ASTM F1397-93(2012)
(Test Method)Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components
Standard Test Method for Determination of Moisture Contribution by Gas Distribution System Components
SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.
1.3 Limitations:
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.
General Information
Relations
Standards Content (Sample)
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1397 − 93 (Reapproved 2012)
Standard Test Method for
Determination of Moisture Contribution by Gas Distribution
1
System Components
This standard is issued under the fixed designation F1397; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope bility of regulatory limitations prior to use. Specific hazard
statements are given in Section 5.
1.1 This test method covers testing components for total
moisture contribution to a gas distribution system at ambient
2. Terminology
temperature. In addition, the test method allows testing at
elevated ambient temperatures as high as 70°C and of the
2.1 Definitions:
component moisture capacity and recovery.
2.1.1 baseline—the instrument response under steady state
1.2 This test method applies to in-line components contain-
conditions.
ing electronics grade materials such as those used in semicon-
2.1.2 glove bag—an enclosure that contains a controlled
ductor gas distribution systems.
atmosphere. A glove box could also be used for this test
1.3 Limitations:
method.
1.3.1 Thistestmethodislimitedbythesensitivityofcurrent
2.1.3 heat trace— heating of a component, spool piece, or
instrumentation, as well as by the response time of the
teststandbyauniformandcompletewrappingoftheitemwith
instrumentation.This test method is not intended to be used for
1
resistant heat tape.
test components larger than 12.7-mm ( ⁄2-in.) outside diameter
nominal size. This test method could be applied to larger
2.1.4 minimum detection limit (MDL) of the instrument—the
components; however, the stated volumetric flow rate may not
lowest instrument response detectable and readable by the
provide adequate mixing to ensure a representative sample.
instrument and at least two times the amplitude of the noise.
Higher flow rates may improve the mixing but excessively
2.1.5 response time—the time required for the system to
dilute the sample.
reach steady state after a change in concentration.
1.3.2 This test method is written with the assumption that
the operator understands the use of the apparatus at a level
2.1.6 spool piece—a null component, consisting of a
equivalent to six months of experience.
straightpieceofelectropolishedtubingandappropriatefittings,
1.4 The values stated in SI units are to be regarded as the
used in place of the test component to establish the baseline.
standard. The inch-pound units given in parentheses are for
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
information only.
32°F).
1.5 This standard does not purport to address all of the
2.1.8 test component—any device being tested, such as a
safety concerns, if any, associated with its use. It is the
valve, regulator, or filter.
responsibility of the user of this standard to establish appro-
priate safety and health practices and determine the applica-
2.1.9 test stand—the physical test system used to measure
impurity levels.
1
This test method is under the jurisdiction of ASTM Committee F01 on
2.1.10 V-1, V-2—inlet and outlet valves of bypass loop,
Electronics and is the direct responsibility of Subcommittee F01.10 on Contamina-
respectively.
tion Control.
Current edition approved July 1, 2012. Published August 2012. Originally
2.1.11 V-3, V-4—inlet and outlet valves of test loop, respec-
approved in 1992. Last previous edition approved in 2005 as F1397 – 93(2005).
DOI: 10.1520/F1397-93R12. tively.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1397 − 93 (2012)
2.1.12 zero gas—a purified gas that has an impurity 4.1.3.1 Components With Stub Ends—Use compression fit-
concentration below the MDL of the analytical instrument. tings with nylon or teflon ferrules to connect the spool piece
This gas is to be used for both instrument calibration and and test component to the test loop. Keep the purged glove bag
component testing. around each component for the duration of the test. In the case
of long pieces of electropolished tubing, use two glove bags,
2.2 Abbreviations:
one at each end.
2.2.1 MFC—mass flow controller.
4.1.4 Valves, must be diaphragm or bellows type and ca-
2.2.2 ppbv—parts per billion by volume assuming ideal gas
pable of unimpaired operation at 94°C (200°F). The use of
behavior, equivalent to nmole/mole (such as nL/L). The same
all-w
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.