Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

SIGNIFICANCE AND USE
Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and publications.
Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports, and include the specific parameters applicable to each spectrum in the figure caption.
SCOPE
1.1 Auger and x-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.  
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Publication Date
31-Oct-2004
Current Stage
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ASTM E996-04 - Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E996–04
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
1
Photoelectron Spectroscopy
This standard is issued under the fixed designation E996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 4. Summary of Practice
1.1 Auger and x-ray photoelectron spectra are obtained 4.1 Report all experimental conditions that affectAuger and
using a variety of excitation methods, analyzers, signal pro- x-ray photoelectron spectra so spectra can be reproduced in
cessing, and digitizing techniques. other laboratories or be compared with other spectra.
1.2 This practice lists the desirable information that shall be
5. Significance and Use
reported to fully describe the experimental conditions, speci-
5.1 Includetheexperimentalconditionsunderwhichspectra
men conditions, data recording procedures, and data transfor-
mation processes. are taken in the “Experiment” section of all reports and
publications.
1.3 This standard does not purport to address all of the
safety concerns, if any, associated with its use. It is the 5.2 Identify any parameters that are changed between dif-
ferent spectra in the “Experiment” section of publications and
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica- reports, and include the specific parameters applicable to each
spectrum in the figure caption.
bility of regulatory limitations prior to use.
2. Referenced Documents 6. Information To Be Reported
2
6.1 Equipment Used:
2.1 ASTM Standards:
E673 Terminology Relating to Surface Analysis 6.1.1 If a commercial electron spectroscopy system is used,
specify the manufacturer and model. Indicate the type of
E902 PracticeforCheckingtheOperatingCharacteristicsof
X-Ray Photoelectron Spectrometers electron excitation source and electron analyzer as well as the
E983 Guide for Minimizing Unwanted Electron Beam Ef- model designation of other equipment used for generating the
experimental data, such as a sputter ion source.
fects in Auger Electron Spectroscopy
E995 Guide for Background Subtraction Techniques in 6.1.2 If a spectrometer system has been assembled from
several components specify the manufacturers and model
Auger Electron Spectroscopy and X-ray Photoelectron
Spectroscopy numbers of excitation source, analyzer, and auxiliary equip-
ment.
E1078 Guide for Specimen Preparation and Mounting in
Surface Analysis 6.1.3 Identify the model name, version number, and manu-
facturer of software packages used to acquire or process the
E1127 Guide for Depth Profiling in Auger Electron Spec-
troscopy data.
6.2 Specimen Analyzed:
3. Terminology
6.2.1 Describe the specimen as completely as possible, for
3.1 Definitions—For definitions of terms used in this guide, example, its bulk composition, history, any methods of clean-
refer to Terminology E673. ing or sectioning pre-analysis treatments, and dimensions.
6.2.2 Describe the method of mounting and positioning the
specimen for analysis, for example, mounted on a carousel, or
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface mounted between strips of a particular metal. If the specimen
Analysis and is the direct responsibility of Subcommittee E42.03 onAuger Electron
is heated, cooled or treated in the spectrometer system,
Spectroscopy and X-Ray Photoelectron Spectroscopy.
describe the method used (for example, heated by electron
Current edition approved Nov. 1, 2004. Published December 2004. Originally
bombardment on the back of the specimen, or resistively
approved in 1984. Last previous edition approved in 1999 as E996 – 94 (1999).
DOI: 10.1520/E0996-04.
heated). See Guide E1078 for more detail.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
6.2.3 State the operating pressure of the vacuum system
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
during data acquisition and the position of the vacuum gage
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. relativetothespecimenbeinganalyzed.Stateifthesystemwas
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

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E996–04
backfilled with a sputter gas. Indicate the presence of active channel detector, give the number of channels in the spectrum
gases if they are appropriate to the measurement. If the system covered by the width of the detector.
(and specimen) was baked-out before analysis, the time,
6
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