EN ISO 14644-3:2005

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.
ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-3:2005)

Dieser Teil von ISO 14644 legt Prüfverfahren für die entsprechend bezeichnete Klassifikation der Reinheit von luftgetragenen Teilchen und zur Beschreibung der Leistung von Reinräumen und reinen Bereichen fest. Es werden Leistungsprüfungen für zwei Arten von Reinräumen und reinen Bereichen festgelegt, solche mit turbulenzarmer Strömung und solche mit turbulenter Strömung. Es werden drei Betriebszustände betrachtet: Bereitstellung, Leerlauf, Fertigung. Die Prüfverfahren empfehlen Prüfgeräte und Prüfverfahren zur Bestimmung von Kenngrößen für die Leistung. Wo das Prüfverfahren durch die Art des Reinraums oder reinen Bereichs beeinflusst wird, werden alternative Verfahren vorgeschlagen. Für einige Prüfungen werden mehrere unterschiedliche Verfahren und Geräte empfohlen, so dass verschiedenen Nutzungsarten Rechnung getragen werden kann. Soweit zwischen Kunden und Lieferanten vereinbart, dürfen auch alternative nicht in diesem Teil von ISO 14644 beschriebene Verfahren angewendet werden. Solche Verfahren liefern nicht zwingend gleichwertige Messungen.
Dieser Teil von ISO 14644 ist nicht auf die Messung von Produkten oder Prozessen in Reinräumen oder reinen Bereichen anwendbar.

Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai (ISO 14644-3:2005)

L'ISO 14644-3:2005 spécifie des méthodes d'essai pour la classification de la propreté particulaire de l'air et pour caractériser les performances des salles propres et des zones propres. Des essais de performance sont spécifiés pour deux types de salles propres et de zones propres: des essais mettant en oeuvre un écoulement soit unidirectionnel, soit non unidirectionnel et dans trois états possibles d'occupation: après construction, au repos et en activité.
L'ISO 14644-3:2005 ne s'applique pas au mesurage effectué sur des produits ou des procédés situés dans les salles propres ou dans les dispositifs séparatifs.

Čiste sobe in podobna nadzorovana okolja – 3. del: Preskusne metode (ISO 14644-3:2005)

General Information

• Status: Withdrawn
• Publication Date: 14-Dec-2005
• Withdrawal Date: 15-Oct-2019
• ICS: 13.040.35 - Cleanrooms and associated controlled environments
• Technical Committee: CEN/TC 243 - Cleanroom technology
• Drafting Committee: CEN/TC 243 - Cleanroom technology
• Current Stage: 9960 - Withdrawal effective - Withdrawal
• Completion Date: 16-Oct-2019
• Ref Project: SIST EN ISO 14644-3:2006 - Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005)

Relations

• Replaced By: EN ISO 14644-3:2019 - Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2019, Corrected version 2020-06)
• Effective Date: 23-Oct-2019

Standards Content (Sample)

SLOVENSKI STANDARD
01-september-2006
ýLVWHVREHLQSRGREQDQDG]RURYDQDRNROMD±GHO3UHVNXVQHPHWRGH,62

Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-
3:2005)
Reinräume und zugehörige Reinraumbereiche - Teil 3: Prüfverfahren (ISO 14644-
3:2005)
Salles propres et environnements maîtrisés apparentés - Partie 3: Méthodes d'essai
(ISO 14644-3:2005)
Ta slovenski standard je istoveten z: EN ISO 14644-3:2005
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 14644-3
NORME EUROPÉENNE
EUROPÄISCHE NORM
December 2005
ICS 13.040.35
English Version
Cleanrooms and associated controlled environments - Part 3:
Test methods (ISO 14644-3:2005)
Salles propres et environnements maîtrisés apparentés - Reinräume und zugehörige Reinraumbereiche - Teil 3:
Partie 3: Méthodes d'essai (ISO 14644-3:2005) Prüfverfahren (ISO 14644-3:2005)
This European Standard was approved by CEN on 12 September 2005.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the Central Secretariat or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official
versions.
CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,
Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia,
Slovenia, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36  B-1050 Brussels
© 2005 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-3:2005: E
worldwide for CEN national Members.

Foreword
This document (EN ISO 14644-3:2005) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 "Cleanroom technology", the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of
an identical text or by endorsement, at the latest by June 2006, and conflicting national
standards shall be withdrawn at the latest by June 2006.

