Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.
ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-3:2005)

Dieser Teil von ISO 14644 legt Prüfverfahren für die entsprechend bezeichnete Klassifikation der Reinheit von luftgetragenen Teilchen und zur Beschreibung der Leistung von Reinräumen und reinen Bereichen fest. Es werden Leistungsprüfungen für zwei Arten von Reinräumen und reinen Bereichen festgelegt, solche mit turbulenzarmer Strömung und solche mit turbulenter Strömung. Es werden drei Betriebszustände betrachtet: Bereitstellung, Leerlauf, Fertigung. Die Prüfverfahren empfehlen Prüfgeräte und Prüfverfahren zur Bestimmung von Kenngrößen für die Leistung. Wo das Prüfverfahren durch die Art des Reinraums oder reinen Bereichs beeinflusst wird, werden alternative Verfahren vorgeschlagen. Für einige Prüfungen werden mehrere unterschiedliche Verfahren und Geräte empfohlen, so dass verschiedenen Nutzungsarten Rechnung getragen werden kann. Soweit zwischen Kunden und Lieferanten vereinbart, dürfen auch alternative nicht in diesem Teil von ISO 14644 beschriebene Verfahren angewendet werden. Solche Verfahren liefern nicht zwingend gleichwertige Messungen.
Dieser Teil von ISO 14644 ist nicht auf die Messung von Produkten oder Prozessen in Reinräumen oder reinen Bereichen anwendbar.

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai (ISO 14644-3:2005)

L'ISO 14644-3:2005 spécifie des méthodes d'essai pour la classification de la propreté particulaire de l'air et pour caractériser les performances des salles propres et des zones propres. Des essais de performance sont spécifiés pour deux types de salles propres et de zones propres: des essais mettant en oeuvre un écoulement soit unidirectionnel, soit non unidirectionnel et dans trois états possibles d'occupation: après construction, au repos et en activité.
L'ISO 14644-3:2005 ne s'applique pas au mesurage effectué sur des produits ou des procédés situés dans les salles propres ou dans les dispositifs séparatifs.

Čiste sobe in podobna nadzorovana okolja – 3. del: Preskusne metode (ISO 14644-3:2005)

General Information

Status
Withdrawn
Publication Date
14-Dec-2005
Withdrawal Date
15-Oct-2019
Current Stage
9960 - Withdrawal effective - Withdrawal
Completion Date
16-Oct-2019

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Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-

3:2005)
Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-
3:2005)

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai

(ISO 14644-3:2005)
Ta slovenski standard je istoveten z: EN ISO 14644-3:2005
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-3:2006 en

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-3:2006
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SIST EN ISO 14644-3:2006
EUROPEAN STANDARD
EN ISO 14644-3
NORME EUROPÉENNE
EUROPÄISCHE NORM
December 2005
ICS 13.040.35
English Version
Cleanrooms and associated controlled environments - Part 3:
Test methods (ISO 14644-3:2005)

Salles propres et environnements maîtrisés apparentés - Reinräume und zugehörige Reinraumbereiche - Teil 3:

Partie 3: Méthodes d'essai (ISO 14644-3:2005) Prüfverfahren (ISO 14644-3:2005)
This European Standard was approved by CEN on 12 September 2005.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European

Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national

standards may be obtained on application to the Central Secretariat or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation

under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official

versions.

CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,

Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia,

Slovenia, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36 B-1050 Brussels

© 2005 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-3:2005: E

worldwide for CEN national Members.
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SIST EN ISO 14644-3:2006
EN ISO 14644-3:2005 (E)
Foreword

This document (EN ISO 14644-3:2005) has been prepared by Technical Committee ISO/TC 209

"Cleanrooms and associated controlled environments" in collaboration with Technical Committee

CEN/TC 243 "Cleanroom technology", the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of

an identical text or by endorsement, at the latest by June 2006, and conflicting national

standards shall be withdrawn at the latest by June 2006.

