ASTM E766-14e1

Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope

SIGNIFICANCE AND USE
4.1 Proper use of this practice can yield calibrated magnifications with precision of 5 % or better within a magnification range of from 10 to 50 000X.  
4.2 The use of calibration specimens traceable to international/national standards, such as NIST-SRM 484, with this practice will yield magnifications accurate to better than 5 % over the calibrated range of operating conditions.  
4.3 The accuracy of the calibrated magnifications, or dimensional measurements, will be poorer than the accuracy of the calibration specimen used with this practice.  
4.4 For accuracy approaching that of the calibration specimen this practice must be applied with the identical operating conditions (accelerating voltage, working distance and magnification) used to image the specimens of interest.  
4.5 It is incumbent upon each facility using this practice to define the standard range of magnification and operating conditions as well as the desired accuracy for which this practice will be applied. The standard operating conditions must include those parameters which the operator can control including: accelerating voltage, working distance, magnification, and imaging mode.
SCOPE
1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The relationship between true magnification and indicated magnification is a complicated function of operating conditions.2 Therefore, this practice must be applied to each set of standard operating conditions to be used.  
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 31-Dec-2013
• ICS: 37.020 - Optical equipment
• Technical Committee: E04 - Metallography
• Drafting Committee: E04.11 - X-Ray and Electron Metallography

Relations

• Replaces: ASTM E766-14 - Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
• Effective Date: 01-Jan-2014
• Replaced By: ASTM E766-14(2019) - Standard Practice for Calibrating the Magnification of a Scanning Electron Microscope
• Effective Date: 01-Nov-2019
• Referred By: ASTM E2809-22 - Standard Guide for Using Scanning Electron Microscopy/Energy Dispersive X-Ray Spectroscopy (SEM/EDS) in Forensic Polymer Examinations
• Effective Date: 01-Jan-2014
• Referred By: ASTM E384-22 - Standard Test Method for Microindentation Hardness of Materials
• Effective Date: 01-Jan-2014
• Referred By: ASTM B874-96(2018) - Standard Specification for Chromium Diffusion Coating Applied by Pack Cementation Process
• Effective Date: 01-Jan-2014
• Referred By: ASTM F1877-16 - Standard Practice for Characterization of Particles
• Effective Date: 01-Jan-2014
• Referred By: ASTM E2627-13(2019) - Standard Practice for Determining Average Grain Size Using Electron Backscatter Diffraction (EBSD) in Fully Recrystallized Polycrystalline Materials
• Effective Date: 01-Jan-2014
• Referred By: ASTM B748-90(2021) - Standard Test Method for Measurement of Thickness of Metallic Coatings by Measurement of Cross Section with a Scanning Electron Microscope
• Effective Date: 01-Jan-2014
• Referred By: ASTM E2142-08(2015) - Standard Test Methods for Rating and Classifying Inclusions in Steel Using the Scanning Electron Microscope
• Effective Date: 01-Jan-2014
• Referred By: ASTM E986-04(2017) - Standard Practice for Scanning Electron Microscope Beam Size Characterization
• Effective Date: 01-Jan-2014