According to the CEN/CENELEC Internal Regulations, the national standards organizations of
the following countries are bound to implement this European Standard: Austria, Belgium,
Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary,
Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,
Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.

Endorsement notice
The text of ISO 14644-3:2005 has been approved by CEN as EN ISO 14644-3:2005 without any
modifications.
INTERNATIONAL ISO
STANDARD 14644-3
First edition
2005-12-15
Cleanrooms and associated controlled
environments —
Part 3:
Test methods
Salles propres et environnements maîtrisés apparentés —
Partie 3: Méthodes d'essai
Reference number
ISO 14644-3:2005(E)
©
ISO 2005
ISO 14644-3:2005(E)
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ii © ISO 2005 – All rights reserved

ISO 14644-3:2005(E)
Contents Page
Foreword. iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions. 2
3.1 General. 2
3.2 Airborne particle measurement. 2
3.3 Air filters and systems . 4
3.4 Airflow and other physical states . 5
3.5 Electrostatic measurement. 5
3.6 Measuring apparatus and measuring conditions. 6
3.7 Occupancy states . 7
4 Test procedures . 8
4.1 Cleanroom tests. 8
4.2 Principle. 9
5 Test reports . 11
Annex A (informative) Choice of recommended tests of an installation and the sequence in which
to carry them out. 12
Annex B (informative) Test methods. 16
Annex C (informative) Test apparatus. 51
Bibliography . 64

ISO 14644-3:2005(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 14644-3 was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environements.
ISO 14644 consists of the following parts, under the general title Cleanrooms and associated controlled
environments:
⎯ Part 1: Classification of air cleanliness
⎯ Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
⎯ Part 3: Test methods
⎯ Part 4: Design, construction and start-up
⎯ Part 5: Operations
⎯ Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
⎯ Part 8: Classification of airborne molecular contamination
The following part is under preparation:
⎯ Part 6: Vocabulary
iv © ISO 2005 – All rights reserved

ISO 14644-3:2005(E)
Introduction
Cleanrooms and associated controlled environments provide for the control of airborne contamination to levels
appropriate for accomplishing contamination-sensitive activities. Products and processes that benefit from the
control of airborne contamination include those in such industries as aerospace, microelectronics,
pharmaceuticals, medical devices, healthcare and food.
This part of ISO 14644 sets out test methods that may be used for the purpose of characterizing a cleanroom
as described and specified in other parts of ISO 14644.
NOTE Not all cleanroom parameter test procedures are shown in this part of ISO 14644. The procedures and
apparatus to characterize other parameters, of concern in cleanrooms and clean zones used for specific products or
processes, are discussed elsewhere in other documents prepared by ISO/TC 209 [for example, procedures for control and
measurement of viable materials (ISO 14698), testing cleanroom functionality (ISO 14644-4), and testing of separative
devices (ISO 14644-7)]. In addition, other standards can be considered to be applicable.
Statements in this part of ISO 14644 reference the standards of ASTM, CEN, DIN, IEST, JACA, JIS and SEMI.

INTERNATIONAL STANDARD ISO 14644-3:2005(E)

Cleanrooms and associated controlled environments —
Part 3:
Test methods
WARNING — The use of this part of ISO 14644 may involve hazardous materials, operations and
equipment. This part of ISO 14644 does not purport to address all of the safety problems associated
with its use. It is the responsibility of the user of this part of ISO 14644 to establish appropriate safety
and health practices and to determine the applicability of regulatory limitations prior to use.
1 Scope
This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness
and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for
two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow,
in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test
apparatus and test procedures for determining performance parameters. Where the test method is affected by
the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several
different methods and apparatus are recommended to accommodate different end-use considerations.
Alternative methods not included in this part of ISO 14644 may be used if based on agreement between
customer and supplier. Alternative methods do not necessarily provide equivalent measurements.
This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or
separative devices.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 7726:1998, Ergonomics of the thermal environment — Instruments for measuring physical quantities
ISO 14644-1:1999, Cleanrooms and associated controlled environments — Part 1: Classification of air
cleanliness
ISO 14644-2:2000, Cleanrooms and associated controlled environments — Part 2: Specifications for testing
and monitoring to prove
...