According to the CEN/CENELEC Internal Regulations, the national standards organizations of

the following countries are bound to implement this European Standard: Austria, Belgium,

Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary,

Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,

Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.
Endorsement notice

The text of ISO 14644-3:2005 has been approved by CEN as EN ISO 14644-3:2005 without any

modifications.
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SIST EN ISO 14644-3:2006
INTERNATIONAL ISO
STANDARD 14644-3
First edition
2005-12-15
Cleanrooms and associated controlled
environments —
Part 3:
Test methods
Salles propres et environnements maîtrisés apparentés —
Partie 3: Méthodes d'essai
Reference number
ISO 14644-3:2005(E)
ISO 2005
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
PDF disclaimer

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© ISO 2005

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,

electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or

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Published in Switzerland
ii © ISO 2005 – All rights reserved
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
Contents Page

Foreword............................................................................................................................................................ iv

Introduction ........................................................................................................................................................ v

1 Scope ..................................................................................................................................................... 1

2 Normative references ........................................................................................................................... 1

3 Terms and definitions........................................................................................................................... 2

3.1 General................................................................................................................................................... 2

3.2 Airborne particle measurement........................................................................................................... 2

3.3 Air filters and systems ......................................................................................................................... 4

3.4 Airflow and other physical states ....................................................................................................... 5

3.5 Electrostatic measurement.................................................................................................................. 5

3.6 Measuring apparatus and measuring conditions.............................................................................. 6

3.7 Occupancy states ................................................................................................................................. 7

4 Test procedures .................................................................................................................................... 8

4.1 Cleanroom tests.................................................................................................................................... 8

4.2 Principle................................................................................................................................................. 9

5 Test reports ......................................................................................................................................... 11

Annex A (informative) Choice of recommended tests of an installation and the sequence in which

to carry them out................................................................................................................................. 12

Annex B (informative) Test methods.............................................................................................................. 16

Annex C (informative) Test apparatus............................................................................................................ 51

Bibliography ..................................................................................................................................................... 64

© ISO 2005 – All rights reserved iii
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies

(ISO member bodies). The work of preparing International Standards is normally carried out through ISO

technical committees. Each member body interested in a subject for which a technical committee has been

established has the right to be represented on that committee. International organizations, governmental and

non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the

International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.

The main task of technical committees is to prepare International Standards. Draft International Standards

adopted by the technical committees are circulated to the member bodies for voting. Publication as an

International Standard requires approval by at least 75 % of the member bodies casting a vote.

Attention is drawn to the possibility that some of the elements of this document may be the subject of patent

rights. ISO shall not be held responsible for identifying any or all such patent rights.

ISO 14644-3 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled

environements.

ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled

environments:
⎯ Part 1: Classification of air cleanliness

⎯ Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

⎯ Part 3: Test methods
⎯ Part 4: Design, construction and start-up
⎯ Part 5: Operations

⎯ Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)

⎯ Part 8: Classification of airborne molecular contamination
The following part is under preparation:
⎯ Part 6: Vocabulary
iv © ISO 2005 – All rights reserved
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
Introduction

Cleanrooms and associated controlled environments provide for the control of airborne contamination to levels

appropriate for accomplishing contamination-sensitive activities. Products and processes that benefit from the

control of airborne contamination include those in such industries as aerospace, microelectronics,

pharmaceuticals, medical devices, healthcare and food.

This part of ISO 14644 sets out test methods that may be used for the purpose of characterizing a cleanroom

as described and specified in other parts of ISO 14644.

NOTE Not all cleanroom parameter test procedures are shown in this part of ISO 14644. The procedures and

apparatus to characterize other parameters, of concern in cleanrooms and clean zones used for specific products or

processes, are discussed elsewhere in other documents prepared by ISO/TC 209 [for example, procedures for control and

measurement of viable materials (ISO 14698), testing cleanroom functionality (ISO 14644-4), and testing of separative

devices (ISO 14644-7)]. In addition, other standards can be considered to be applicable.

Statements in this part of ISO 14644 reference the standards of ASTM, CEN, DIN, IEST, JACA, JIS and SEMI.

© ISO 2005 – All rights reserved v
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SIST EN ISO 14644-3:2006
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SIST EN ISO 14644-3:2006
INTERNATIONAL STANDARD ISO 14644-3:2005(E)
Cleanrooms and associated controlled environments —
Part 3:
Test methods

WARNING — The use of this part of ISO 14644 may involve hazardous materials, operations and

equipment. This part of ISO 14644 does not purport to address all of the safety problems associated

with its use. It is the responsibility of the user of this part of ISO 14644 to establish appropriate safety

and health practices and to determine the applicability of regulatory limitations prior to use.

