IEC TS 62607-2-5:2022
(Main)Nanomanufacturing - Key control characteristics - Part 2-5: Carbon nanotube materials - Mass density of vertically-aligned carbon nanotubes: X-ray absorption method
Nanomanufacturing - Key control characteristics - Part 2-5: Carbon nanotube materials - Mass density of vertically-aligned carbon nanotubes: X-ray absorption method
IEC TS 62607-2-5:2022 specifies the protocols for determining the mass density of vertically-aligned carbon nanotubes (VACNTs) by X-ray absorption method. This document outlines experimental procedures, data formats, and some case studies. These protocols are applicable to VACNT films with thickness larger than several tens of micrometres. There are no limitations in materials for substrate.
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IEC TS 62607-2-5 ®
Edition 1.0 2022-11
TECHNICAL
SPECIFICATION
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Nanomanufacturing – Key control characteristics –
Part 2-5: Carbon nanotube materials – Mass density of vertically-aligned carbon
nanotubes: X-ray absorption method
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IEC TS 62607-2-5 ®
Edition 1.0 2022-11
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 2-5: Carbon nanotube materials – Mass density of vertically-aligned carbon
nanotubes: X-ray absorption method
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.030; 07.120 ISBN 978-2-8322-6030-2
– 2 – IEC TS 62607-2-5:2022 © IEC 2022
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms, definitions, and abbreviated terms . 7
3.1 Terms and definitions . 7
3.2 Abbreviated terms . 8
4 Measurement of mass density of vertically-aligned carbon nanotubes with X-ray
absorption method . 8
4.1 General . 8
4.2 Measurement principle . 8
4.3 Description of measurement equipment and apparatus . 9
4.4 Sample preparation . 9
4.5 Thickness measurement with X-ray absorption method . 9
4.6 Density measurement with X-ray absorption method . 10
5 Appropriate data formats . 11
Annex A (informative) Case study of mass density measurements for vertically-aligned
carbon nanotubes . 13
A.1 Overview. 13
A.2 Sample preparation for VACNTs . 13
A.3 Confirmation of X-ray incidence parallel to the substrate surface . 13
A.4 Thickness and mass density measurements with transmitted X-ray intensity
profiles . 14
A.5 Measurement results for a VACNT film with a thickness of several hundred
micrometres . 16
A.6 Measurement results for a VACNT film with a thickness of several
millimetres . 18
Bibliography . 20
Figure 1 – Measurement principle of X-ray absorption method . 8
Figure 2 – Parameters determining the spatial resolution of X-ray absorption method . 9
Figure 3 – Example of X-ray projection image of VACNTs grown on Si substrate . 10
Figure 4 – Example of transmitted X-ray intensity profile for VACNT sample . 10
Figure 5 – Example of calibration result for non-monochromatic incident X-ray . 11
Figure A.1 – Schematic drawings of beam alignment procedures for X-ray absorption
measurement . 14
Figure A.2 – X-ray projection images and transmitted X-ray intensity profiles observed
for two VACNT samples . 15
Figure A.3 – Cross-sectional scanning electron microscope images of two VACNT
samples . 16
Figure A.4 – X-ray projection image and transmitted X-ray intensity profile observed for
a thicker VACNT film. 17
Figure A.5 – Cross-sectional scanning electron microscope image of a thicker VACNT
film . 17
Figure A.6 – X-ray projection image and transmitted X-ray intensity profile observed for
a millimetre-thick VACNT film . 19
Figure A.7 – X-ray projection image and mass density profile observed for a millimetre-
thick VACNT film . 19
Table 1 – Possible data format to be given together with density of VACNTs obtained
with X-ray absorption method. 12
Table A.1 – Parameters obtained from the transmitted X-ray intensity profiles for two
VACNT samples . 16
Table A.2 – Parameters obtained from the transmitted X-ray intensity profile for a
thicker VACNT film . 17
– 4 – IEC TS 62607-2-5:2022 © IEC 2022
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING – KEY CONTROL CHARACTERISTICS –
Part 2-5: Carbon nanotube materials – Mass density of vertically-aligned
carbon nanotubes: X-ray absorption method
FOREWORD
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IEC TS 62607-2-5 has been prepared by IEC technical committee 113: Nanotechnology
standardization for electrotechnical products and systems. It is a Technical Specification.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
113/674/DTS 113/696/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 62607 series, published under the general title Nanomanufacturing –
Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
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– 6 – IEC TS 62607-2-5:2022 © IEC 2022
INTRODUCTION
Vertically-aligned carbon nanotubes (VACNTs) are array structures, in wh
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