was approved by
CENELEC as EN 62415 on 2010-06-01.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN and CENELEC shall not be held responsible for identifying any or all such patent
rights.
The following dates were fixed:
– latest date by which the EN has to be implemented
at national level by publication of an identical
(dop) 2011-03-01
national standard or by endorsement
– latest date by which the national standards conflicting
(dow) 2013-06-01
with the EN have to be withdrawn
__________
Endorsement notice
The text of the International Standard IEC 62415:2010 was approved by CENELEC as a European
Standard without any modification.
__________

---------------------- Page: 4 ----------------------

SIST EN 62415:2010
IEC 62415
®
Edition 1.0 2010-05
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE


Semiconductor devices – Constant current electromigration test

Dispositifs à semiconducteurs – Essai d’électromigration en courant constant

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
L
CODE PRIX
ICS 31.080 ISBN 978-2-88910-949-4
® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale

---------------------- Page: 5 ----------------------

SIST EN 62415:2010
– 2 – 62415 © IEC:2010
CONTENTS
FOREWORD.3
1 Scope.5
2 Symbols, terms and definitions .5
2.1 Symbols .5
2.2 Terms and definitions .5
3 Background .6
4 Sample size.6
5 Test structures .6
5.1 Lines .6
5.2 Via chains .7
5.3 Contact chains .7
6 Test conditions .7
7 Failure criteria .8
8 Data analysis.8
Bibliography.11

Figure 1 – TEG of electromigration evaluation for metal line .6
Figure 2 – TEG of electromigration evaluation for vias .7
Figure 3 – Graph fitted lognormal distribution .8
Figure 4 – Estimate procedure of current density exponent.9
Figure 5 – Estimation procedure of activation energy.10

---------------------- Page: 6 ----------------------

SIST EN 62415:2010
62415 © IEC:2010 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________

SEMICONDUCTOR DEVICES –
CONSTANT CURRENT ELECTROMIGRATION TEST


FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62415 has been prepared by IEC technical committee 47:
Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47/2044/FDIS 47/2054/RVD

Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

---------------------- Page: 7 ----------------------

SIST EN 62415:2010
– 4 – 62415 © IEC:2010
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this dat
...