1 Scope

This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness

and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for

two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow,

in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test

apparatus and test procedures for determining performance parameters. Where the test method is affected by

the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several

different methods and apparatus are recommended to accommodate different end-use considerations.

Alternative methods not included in this part of ISO 14644 may be used if based on agreement between

customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or

separative devices.
2 Normative references

The following referenced documents are indispensable for the application of this document. For dated

references, only the edition cited applies. For undated references, the latest edition of the referenced

document (including any amendments) applies.

ISO 7726:1998, Ergonomics of the thermal environment — Instruments for measuring physical quantities

ISO 14644-1:1999, Cleanrooms and associated controlled environments — Part 1: Classification of air

cleanliness

ISO 14644-2:2000, Cleanrooms and associated controlled environments — Part 2: Specifications for testing

and monitoring to prove continued compliance with ISO 14644-1

ISO 14644-4:2001, Cleanrooms and associated controlled environments — Part 4: Design, construction and

start-up
© ISO 2005 – All rights reserved 1
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1 General
3.1.1
cleanroom

room in which the concentration of airborne particles is controlled, and which is constructed and used in a

manner to minimize the introduction, generation and retention of particles inside the room, and in which other

relevant parameters, e.g. temperature, humidity and pressure, are controlled as necessary

[ISO 14644-1:1999, 2.1.1]
3.1.2
clean zone

dedicated space in which the concentration of airborne particles is controlled, and which is constructed and

used in a manner to minimize the introduction, generation and retention of particles inside the zone, and in

e.g.

which other relevant parameters, temperature, humidity and pressure, are controlled as necessary

NOTE This zone may be open or enclosed, and may or may not be located within a cleanroom.

[ISO 14644-1:1999, 2.1.2]
3.1.3
installation

cleanroom or one or more clean zones, together with all associated structures, air-treatment systems,

services, and utilities
[ISO 14644-1:1999, 2.1.3]
3.1.4
separative device

equipment utilizing constructional and dynamic means to create assured levels of separation between the

inside and outside of a defined volume

NOTE Some industry-specific examples of separative devices are clean air hoods, containment enclosures, glove

boxes, isolators and mini-environments.
3.2 Airborne particle measurement
3.2.1
aerosol generator
e.g.

instrument capable of generating particulate matter having appropriate size range ( 0,05 µm to 2 µm) at a

constant concentration, which may be produced by thermal, hydraulic, pneumatic, acoustic or electrostatic

means
3.2.2
airborne particle

solid or liquid object suspended in air, viable or non-viable, sized (for the purpose of this part of ISO 14644)

between 1 nm and 100 µm
NOTE For classification purposes, refer to ISO 14644-1:1999, 2.2.1.
3.2.3
count median particle diameter
CMD
median particle diameter based on the number of particles

NOTE For the count median, one half of the particle number is contributed by the particles with a size smaller than

the count median size, and one half by particles larger than the count median size.

2 © ISO 2005 – All rights reserved
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.2.4
macroparticle
particle with an equivalent diameter greater than 5 µm
[ISO 14644-1:1999, 2.2.6]
3.2.5
M descriptor

measured or specified concentration of macroparticles per cubic metre of air, expressed in terms of the

equivalent diameter that is characteristic of the measurement method used

NOTE The M descriptor may be regarded as an upper limit for the averages at sampling locations (or as an upper

confidence limit, depending upon the number of sampling locations used to characterize the cleanroom or clean zone).

M descriptors cannot be used to define airborne particulate cleanliness classes, but they may be quoted independently or

in conjunction with airborne particulate cleanliness classes.
[ISO 14644-1:1999, 2.3.2]
3.2.6
mass median particle diameter
MMD
median particle diameter based on the particle mass

NOTE For the mass median, one half of mass of all particles is contributed by particles with a size smaller than the

mass median size, and one half by particles larger than the mass median size.
3.2.7
particle concentration
number of individual particles per unit volume of air
[ISO 14644-1:1999, 2.2.3]
3.2.8
particle size

diameter of a sphere that produces a response, by a given particle-sizing instrument, that is equivalent to the

response produced by the particle being measured

NOTE For discrete-particle-counting, light-scattering instruments, the equivalent optical diameter is used.