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
´1
Designation:E766 −14
Standard Practice for
Calibrating the Magnification of a Scanning Electron
1
Microscope
This standard is issued under the fixed designation E766; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1
ε NOTE—Note 1 in Figure 1 was editorially corrected in May 2016.
1. Scope 2.2 ISO Standard:
ISOGuide30:1992TermsandDefinitionsUsedinConnec-
1.1 This practice covers general procedures necessary for
4
tion with Reference Materials
the calibration of magnification of scanning electron micro-
scopes. The relationship between true magnification and indi-
3. Terminology
cated magnification is a complicated function of operating
3.1 Definitions:
2
conditions. Therefore,thispracticemustbeappliedtoeachset
3.1.1 For definitions of metallographic terms used in this
of standard operating conditions to be used.
practice see Terminology E7.
1.2 The values stated in SI units are to be regarded as
3.1.2 The definitions related to statistical analysis of date
standard. No other units of measurement are included in this
appearing in Practice E177, Terminology E456, and Practice
standard.
E691 shall be considered as appropriate to the terms used in
this practice.
1.3 This standard does not purport to address all of the
3.2 Definitions of Terms Specific to This Standard:
safety concerns, if any, associated with its use. It is the
3.2.1 calibration—the set of operations which establish,
responsibility of the user of this standard to establish appro-
under specified conditions, the relationship between magnifi-
priate safety and health practices and determine the applica-
cation values indicated by the SEM and the corresponding
bility of regulatory limitations prior to use.
magnificationvaluesdeterminedbyexaminationofareference
2. Referenced Documents
material.
3
2.1 ASTM Standards: 3.2.2 calibration method—a technical procedure for per-
E7Terminology Relating to Metallography forming a calibration.
E29Practice for Using Significant Digits in Test Data to
3.2.3 certified reference material—reference material, ac-
Determine Conformance with Specifications
companied by a certificate, one or more of whose property
E177Practice for Use of the Terms Precision and Bias in
values are certified by a procedure which establishes its
ASTM Test Methods
traceability to an accurate realization of the unit in which the
E456Terminology Relating to Quality and Statistics
property values are expressed, and for which each certified
E691Practice for Conducting an Interlaboratory Study to
value is accompanied by an uncertainty at a stated level of
Determine the Precision of a Test Method
confidence (see ISO Guide 30:1992).
3.2.4 pitch—the separation of two similar structures, mea-
1
sured as the center to center or edge to edge distance.
This practice is under the jurisdiction of ASTM Committee E04 on Metallog-
raphy and is the direct responsibility of Subcommittee E04.11 on X-Ray and
3.2.5 reference material—a material or substance one or
Electron Metallography.
more of whose property values are sufficiently homogeneous,
Current edition approved Jan. 1, 2014. Published March 2014. Originally
ε1
stable, and well established to be used for the calibration of an
approved in 1980. Last previous edition approved in 2008 as E766–98(2008) .
DOI: 10.1520/E0766-14E01.
apparatus, the assessment of a measurement method, or for
2
See Annex A1.
assigning values to materials (see ISO Guide 30:1992).
3
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
4
Standards volume information, refer to the standard’s Document Summary page on Available fromAmerican National Standards Institute (ANSI), 25 W. 43rd St.,
the ASTM website. 4th Floor, New York, NY 10036, http://www.ansi.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
´1
E766−14
3.2.6 reference standard—a reference material, generally of 5.4.3 Made from materials which provide good contrast for
the highest metrological quality available, from which mea- the various imaging modes, especially secondary electron and
surements are derived. backscatter electron imaging.
5.4.4 Made of or coated with electrically conductive, elec-
3.2.7 traceability—the property of a result of a measure-
tron beam stable materials, and
ment whereby it can be related to appropriate international/
5.4.5 Made of materials which can be cleaned to remove
national standards through an unbroken chain of comparisons.
...

This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
´1
Designation: E766 − 14 E766 − 14
Standard Practice for
Calibrating the Magnification of a Scanning Electron
1
Microscope
This standard is issued under the fixed designation E766; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1
ε NOTE—Note 1 in Figure 1 was editorially corrected in May 2016.
1. Scope
1.1 This practice covers general procedures necessary for the calibration of magnification of scanning electron microscopes. The
2
relationship between true magnification and indicated magnification is a complicated function of operating conditions. Therefore,
this practice must be applied to each set of standard operating conditions to be used.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
3
2.1 ASTM Standards:
E7 Terminology Relating to Metallography
E29 Practice for Using Significant Digits in Test Data to Determine Conformance with Specifications
E177 Practice for Use of the Terms Precision and Bias in ASTM Test Methods
E456 Terminology Relating to Quality and Statistics
E691 Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method
2.2 ISO Standard:
4
ISO Guide 30: 1992 Terms and Definitions Used in Connection with Reference Materials
3. Terminology
3.1 Definitions:
3.1.1 For definitions of metallographic terms used in this practice see Terminology E7.
3.1.2 The definitions related to statistical analysis of date appearing in Practice E177, Terminology E456, and Practice E691
shall be considered as appropriate to the terms used in this practice.
3.2 Definitions of Terms Specific to This Standard:
3.2.1 calibration—the set of operations which establish, under specified conditions, the relationship between magnification
values indicated by the SEM and the corresponding magnification values determined by examination of a reference material.
3.2.2 calibration method—a technical procedure for performing a calibration.
3.2.3 certified reference material—reference material, accompanied by a certificate, one or more of whose property values are
certified by a procedure which establishes its traceability to an accurate realization of the unit in which the property values are
expressed, and for which each certified value is accompanied by an uncertainty at a stated level of confidence (see ISO Guide
30:1992).
1
This practice is under the jurisdiction of ASTM Committee E04 on Metallography and is the direct responsibility of Subcommittee E04.11 on X-Ray and Electron
Metallography.
ε1
Current edition approved Jan. 1, 2014. Published March 2014. Originally approved in 1980. Last previous edition approved in 2008 as E766 – 98(2008) . DOI:
10.1520/E0766-14.
2
See Annex A1.
3
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
4
Available from American National Standards Institute (ANSI), 25 W. 43rd St., 4th Floor, New York, NY 10036, http://www.ansi.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1

---------------------- Page: 1 ----------------------
´1
E766 − 14
3.2.4 pitch—the separation of two similar structures, measured as the center to center or edge to edge distance.
3.2.5 reference material—a material or substance one or more of whose property values are sufficiently homogeneous, stable,
and well established to be used for the calibration of an apparatus, the assessment of a measurement method, or for assigning values
to materials (see ISO Guide 30:1992).
3.2.6 reference standard—a reference material, generally of the highest metrological quality available, from which measure-
ments are derived.
3.2.7 traceability—the property of a result of a measurement whereby it can be related to appropriate international/national
standards through an unbroken chain of compari
...