[ISO 14644-1:1999, 2.2.2]
3.2.9
particle size distribution
cumulative distribution of particle concentration as a function of particle size
[ISO 14644-1:1999, 2.2.4]
3.2.10
test aerosol

gaseous suspension of solid and/or liquid particles with known and controlled size distribution and

concentration
3.2.11
U descriptor

measured or specified concentration in particles per cubic metre or air, including the ultrafine particles

NOTE The U descriptor may be regarded as an upper limit for the averages at sampling locations (or as an upper

confidence limit, depending upon the number of sampling locations used to characterize the cleanroom or clean zone).

U descriptors cannot be used to define airborne particulate cleanliness classes, but they may be quoted independently or

in conjunction with airborne particulate cleanliness classes.
[ISO 14644-1:1999, 2.3.1]
© ISO 2005 – All rights reserved 3
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.2.12
ultrafine particle
particle with an equivalent diameter less than 0,1 µm
[ISO 14644-1:1999, 2.2.5]
3.3 Air filters and systems
3.3.1
aerosol challenge
challenging of a filter or an installed filter system by test aerosol
3.3.2
designated leak

maximum allowable penetration, which is determined by agreement between customer and supplier, through

a leak, detectable during scanning of an installation with discrete-particle counters or aerosol photometers

3.3.3
dilution system

system wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce

concentration
3.3.4
filter system
system composed of filter, frame and other support system or other housing
3.3.5
final filter
filters in a final position before the air enters the cleanroom
3.3.6
installed filter system
filter system mounted in the ceiling, wall, apparatus or duct
3.3.7
installed filter system leakage test

test performed to confirm that the filters are properly installed by verifying that there is absence of bypass

leakage in the installation, and that the filters and the grid system are free of defects and leaks

3.3.8
leak

〈of air filter system〉 penetration of contaminants that exceed an expected value of downstream concentration

through lack of integrity or defects
3.3.9
scanning

method for disclosing leaks in filters and parts of units, whereby the probe inlet of an aerosol photometer or

discrete-particle counter is moved in overlapping strokes across the defined test area

3.3.10
standard leak penetration

leak penetration detected by a discrete-particle counter or aerosol photometer with a standard sample flow-

rate when the sampling probe is stationary in front of the leak

NOTE Penetration is the ratio of the particle concentration downstream of the filter to the concentration upstream.

4 © ISO 2005 – All rights reserved
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.4 Airflow and other physical states
3.4.1
air exchange rate

rate of air exchange expressed as number of air changes per unit of time and calculated by dividing the

volume of air delivered in the unit of time by the volume of the space
3.4.2
average airflow rate

averaged volume of air per unit of time, to determine the air exchange rate in a cleanroom or clean zone

NOTE Airflow rate is expressed in cubic metres per hour (m /h).
3.4.3
measuring plane

cross-sectional area for testing or measuring a performance parameter such as the airflow velocity

3.4.4
non-unidirectional airflow

air distribution where the supply air entering the clean zone mixes with the internal air by means of induction

[ISO 14644-4:2001, 3.6]
3.4.5
supply airflow rate

air volume supplied into an installation from final filters or air ducts in unit of time

3.4.6
total airflow rate
air volume that passes through a section of an installation in unit of time
3.4.7
unidirectional airflow

controlled airflow through the entire cross-section of a clean zone with a steady velocity and approximately

parallel streamlines

NOTE This type of airflow results in a directed transport of particles from the clean zone.

[ISO 14644-4:2001, 3.11]
3.4.8
uniformity of airflow

unidirectional airflow pattern in which the point-to-point readings of velocities are within a defined percentage

of the average airflow velocity
3.5 Electrostatic measurement
3.5.1
discharge time

time required to reduce the voltage to the level, positive or negative, to which an isolated conductive

monitoring plate was originally charged
3.5.2
offset voltage

voltage that will accumulate upon an initially uncharged isolated conductive plate when that plate is exposed

to an ionized air environment
© ISO 2005 – All rights reserved 5
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.5.3
static-dissipative property

capability for reducing electrostatic charge on work or product surface, as a result of conduction or other

mechanism to a specific value or nominal zero charge level
3.5.4
surface voltage level

positive or negative voltage level of electrostatic charging on work or product surface, as indicated by use of

suitable apparatus
3.6 Measuring apparatus and measuring conditions
3.6.1
aerosol photometer

light-scattering airborne particle mass concentration measuring apparatus, which uses a forward-scattered-

light optical chamber to make measurements
3.6.2
anisokinetic sampling

sampling condition in which the mean velocity of the air entering the sample probe inlet is significantly different

from the mean velocity of the unidirectional airflow at that location
3.6.3
cascade impactor

sampling device, which collects particles from an aerosol using the principle of impaction upon a series of

collector surfaces

NOTE Each successive collector surface is exposed to an aerosol stream flowing at a higher velocity than was the

previous one, thus allowing collection of smaller particles than the previous one.

3.6.4
condensation nucleus counter
CNC

instrument that is capable of enlarging ultrafine particles by means of condensation for subsequent counting

using optical particle counting techniques
3.6.5
counting efficiency

ratio of the reported concentration of particles in a given size range to the actual concentration of such

particles
3.6.6
differential mobility analyzer
DMA

instrument for measuring the particle size distribution, based on the electrical mobility of particles

3.6.7
diffusion battery element

individual component from a multi-stage particle size cutoff device, operating on the principle of diffusion to

remove smaller particles from an aerosol stream
3.6.8
discrete-particle counter
DPC

instrument having a means of displaying and recording the count and size of discrete particles (with a size

discrimination) for specific air volume
6 © ISO 2005 – All rights reserved
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.6.9
false count
background noise count
zero count

count produced by a discrete-particle counter (DPC) due to internal or external unwanted electronic signal

when no particles exist
3.6.10
flowhood with flowmeter

device with apparatus to directly measure the airflow volume at each final filter or air diffuser in an installation,

set up to completely cover the filter or diffuser
3.6.11
iso-axial sampling

sampling condition in which the direction of the airflow into the sample probe inlet is the same as that of the

unidirectional airflow being sampled
3.6.12
isokinetic sampling

sampling condition in which the mean velocity of the air entering the sample probe inlet is the same as the

mean velocity of the unidirectional airflow at that location
3.6.13
particle size cutoff device

device capable of removing particles smaller than those of interest that is attached to the inlet of a DPC or

CNC
3.6.14
threshold size

selected minimum particle size chosen for measuring a concentration of particles larger than or equal to that

size
3.6.15
time-of-flight particle size measurement

measurement of aerodynamic particle diameter determined by the time required for travelling the distance of

two fixed planes

NOTE This measurement utilizes the particle velocity shift caused when a particle is introduced into the flow field with

different velocity.
3.6.16
virtual impactor

instrument to separate the particle sizing by inertial force to collide on the hypothetical (virtual) surface

NOTE Large particles pass through the surface into a stagnant volume and small particles deflected with the bulk of

the original airflow.
3.6.17
witness plate

contamination-sensitive material of defined surface area used in lieu of direct evaluation of a specific surface

that is either inaccessible or too sensitive to be handled
3.7 Occupancy states
3.7.1
as-built

condition where the installation is complete with all services connected and functioning but with no production

equipment, materials, or personnel present
[ISO 14644-1:1999, 2.4.1]
© ISO 2005 – All rights reserved 7
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SIST EN ISO 14644-3:2006
ISO 14644-3:2005(E)
3.7.2
at-rest

condition where the installation is complete with equipment installed and operating in a manner agreed upon

by the customer and supplier, but with no personnel present
[ISO 14644-1:1999, 2.4.2]
3.7.3
operational

condition where the installation is functioning in the specified manner, with the specified number of personnel

present and working in the manner agreed upon
[ISO 14644-1:1999, 2.4.3]
4 Test procedures
4.1 Cleanroom tests
4.1.1 Required test

An airborne particle count test (see Table 1) shall be carried out in order to classify an installation in

accordance with ISO 14644-1, at the time intervals specified in ISO 14644-2.
Table 1 — Required test for installation
Reference in ISO 14644-3:2005
Required tests Referenced in
Principle Procedure Apparatus
Airborne particle count for classification
ISO 14644-1 and
and test measurement of cleanrooms and 4.2.1 B.1 C.1
ISO 14644-2
clean air devices
4.1.2 Optional tests

Table 2 lists other tests appropriate for testing of an installation. These tests can be applied in each of the

three designated occupancy states. These tests may not be all-inclusive, nor may all of the tests be required

for any given certification project. Tests and test methods should be selected in a manner agreed between the

customer and supplier. Selected tests can also be repeated on a regular basis as part of a routine facility

monitoring program (see ISO 14644-2). Guidelines for the selection of tests and a

...

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